公开(公告)号：US4633492A

公开(公告)日：1986-12-30

申请号：US650903

申请日：1984-09-13

Applicant: Arnold Weiss ,  Herman P. Schutten ,  Louis Cartz ,  Gordon B. Spellman ,  Stanley V. Jaskolski ,  Peter H. Wackman, deceased

Inventor： Arnold Weiss ,  Herman P. Schutten ,  Louis Cartz ,  Gordon B. Spellman ,  Stanley V. Jaskolski ,  Peter H. Wackman, deceased

IPC: G03F7/20 ,  H05G2/00 ,  H05H1/04 ,  H01J35/00 ,  H05B31/22

CPC classification number: H05G2/003 ,  G03F7/70033 ,  H05H1/04

Abstract: A method is provided for producing plasma pinch X-rays usable in X-ray lithography. Ionized heated plasma is repeatably generated in a first area directly from solid material without exploding the latter. X-rays are generated in a second area by passing high current through the plasma causing radial inward magnetic field pinching. Accurate control and improved intensity performance, and greater flexibility in selection of X-ray emitting materials, are provided by the separation of the plasma generating and the X-ray pinch generating functions.

Abstract translation: 提供了用于产生可用于X射线光刻的等离子体夹持X射线的方法。 电离加热的等离子体可以直接从固体材料在第一区域中重复产生，而不会使后者爆炸。 通过使高电流通过等离子体产生径向向内的磁场夹紧，在第二区域中产生X射线。 通过分离等离子体产生和X射线捏合产生功能，提供精确的控制和改进的强度性能以及选择X射线发射材料的更大灵活性。

公开(公告)号：US4504964A

公开(公告)日：1985-03-12

申请号：US420557

申请日：1982-09-20

Applicant: Louis Cartz ,  Arnold Weiss ,  Herman P. Schutten ,  Gordon B. Spellman ,  Stanley V. Jaskolski ,  Peter H. Wackman, deceased

Inventor： Louis Cartz ,  Arnold Weiss ,  Herman P. Schutten ,  Gordon B. Spellman ,  Stanley V. Jaskolski ,  Peter H. Wackman, deceased

IPC: G03F7/20 ,  H05G2/00 ,  H05H1/22

CPC classification number: H05G2/001 ,  B82Y10/00 ,  G03F7/70033 ,  G21B1/23

Abstract: A system is provided for producing plasma pinch X-rays usable in X-ray lithography. Ionized heated plasma vapor is repeatably generated directly from solid material by impingement of a plurality of circumferentially spaced laser beams to generate an annulus of plasma. X-rays are generated by passing high current through the annular plasma in an axial gap between the solid material target electrode and another electrode, causing magnetic field radial inward plasma pinching to a central constricted area further heating the plasma and emitting X-rays. A central axially directed laser may further heat the plasma in the pinched area.

Abstract translation: 提供了一种用于产生可用于X射线光刻的等离子体夹持X射线的系统。 电离加热的等离子体蒸气可以通过多个周向间隔开的激光束的冲击直接从固体材料产生，以产生等离子体的环形空间。 通过在固体材料靶电极和另一电极之间的轴向间隙中使高电流通过环形等离子体而产生X射线，从而使得磁场向内的等离子体向中心收缩区域的夹持进一步加热等离子体并发射X射线。 中心轴向激光器可以进一步加热挤压区域中的等离子体。

公开(公告)号：US4536884A

公开(公告)日：1985-08-20

申请号：US420558

申请日：1982-09-20

Applicant: Arnold Weiss ,  Herman P. Schutten ,  Louis Cartz ,  Gordon B. Spellman ,  Stanley V. Jaskolski ,  Peter H. Wackman, deceased

Inventor： Arnold Weiss ,  Herman P. Schutten ,  Louis Cartz ,  Gordon B. Spellman ,  Stanley V. Jaskolski ,  Peter H. Wackman, deceased

IPC: G03F7/20 ,  H05G2/00 ,  H05H1/04 ,  H01J35/00 ,  H05B31/22

CPC classification number: H05G2/003 ,  G03F7/70033 ,  H05H1/04

Abstract: A system is provided for producing plasma pinch X-rays usable in X-ray lithography. Ionized heated plasma is repeatably generated in a first area directly from solid material without exploding the latter. X-rays are generated in a second area by passing high current through the plasma causing radial inward magnetic field pinching. Accurate control and improved intensity performance, and greater flexibility in selection of X-ray emitting materials, are provided by the separation of the plasma generating and the X-ray pinch generating functions. Common electrode structure is provided for plasma generating and for plasma pinching, which common electrode also provides a cylindrical plasma communication passage from the first to the second area, and provides an X-ray emission passage of desired axial orientation.

