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公开(公告)号：US10883944B2
公开(公告)日：2021-01-05
申请号：US16622030
申请日：2018-03-17
发明人： Shigeki Masumura
IPC分类号： G01N21/88 , G01N21/25 , G01N21/47 , G01N21/956 , G01N21/21
摘要： Provided is an inspection lighting device with which, even when changes in light that occur at respective feature points on an object to be inspected are small, the amounts of those changes in light can be determined across the entire field-of-view range, and the feature points can be detected under exactly the same conditions.
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公开(公告)号：US09891176B2
公开(公告)日：2018-02-13
申请号：US15308001
申请日：2015-08-04
发明人： Shigeki Masumura
CPC分类号： G01N21/8806 , G01N2201/062 , G01N2201/0636 , G01N2201/0638 , G01N2201/068 , G02B27/02 , G02B27/144 , G02B27/30
摘要： In the inspection lighting device, between a surface light source for emitting an inspection light and the inspection object, at least one shielding mask is disposed, and a lens is disposed on a side closer to the inspection object than the shielding mask such that the shielding mask is positioned across the focus position of this lens as a center. In an irradiation solid angle of the inspection light for the inspection object formed when the light emitted from the surface light source is irradiated on to the inspection object by the lens the shielding mask forms a dark area. So that, in accordance with a change in reflection, transmission, scattering occurring at a feature point on the inspection object, a shape, a size, a tilt of the irradiation solid angle of the inspection light can be changed.
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公开(公告)号：US20170067835A1
公开(公告)日：2017-03-09
申请号：US15308001
申请日：2015-08-04
发明人： Shigeki Masumura
CPC分类号： G01N21/8806 , G01N2201/062 , G01N2201/0636 , G01N2201/0638 , G01N2201/068 , G02B27/02 , G02B27/144 , G02B27/30
摘要： In the inspection lighting device, between a surface light source for emitting an inspection light and the inspection object, at least one shielding mask is disposed, and a lens is disposed on a side closer to the inspection object than the shielding mask such that the shielding mask is positioned across the focus position of this lens as a center. In an irradiation solid angle of the inspection light for the inspection object formed when the light emitted from the surface light source is irradiated on to the inspection object by the lens the shielding mask forms a dark area. So that, in accordance with a change in reflection, transmission, scattering occurring at a feature point on the inspection object, a shape, a size, a tilt of the irradiation solid angle of the inspection light can be changed.
摘要翻译： 在检查照明装置中，在用于发射检查光的表面光源和检查对象之间，设置至少一个屏蔽掩模，并且在比屏蔽掩模更靠近检查对象的一侧设置透镜，使得屏蔽 面罩以该镜头的焦点位置为中心。 当通过透镜将从表面光源发射的光照射到检查对象时形成的用于检查对象的检查光的照射立体角成为暗区。 因此，根据在检查对象的特征点处发生的反射，透射，散射的变化，可以改变检查光的照射立体角的形状，尺寸，倾斜度。
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公开(公告)号：US20220412727A1
公开(公告)日：2022-12-29
申请号：US17780735
申请日：2020-11-26
摘要： An illumination device has a light source unit, a lens unit, and a filter unit An imaging device receives object light, generated by the illumination light, from the measurement object at a predetermined observation solid angle, and pixels of the imaging device can each identify the different light wavelength ranges. A processing device includes an arithmetic unit configured to obtain a normal vector at each point of the measurement object corresponding to each pixel from inclusion relation between the plurality of solid angle regions, constituting the object light, and the predetermined observation solid angle, and a shape reconstruction unit configured to reconstruct the shape of the measurement object.
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公开(公告)号：US20180299386A1
公开(公告)日：2018-10-18
申请号：US15580087
申请日：2015-09-23
发明人： Shigeki MASUMURA
IPC分类号： G01N21/88 , G01N21/956
CPC分类号： G01N21/8806 , G01N21/95623 , G01N2201/0636
摘要： Provided is an inspection lighting device with which, even when changes in light that occur at respective feature points on an object to be inspected are small, the amounts of those changes in light can be determined across the entire field-of-view range, and the feature points can be detected under exactly the same conditions. An inspection lighting device 100 includes a surface light source 1 and a lens 2 that is disposed between the surface light source 1 and an inspection object W, the lens 2 being disposed nearer to the inspection object W such that at least one of a shielding mask M1 and a filtering means F1 is located centered around a focal distance position of the lens. An irradiation solid angle of light emitted from the surface light source 1 and irradiated onto the inspection object W by the lens 2 is configured to have solid angle regions as desired, the solid angle regions having specific optical attributes. The shapes, sizes, and inclination angles of irradiation solid angles of the inspection light as well as solid angle regions having specific optical attributes within the irradiation solid angles can be set to be substantially uniform across the entire field of view in accordance with changes that occur at feature points on the inspection object.
