METHOD FOR FABRICATING POLYMERIC WAVELENGTH FILTER
    3.
    发明申请
    METHOD FOR FABRICATING POLYMERIC WAVELENGTH FILTER 审中-公开
    制备聚合物波长滤波器的方法

    公开(公告)号:US20100084261A1

    公开(公告)日:2010-04-08

    申请号:US12246508

    申请日:2008-10-07

    IPC分类号: C23C14/00

    CPC分类号: G02B6/124 G02B6/138

    摘要: The present invention discloses a method for fabricating polymeric wavelength filter, which method for forming gratings patterns on the UV polymer involves three processing steps. First, a gratings pattern is holographically exposed using a two-beam interference pattern on a positive photo-resister film. A 20-nm-thick nickel thin film is then sputtered onto the positive photo-resister film to form a nickel mold. This nickel mold on the photo-resister film then can be subsequently used to transfer the final gratings pattern onto a UV cure epoxy polymer. Whereby, a polymer film can be spun coated on the cure epoxy substrate so as to simplify the fabrication process for obtaining a polymer wavelength filter with good aspect ratio of gratings pattern.

    摘要翻译: 本发明公开了一种用于制造聚合物波长滤光器的方法,其中在UV聚合物上形成光栅图案的方法涉及三个处理步骤。 首先,在正光阻膜上使用双光束干涉图案将光栅图案全息曝光。 然后将20nm厚的镍薄膜溅射到正光电阻膜上以形成镍模。 然后可以将光电阻膜上的该镍模具随后用于将最终光栅图案转印到UV固化环氧聚合物上。 由此,可以将聚合物膜旋涂在固化环氧树脂基板上,以简化用于获得具有良好的光栅长宽比的聚合物波长滤光器的制造工艺。

    POLYMER WAVELENGTH FILTERS WITH HIGH-RESOLUTION PERIODICAL STRUCTURES AND ITS FABRICATION USING REPLICATION PROCESS
    4.
    发明申请
    POLYMER WAVELENGTH FILTERS WITH HIGH-RESOLUTION PERIODICAL STRUCTURES AND ITS FABRICATION USING REPLICATION PROCESS 失效
    具有高分辨率周期结构的聚合物波长滤波器及其使用复制过程的制造

    公开(公告)号:US20090136180A1

    公开(公告)日:2009-05-28

    申请号:US11945973

    申请日:2007-11-27

    IPC分类号: G02B6/26 B29D11/00

    摘要: The present invention discloses a method for fabricating polymer wavelength filter with high-resolution periodical structure, which comprises following steps: (a) a positive photo-resister film is coated on a substrate; (b) a grating pattern is holographically exposed on the positive photo-resister film; (c) the photo-resister film is coated with a negative photo-resister film; (d) the sample is exposed by UV light; (e) develops the sample to obtain a negative waveguide on the photo-resister film having gratings pattern on its bottom to be a waveguide mold; (f) coats a diluted PDMS film on the patterned waveguide mold; (g) bakes the PDMS film to be cured, and peels off from the waveguide mold to be a PDMS mold; (h) places a spacer between the PDMS mold and a thin glass slide to form a first tunnel; (i) injects a precure first UV polymer into the first tunnel; (j) cures the first UV polymer under a broadband UV light; (k) separates the first UV polymer when fully cured, a hardened first UV polymer is formed having a groove with gratings pattern at its bottom for forming a cladding layer of the polymer wavelength filter; (l) a thin layer of a polydimethylsiloxane is spun onto a glass slide, and the glass slide is placed over the groove of the first UV polymer; (m) a second UV polymer is injected into the groove of the first UV polymer; and (n) the second UV polymer is cured by exposing the UV light, and to form the core of the waveguide in the groove of the first UV polymer to finally be the polymer wavelength filter.

    摘要翻译: 本发明公开了一种制造具有高分辨率周期结构的聚合物波长滤波器的方法,包括以下步骤:(a)将正光阻膜涂覆在基片上; (b)光栅图案被全息曝光在正光敏膜上; (c)光阻膜用负光电阻膜涂覆; (d)样品通过紫外光曝光; (e)开发样品以在其底部具有作为波导模具的光栅图案的光电阻膜上获得负波导; (f)在图案化的波导模具上涂覆稀释的PDMS膜; (g)烘烤要固化的PDMS膜,并从波导模具剥离成PDMS模具; (h)在PDMS模具和薄玻璃滑块之间放置间隔件以形成第一隧道; (i)将预固化的第一UV聚合物注入第一隧道; (j)在宽带UV光下固化第一UV聚合物; (k)在完全固化时分离第一UV聚合物,形成具有在其底部具有格栅图案的凹槽的硬化的第一UV聚合物,以形成聚合物波长滤光器的包层; (1)将一薄层的聚二甲基硅氧烷旋转到载玻片上,并将载玻片置于第一UV聚合物的槽上; (m)将第二UV聚合物注入第一UV聚合物的凹槽中; 和(n)第二UV聚合物通过暴露UV光而固化,并在第一UV聚合物的沟槽中形成波导的芯,最终成为聚合物波长滤光器。

