公开(公告)号：US5635644A

公开(公告)日：1997-06-03

申请号：US502975

申请日：1995-07-17

申请人： Kohichi Ishikawa ,  Hitoshi Utsumi

发明人： Kohichi Ishikawa ,  Hitoshi Utsumi

IPC分类号： G01B17/02 ,  G01N29/04 ,  G01N29/10

CPC分类号： G01B17/025 ,  G01N2291/02827 ,  G01N2291/0289 ,  G01N2291/044

摘要： An apparatus which measures a thickness of a layer using transverse waves of ultrasonic waves, and includes: a sensor unit having a probe for obliquely transmitting and receiving to and from the surface of a material to be measured having first and second layers with different acoustic impedances in a depth direction: an extractor for extracting, from a wave reception signal representing waves received by the probe, reflected waves from a boundary between the first and the second layers of the material; and a calculator for calculating a distance between the surface of the material and the boundary.

摘要翻译： 一种使用超声波横波测量层的厚度的装置，包括：传感器单元，其具有用于向具有不同声阻抗的第一和第二层的待测材料的表面倾斜地传送和接收的探针， 在深度方向上：提取器，用于从表示由探测器接收的波的波接收信号中提取来自材料的第一和第二层之间边界的反射波; 以及用于计算材料的表面与边界之间的距离的计算器。

公开(公告)号：US5520001A

公开(公告)日：1996-05-28

申请号：US387098

申请日：1995-02-13

申请人： Hideaki Miyamoto ,  Kohichi Ishikawa ,  Takeshi Kawano

发明人： Hideaki Miyamoto ,  Kohichi Ishikawa ,  Takeshi Kawano

IPC分类号： F16K7/14 ,  F16K31/00 ,  F17C9/02

CPC分类号： F16K7/14 ,  F16K31/007 ,  F17C9/02 ,  F17C2205/0385 ,  F17C2223/0153 ,  F17C2225/0123 ,  F17C2227/0393 ,  F17C2227/044 ,  F17C2250/0636 ,  F17C2270/0518

摘要： A vapor controller capable of reducing a thermal influence upon a liquid material to be vaporized as far as possible and always stably controlling a vaporized gas in flow rate in high-speed response and a vapor controller having a vaporizer capable of improving a purge efficiency are provided. A vapor controller in which a vaporizer covered with a diaphragm is formed in a body block including a heater and a temperature sensor while a liquid material inlet passage and a gas outlet passage is formed within said body block so as to be opened on an end face of the body block at one end thereof, respectively, and communicated with said vaporizing chamber at the other end thereof, respectively, said diaphragm being driven by a pressedly driving portion provided in the body block to adjust an openness of an opening facing to the vaporizing chamber of said liquid material inlet passage, said liquid material introduced into the vaporizing chamber through the liquid material inlet passage being vaporized within the vaporizing chamber, and a gas generated by a vaporization being discharged through said gas outlet passage.

摘要翻译： 提供一种蒸汽控制器，其能够尽可能地减少对要蒸发的液体材料的热影响，并且总是在高速响应中始终稳定地控制气化气体的流速，以及具有能够提高吹扫效率的蒸发器的蒸汽控制器 。 一种蒸气控制器，其中在包括加热器和温度传感器的主体块中形成有被隔膜覆盖的蒸发器，同时在所述主体块内形成液体材料入口通道和气体出口通道，以在端面上打开 分别在其另一端与所述蒸发室连通，所述隔膜由设置在所述体块中的压制驱动部分驱动，以调节面向蒸发的开口的开度 所述液体材料入口通道的室，通过液体材料入口通道引入蒸发室的所述液体材料在蒸发室内蒸发，并且通过所述气体出口通道排出通过蒸发产生的气体。

公开(公告)号：US5630878A

公开(公告)日：1997-05-20

申请号：US387216

申请日：1995-02-13

申请人： Hideaki Miyamoto ,  Kohichi Ishikawa ,  Takeshi Kawano

发明人： Hideaki Miyamoto ,  Kohichi Ishikawa ,  Takeshi Kawano

IPC分类号： C23C16/448 ,  C23C16/00

CPC分类号： C23C16/4485

摘要： A liquid flow meter is connected in series with a vaporizer having a vaporizing function and a flow rate-adjusting function and vaporizing a liquid material supplied through said liquid flow meter to compare a flow rate detected by the liquid flow meter with a set value, whereby controlling a quantity of liquid material introduced into a vaporizing chamber provided in said vaporizer on the basis of this comparison result, and thus a flow rate of vaporized gas can be always stably controlled in high-speed response.

摘要翻译： 液体流量计与具有蒸发功能和流量调节功能的蒸发器串联连接并蒸发通过所述液体流量计提供的液体材料，以将由液体流量计检测的流量与设定值进行比较，由此 基于该比较结果控制引入到所述蒸发器中的蒸发室中的液体材料的量，从而可以高速响应地始终稳定地控制汽化气体的流量。