Abstract translation: 提供了一种用于产生可用于X射线光刻的等离子体夹持X射线的系统。 电离加热的等离子体可以直接从固体材料在第一区域中重复产生，而不会使后者爆炸。 通过使高电流通过等离子体产生径向向内的磁场夹紧，在第二区域中产生X射线。 通过分离等离子体产生和X射线捏合产生功能，提供精确的控制和改进的强度性能以及选择X射线发射材料的更大灵活性。 提供公共电极结构用于等离子体产生和等离子体夹持，该公共电极还提供从第一区域到第二区域的圆柱形等离子体连通通道，并且提供具有期望轴向取向的X射线发射通道。

公开(公告)号：US5141110A

公开(公告)日：1992-08-25

申请号：US477606

申请日：1990-02-09

Applicant: Glenn M. Trischan ,  Louis Cartz

Inventor： Glenn M. Trischan ,  Louis Cartz

IPC: B07C5/34 ,  B07C5/342 ,  B29B17/02

CPC classification number: B29B17/02 ,  B07C5/3416 ,  B07C5/342 ,  B29B2017/0203 ,  B29B2017/0279 ,  B29K2023/12 ,  B29K2025/00 ,  B29K2027/06 ,  B29K2033/12 ,  B29K2067/00 ,  B29K2105/065 ,  B29L2031/7158 ,  B29L2031/744 ,  Y02W30/622 ,  Y10S209/942

Abstract: A method of sorting a mixed group of plastic articles, such as PET and PVC containers, involves individually subjecting each article to a beam of electromagnetic radiation, and detecting a change in the intensity of the beam. The measured intensity varies in a manner indicative of the crystallinity of the plastic from which the article is made, and hence identifies the type of plastic the article is made of. Each article is then sent to one of a plurality of destinations, such as recycling collection bins, according to the type of plastic. The method is particularly useful in separating PET and PVC used in containers, since these plastics are very difficult to sort by conventional methods.

公开(公告)号：US4618971A

公开(公告)日：1986-10-21

申请号：US651052

申请日：1984-09-13

Applicant: Arnold Weiss ,  Herman P. Schutten ,  Louis Cartz ,  Gordon B. Spellman ,  Stanley V. Jaskolski ,  Peter H. Wackman, deceased

Inventor： Arnold Weiss ,  Herman P. Schutten ,  Louis Cartz ,  Gordon B. Spellman ,  Stanley V. Jaskolski ,  Peter H. Wackman, deceased

IPC: G03F7/20 ,  H05G2/00 ,  H05H1/04 ,  G21K5/00 ,  H01L21/302

CPC classification number: H05G2/003 ,  G03F7/70033 ,  H05H1/04

Abstract: A system is provided for producing plasma pinch X-rays usable in X-ray lithography. Ionized heated plasma is repeatably generated in a first area directly from solid material without exploding the latter. X-rays are generated in a second area by passing high current through the plasma causing radial inward magnetic field pinching. Accurate control and improved intensity performance, and greater flexibility in selection of X-ray emitting materials, are provided by the separation of the plasma generating and the X-ray pinch generating functions. Common electrode structure is provided for plasma generating and for plasma pinching, which common electrode also provides a cylindrical plasma communication passage from the first to the second area, and provides an X-ray emission passage of desired axial orientation.

Abstract translation: 提供了一种用于产生可用于X射线光刻的等离子体夹持X射线的系统。 电离加热的等离子体可以直接从固体材料在第一区域中重复产生，而不会使后者爆炸。 通过使高电流通过等离子体产生径向向内的磁场夹紧，在第二区域中产生X射线。 通过分离等离子体产生和X射线捏合产生功能，提供精确的控制和改进的强度性能以及选择X射线发射材料的更大灵活性。 提供公共电极结构用于等离子体产生和等离子体夹持，该公共电极还提供从第一区域到第二区域的圆柱形等离子体连通通道，并且提供具有期望轴向取向的X射线发射通道。