    Tunable optical integrated element using liquid crystal as active layer
    5.
    发明申请
    Tunable optical integrated element using liquid crystal as active layer 失效
    可调谐光学集成元件采用液晶作为活性层

    公开(公告)号:US20060055865A1

    公开(公告)日:2006-03-16

    申请号:US10940664

    申请日:2004-09-15

    IPC分类号: G02F1/13

    摘要: The present invention discloses a tunable optical integrated element using liquid crystal as an active layer, which is applied to filters, couplers or optical add/drop multiplexer. The present invention includes a layer of liquid crystal as an active layer, a first waveguide with grating and a second waveguide, an isolation layer, a pair of electrodes. By applying the external voltage to control the direction of the liquid crystal, the refractive index of the waveguide changes in accordance with the modulation of the electric field. Thus invention has the features of simple structure, easy assembling, lower cost and integrating ability.

    摘要翻译: 本发明公开了一种使用液晶作为有源层的可调谐光学集成元件,其被应用于滤波器,耦合器或光分插复用器。 本发明包括作为有源层的液晶层,具有光栅的第一波导和第二波导,隔离层,一对电极。 通过施加外部电压来控制液晶的方向,波导的折射率根据电场的调制而变化。 因此本发明具有结构简单,组装方便,成本低,集成能力强的特点。

    Optical filters based on polymer asymmetric bragg couplers and its method of fabrication
    6.
    发明授权
    Optical filters based on polymer asymmetric bragg couplers and its method of fabrication 失效
    基于聚合物非对称布拉格耦合器的光学滤波器及其制造方法

    公开(公告)号:US08396341B2

    公开(公告)日:2013-03-12

    申请号:US12609025

    申请日:2009-10-30

    IPC分类号: G02B6/00

    摘要: The present invention discloses a method for fabricating an optical filter based on polymer asymmetric bragg couplers using holographic interference techniques, soft lithography, and micro molding, which comprises following steps: prepare a UV polymer with gratings; coating photo-resister film on the UV polymer, and exposed by UV light to obtain a photo-resister mold with two grooves each having gratings; coating diluted PDMS film on the photo-resister mold, and baking the PDMS film to obtain a PDMS mold having two waveguides with gratings; placing glass substrate over the PDMS mold to form a first tunnel; injecting a precure UV polymer into the first tunnel to from a cladding layer with two grooves having gratings pattern at its bottom; placing glass slide over the cladding layer and injecting a mixed UV polymer into the grooves to form waveguide cores; placing a second glass substrate over the cladding layer, and injecting UV polymer to form an upper cladding layer laminated with the cladding layer to obtain the optical filter based on polymer asymmetric bragg couplers.

    摘要翻译: 本发明公开了一种基于聚合物非对称布拉格耦合器的光学滤波器的制造方法,该方法使用全息干涉技术,软光刻技术和微型成型技术,其包括以下步骤:制备具有光栅的UV聚合物; 在紫外线聚合物上涂覆光阻膜,并通过紫外光曝光,得到具有两个光栅的两个凹槽的光阻模具; 在光电吸收模具上涂覆稀释的PDMS膜,并烘烤PDMS膜以获得具有带光栅的两个波导的PDMS模具; 将玻璃基板放置在PDMS模具上以形成第一隧道; 将预固化UV聚合物注入到具有在其底部具有格栅图案的两个凹槽的包层的第一隧道中; 将玻璃载玻片放置在包覆层上,并将混合的UV聚合物注入凹槽中以形成波导芯; 将第二玻璃基板放置在包覆层上,并且注入UV聚合物以形成层叠有包覆层的上包层,以获得基于聚合物不对称布拉格耦合器的滤光器。

    OPTICAL FILTERS BASED ON POLYMER ASYMMETRIC BRAGG COUPLERS AND ITS METHOD OF FABRICATION
    7.
    发明申请
    OPTICAL FILTERS BASED ON POLYMER ASYMMETRIC BRAGG COUPLERS AND ITS METHOD OF FABRICATION 失效
    基于聚合物不对称BRAGG耦合器的光学滤波器及其制造方法

    公开(公告)号:US20110103762A1

    公开(公告)日:2011-05-05

    申请号:US12609025

    申请日:2009-10-30

    IPC分类号: G02B6/00 B29C35/08 G02B6/34

    摘要: The present invention discloses a method for fabricating an optical filter based on polymer asymmetric bragg couplers using holographic interference techniques, soft lithography, and micro molding, which comprises following steps: prepare a UV polymer with gratings; coating photo-resister film on the UV polymer, and exposed by UV light to obtain a photo-resister mold with two grooves each having gratings; coating diluted PDMS film on the photo-resister mold, and baking the PDMS film to obtain a PDMS mold having two waveguides with gratings; placing glass substrate over the PDMS mold to form a first tunnel; injecting a precure UV polymer into the first tunnel to from a cladding layer with two grooves having gratings pattern at its bottom; placing glass slide over the cladding layer and injecting a mixed UV polymer into the grooves to form waveguide cores; placing a second glass substrate over the cladding layer, and injecting UV polymer to form an upper cladding layer laminated with the cladding layer to obtain the optical filter based on polymer asymmetric bragg couplers.

