FLEXIBLE NANOCOMPOSITE GENERATOR AND METHOD FOR MANUFACTURING THE SAME
    2.
    发明申请
    FLEXIBLE NANOCOMPOSITE GENERATOR AND METHOD FOR MANUFACTURING THE SAME 有权
    柔性纳米复合发生器及其制造方法

    公开(公告)号:US20120133247A1

    公开(公告)日:2012-05-31

    申请号:US13307870

    申请日:2011-11-30

    摘要: There are provided a flexible nanocomposite generator and a method of manufacturing the same. A flexible nanocomposite generator according to the present invention includes a piezoelectric layer formed of a flexible matrix containing piezoelectric nanoparticles and carbon nanostructures; and electrode layers disposed on the upper and lower surfaces of both sides of the piezoelectric layer, in which according to a method for manufacturing a flexible nanocomposite generator according to the present invention and a flexible nanogenerator, it is possible to manufacture a flexible nanogenerator with a large area and a small thickness. Therefore, the nanogenerator may be used as a portion of a fiber or cloth. Accordingly, the nanogenerator according to the present invention generates power in accordance with bending of attached cloth, such that it is possible to continuously generate power in accordance with movement of a human body.

    摘要翻译: 提供了一种柔性纳米复合发生器及其制造方法。 根据本发明的柔性纳米复合发生器包括由含有压电纳米颗粒和碳纳米结构的柔性基体形成的压电层; 以及设置在压电体层的两侧的上表面和下表面上的电极层,其中根据本发明的柔性纳米复合材料发生器的制造方法和柔性纳米发生器,可以制造具有 面积大,厚度小。 因此,纳米发生器可以用作纤维或布的一部分。 因此,根据本发明的纳米发生器根据附着的布的弯曲产生动力,使得可以根据人体的运动连续发电。

    Flexible nanocomposite generator and method for manufacturing the same
    3.
    发明授权
    Flexible nanocomposite generator and method for manufacturing the same 有权
    柔性纳米复合材料发生器及其制造方法

    公开(公告)号:US08803406B2

    公开(公告)日:2014-08-12

    申请号:US13307870

    申请日:2011-11-30

    IPC分类号: H01L41/113 H01L41/18

    摘要: There are provided a flexible nanocomposite generator and a method of manufacturing the same. A flexible nanocomposite generator according to the present invention includes a piezoelectric layer formed of a flexible matrix containing piezoelectric nanoparticles and carbon nanostructures; and electrode layers disposed on the upper and lower surfaces of both sides of the piezoelectric layer, in which according to a method for manufacturing a flexible nanocomposite generator according to the present invention and a flexible nanogenerator, it is possible to manufacture a flexible nanogenerator with a large area and a small thickness. Therefore, the nanogenerator may be used as a portion of a fiber or cloth. Accordingly, the nanogenerator according to the present invention generates power in accordance with bending of attached cloth, such that it is possible to continuously generate power in accordance with movement of a human body.

    摘要翻译: 提供了一种柔性纳米复合发生器及其制造方法。 根据本发明的柔性纳米复合发生器包括由含有压电纳米颗粒和碳纳米结构的柔性基体形成的压电层; 以及设置在压电体层的两侧的上表面和下表面上的电极层,其中根据本发明的柔性纳米复合材料发生器的制造方法和柔性纳米发生器,可以制造具有 面积大,厚度小。 因此,纳米发生器可以用作纤维或布的一部分。 因此,根据本发明的纳米发生器根据附着的布的弯曲产生动力,使得可以根据人体的运动连续发电。

    Method of manufacturing a flexible piezoelectric device
    4.
    发明授权
    Method of manufacturing a flexible piezoelectric device 有权
    制造柔性压电元件的方法

    公开(公告)号:US08661634B2

    公开(公告)日:2014-03-04

    申请号:US12730907

    申请日:2010-03-24

    IPC分类号: H01L41/22 H01L41/053

    摘要: A method of manufacturing a flexible piezoelectric device including laminating a first metal layer on a silicon oxide layer on a silicon substrate. The method further includes laminating a device on the first metal layer and annealing the first metal layer to oxidize the first metal into a first metal oxide. The method further includes etching the first metal oxide to separate the device from the silicon oxide layer and transferring the separated device to a flexible substrate using a transfer layer. The metal oxide layer laminated on the silicon substrate is etched to separate the device from the substrate. As a result, physical damage of the silicon substrate is prevented and a cost of using expensive single-crystal silicon substrate is reduced.

    摘要翻译: 一种制造柔性压电器件的方法,包括在硅衬底上的氧化硅层上层叠第一金属层。 该方法还包括在第一金属层上层叠器件并退火第一金属层以将第一金属氧化成第一金属氧化物。 该方法还包括蚀刻第一金属氧化物以将器件与氧化硅层分离,并使用转移层将分离的器件转移到柔性衬底。 蚀刻层叠在硅衬底上的金属氧化物层,以使器件与衬底分离。 结果,防止了硅衬底的物理损坏,并且降低了使用昂贵的单晶硅衬底的成本。

    FLEXIBLE PIEZOELECTRIC DEVICE AND FLEXIBLE CAPACITOR MANUFACTURED BY THE SAME, AND MANUFACTURING METHOD FOR FLEXIBLE SENSORS
    5.
    发明申请
    FLEXIBLE PIEZOELECTRIC DEVICE AND FLEXIBLE CAPACITOR MANUFACTURED BY THE SAME, AND MANUFACTURING METHOD FOR FLEXIBLE SENSORS 有权
    柔性压电器件及其制造的柔性电容器,以及柔性传感器的制造方法

    公开(公告)号:US20110000060A1

    公开(公告)日:2011-01-06

    申请号:US12730907

    申请日:2010-03-24

    IPC分类号: H01L41/22

    摘要: Provided are a method for manufacturing a flexible device, a flexible device, a flexible piezoelectric device and a flexible capacitor manufactured by the same, and a method for manufacturing a flexible sensor. A method for manufacturing a flexible device includes: laminating a first metal layer on a silicon oxide layer on a silicon substrate; laminating a device on the first metal layer; annealing the first metal layer to oxidize the first metal into a first metal oxide; etching the first metal oxide so as to separate the device from the silicon oxide layer; and transferring the separated device to a flexible substrate using a transfer layer. According to the disclosed method for manufacturing a flexible device, differently from the prior art where the silicon substrate itself is etched, the metal oxide layer laminated on the silicon substrate is etched to separate the device from the substrate. As a result, physical damage of the silicon substrate may be prevented and the cost of using the expensive single-crystal silicon substrate may be reduced.

    摘要翻译: 提供一种柔性器件的制造方法,柔性器件,柔性压电器件和由其制造的柔性电容器以及柔性传感器的制造方法。 柔性器件的制造方法包括:在硅衬底上的氧化硅层上层叠第一金属层; 在第一金属层上层压器件; 退火所述第一金属层以将所述第一金属氧化成第一金属氧化物; 蚀刻第一金属氧化物以将器件与氧化硅层分离; 以及使用转移层将分离的装置转移到柔性基板。 根据所公开的用于制造柔性器件的方法,不同于蚀刻硅衬底本身的现有技术,蚀刻层叠在硅衬底上的金属氧化物层以将器件与衬底分离。 结果,可以防止硅衬底的物理损坏,并且可能降低使用昂贵的单晶硅衬底的成本。