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公开(公告)号：US11860352B2
公开(公告)日：2024-01-02
申请号：US18008442
申请日：2021-11-15
发明人： Shigeki Masumura
IPC分类号： G02B21/18
CPC分类号： G02B21/18
摘要： OBJECT
To make an object to be observed observable with high resolution and to make an inclination angle of a surface of the object to be observed recognizable over a wide range.
SOLUTION
An image observation system 100 provided with a lighting optical system 116 irradiating an object to be observed W with an illumination light and an observation optical system 122 collecting object light from the object to be observed W to guide to a detector 126, the image observation system 100 comprising an objective lens 122A opposed to the object to be observed W, a beam splitter 116B disposed on an opposite side to the object to be observed W with respect to the objective lens 122A, and a relay image RI of the illumination light splitting member 114 for dividing wavelength regions R, G and B of the illumination light into a plurality of different solid angle regions IS1, IS2 and IS3, being disposed in front of the objective lens 122A.-
公开(公告)号：US11630070B2
公开(公告)日：2023-04-18
申请号：US17618216
申请日：2020-06-15
发明人： Shigeki Masumura
摘要： [Problem] When the inclination of an object surface reaches or exceeds a certain level, direct light consisting of a specularly reflected light component leaves the range of the solid observation angle formed by the observation optical system, and it becomes difficult to continuously and quantitatively obtain the surface shape of the object surface.
[Solution] This invention emits emission light capable of, within an observation range for an object under inspection, simultaneously forming the same solid emission angle on each point on an object surface regardless of the distance from the illumination; for a non-continuous area where direct light is not returned, uses variation in the solid angle of direct light unique to the vicinity of the non-continuous area to make it possible to at least measure height-direction variation of the non-continuous area; and uses brightness information indicating variation in a scattered light component of object light from the non-continuous area to make it possible to continuously acquire the three-dimensional shape of the non-continuous area.-
公开(公告)号：US20220170863A1
公开(公告)日：2022-06-02
申请号：US17618216
申请日：2020-06-15
发明人： Shigeki MASUMURA
摘要： [Problem] When the inclination of an object surface reaches or exceeds a certain level, direct light consisting of a specularly reflected light component leaves the range of the solid observation angle formed by the observation optical system, and it becomes difficult to continuously and quantitatively obtain the surface shape of the object surface.
[Solution] This invention emits emission light capable of, within an observation range for an object under inspection, simultaneously forming the same solid emission angle on each point on an object surface regardless of the distance from the illumination; for a non-continuous area where direct light is not returned, uses variation in the solid angle of direct light unique to the vicinity of the non-continuous area to make it possible to at least measure height-direction variation of the non-continuous area; and uses brightness information indicating variation in a scattered light component of object light from the non-continuous area to make it possible to continuously acquire the three-dimensional shape of the non-continuous area.-
公开(公告)号：US20200158657A1
公开(公告)日：2020-05-21
申请号：US16622030
申请日：2018-03-17
发明人： SHIGEKI MASUMURA
IPC分类号： G01N21/88 , G01N21/956 , G01N21/25 , G01N21/21 , G01N21/47
摘要： Provided is an inspection lighting device with which, even when changes in light that occur at respective feature points on an object to be inspected are small, the amounts of those changes in light can be determined across the entire field-of-view range, and the feature points can be detected under exactly the same conditions. The inspection lighting device 100 includes a surface light source 1 and a lens 2 that is disposed between the surface light source 1 and an inspection object W, the lens 2 being disposed nearer to the inspection object W such that at least one of a shielding mask M1 and a filtering means F1 is located centered around a focus position of the lens. An irradiation solid angle of light emitted from the surface light source 1 and irradiated onto the inspection object W by the lens 2 is configured to have solid angle regions that have specific optical attributes and that are radially arranged around an optical axis of the irradiation solid angle. The shapes, sizes, and incline angles of irradiation solid angles of the inspection light as well as solid angle regions having specific optical attributes within the irradiation solid angles can be set to be substantially uniform across the entire field of view in accordance with changes that occur at feature points on the inspection object.
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公开(公告)号：US20230213748A1
公开(公告)日：2023-07-06
申请号：US18008442
申请日：2021-11-15
发明人： Shigeki MASUMURA
IPC分类号： G02B21/18
CPC分类号： G02B21/18
摘要： To make an object to be observed observable with high resolution and to make an inclination angle of a surface of the object to be observed recognizable over a wide range.
An image observation system 100 provided with a lighting optical system 116 irradiating an object to be observed W with an illumination light and an observation optical system 122 collecting object light from the object to be observed W to guide to a detector 126, the image observation system 100 comprising an objective lens 122A opposed to the object to be observed W, a beam splitter 116B disposed on an opposite side to the object to be observed W with respect to the objective lens 122A, and a relay image RI of the illumination light splitting member 114 for dividing wavelength regions R, G and B of the illumination light into a plurality of different solid angle regions IS1, IS2 and IS3, being disposed in front of the objective lens 122A.
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