    摘要翻译: 本发明公开了一种基于聚合物非对称布拉格耦合器的光学滤波器的制造方法,该方法使用全息干涉技术,软光刻技术和微型成型技术,其包括以下步骤:制备具有光栅的UV聚合物; 在紫外线聚合物上涂覆光阻膜,并通过紫外光曝光,得到具有两个光栅的两个凹槽的光阻模具; 在光电吸收模具上涂覆稀释的PDMS膜,并烘烤PDMS膜以获得具有带光栅的两个波导的PDMS模具; 将玻璃基板放置在PDMS模具上以形成第一隧道; 将预固化UV聚合物注入到具有在其底部具有格栅图案的两个凹槽的包层的第一隧道中; 将玻璃载玻片放置在包覆层上,并将混合的UV聚合物注入凹槽中以形成波导芯; 将第二玻璃基板放置在包覆层上,并注入UV聚合物以形成层叠有包覆层的上包层,以获得基于聚合物不对称布拉格耦合器的滤光器。

    Polymer wavelength filters with high-resolution periodical structures and its fabrication using replication process
    8.
    发明授权
    Polymer wavelength filters with high-resolution periodical structures and its fabrication using replication process 失效
    具有高分辨率周期结构的聚合物波长滤波器及其使用复制过程的制造

    公开(公告)号:US07853102B2

    公开(公告)日:2010-12-14

    申请号:US11945973

    申请日:2007-11-27

    IPC分类号: G02B6/34

    摘要: The present invention discloses a method for fabricating polymer wavelength filter with high-resolution periodical structure, which comprises: a positive photo-resister film is coated or a substrate, holographically exposed with grating pattern, and coated with a negative photo-resister film, then exposed by UV light and developed to obtain a waveguide mold having negative waveguide; a PDMS film coated on the waveguide mold, baked and peeled off to obtain a PDMS mold; a first tunnel formed over the PDMS mold, injected with a first UV polymer, then cured and separated the first UV polymer having groove to be the cladding layer of the polymer wavelength filter; a second UV polymer injected into the groove of the cladding layer, and cured to form the core of the waveguide in the groove of the cladding layer to finally be the polymer wavelength filter.

    摘要翻译: 本发明公开了一种制造具有高分辨率周期结构的聚合物波长滤光片的方法,包括:用光栅图案全息曝光并涂上负光阻膜,然后涂覆正光阻膜或基片 通过紫外光曝光并开发得到具有负波导的波导模具; 将PDMS薄膜涂覆在波导模具上,烘烤并剥离以获得PDMS模具; 形成在PDMS模具上的第一隧道,注入第一UV聚合物,然后将具有沟槽的第一UV聚合物固化并分离成聚合物波长滤光器的包层; 注入到包层的槽中的第二UV聚合物,并且被固化以在包层的沟槽中形成波导的芯,最终成为聚合物波长滤波器。

    Tunable optical integrated element using liquid crystal as active layer
    9.
    发明授权
    Tunable optical integrated element using liquid crystal as active layer 失效
    可调谐光学集成元件采用液晶作为活性层

    公开(公告)号:US07209212B2

    公开(公告)日:2007-04-24

    申请号:US10940664

    申请日:2004-09-15

    IPC分类号: G02F1/13

    摘要: The present invention discloses a tunable optical integrated element using liquid crystal as an active layer, which is applied to filters, couplers or optical add/drop multiplexer. The present invention includes a layer of liquid crystal as an active layer, a first waveguide with grating and a second waveguide, an isolation layer, a pair of electrodes. By applying the external voltage to control the direction of the liquid crystal, the refractive index of the waveguide changes in accordance with the modulation of the electric field. Thus invention has the features of simple structure, easy assembling, lower cost and integrating ability.

    摘要翻译: 本发明公开了一种使用液晶作为有源层的可调谐光学集成元件,其被应用于滤波器,耦合器或光分插复用器。 本发明包括作为有源层的液晶层,具有光栅的第一波导和第二波导,隔离层,一对电极。 通过施加外部电压来控制液晶的方向,波导的折射率根据电场的调制而变化。 因此本发明具有结构简单,组装方便,成本低,集成能力强的特点。