公开(公告)号：US20140033159A1

公开(公告)日：2014-01-30

申请号：US13559081

申请日：2012-07-26

申请人： Keuing Hui ,  Yen-Wei Cheng ,  Yen-Di Tsen ,  Jong-I Mou ,  Chin-Hsiang Lin

发明人： Keuing Hui ,  Yen-Wei Cheng ,  Yen-Di Tsen ,  Jong-I Mou ,  Chin-Hsiang Lin

IPC分类号： G06F17/50

CPC分类号： G06F17/5068 ,  G06F2217/12 ,  Y02P90/265

摘要： The present disclosure describes a method of optimizing a design for manufacture (DFM) simulation. The method includes receiving an integrated circuit (IC) design data having a feature, receiving a process data having a parameter or a plurality of parameters, performing the DFM simulation, and optimizing the DFM simulation. The performing the DFM simulation includes generating a simulation output data using the IC design data and the process data. The optimizing the DFM simulation includes generating a performance index of the parameter or the plurality of parameters by the DFM simulation. The optimizing the DFM simulation includes adjusting the parameter or the plurality of parameters at outer loop, middle loop, and the inner loop. The optimizing the DFM simulation also includes locating a nadir of the performance index of the parameter or the plurality of parameters over a range of the parameter or the plurality of parameters.

摘要翻译： 本公开描述了优化用于制造（DFM）仿真的设计的方法。 该方法包括接收具有特征的集成电路（IC）设计数据，接收具有参数或多个参数的处理数据，执行DFM仿真和优化DFM仿真。 执行DFM模拟包括使用IC设计数据和过程数据生成模拟输出数据。 优化DFM模拟包括通过DFM仿真生成参数或多个参数的性能指标。 优化DFM模拟包括调整外循环，中间循环和内循环的参数或多个参数。 优化DFM模拟还包括在参数或多个参数的范围内定位参数或多个参数的性能指标的最低点。

公开(公告)号：US08793638B2

公开(公告)日：2014-07-29

申请号：US13559081

申请日：2012-07-26

申请人： Keuing Hui ,  Yen-Wei Cheng ,  Yen-Di Tsen ,  Jong-I Mou ,  Chin-Hsiang Lin

发明人： Keuing Hui ,  Yen-Wei Cheng ,  Yen-Di Tsen ,  Jong-I Mou ,  Chin-Hsiang Lin

IPC分类号： G06F17/50

CPC分类号： G06F17/5068 ,  G06F2217/12 ,  Y02P90/265

摘要： The present disclosure describes a method of optimizing a design for manufacture (DFM) simulation. The method includes receiving an integrated circuit (IC) design data having a feature, receiving a process data having a parameter or a plurality of parameters, performing the DFM simulation, and optimizing the DFM simulation. The performing the DFM simulation includes generating a simulation output data using the IC design data and the process data. The optimizing the DFM simulation includes generating a performance index of the parameter or the plurality of parameters by the DFM simulation. The optimizing the DFM simulation includes adjusting the parameter or the plurality of parameters at outer loop, middle loop, and the inner loop. The optimizing the DFM simulation also includes locating a nadir of the performance index of the parameter or the plurality of parameters over a range of the parameter or the plurality of parameters.

摘要翻译： 本公开描述了优化用于制造（DFM）仿真的设计的方法。 该方法包括接收具有特征的集成电路（IC）设计数据，接收具有参数或多个参数的处理数据，执行DFM仿真和优化DFM仿真。 执行DFM模拟包括使用IC设计数据和过程数据生成模拟输出数据。 优化DFM模拟包括通过DFM仿真生成参数或多个参数的性能指标。 优化DFM模拟包括调整外循环，中间循环和内循环的参数或多个参数。 优化DFM模拟还包括在参数或多个参数的范围内定位参数或多个参数的性能指标的最低点。