公开(公告)号：US07059192B2

公开(公告)日：2006-06-13

申请号：US10971885

申请日：2004-10-22

Applicant: Raffaele Correale ,  Cristian Maccarrone ,  Mario Busso

Inventor： Raffaele Correale ,  Cristian Maccarrone ,  Mario Busso

IPC: G01L9/00

CPC classification number: G01L9/0016 ,  G01L9/0019 ,  G01L21/22

Abstract: A pressure sensor is a micro-electro-mechanical vibrating device, with a silicon substrate (15; 15′) onto which a single-layer or multilayer vibrating assembly (121; 221; 321) is formed. It comprises an electrode (21; 21′), which makes the assembly to oscillate relative to the substrate at the resonance frequency or at another known frequency, and a detector for detecting the actual frequency and/or amplitude of said oscillation. The actual frequency and/or amplitude are affected by the conditions, in particular the pressure, of the external environment and the variations of the frequency and amplitude with respect to the values set by the electrode is used to measure pressure variations in the surrounding environment.

Abstract translation: 压力传感器是微电子机械振动装置，其上形成有单层或多层振动组件（121; 221; 321）的硅衬底（15; 15'）。 它包括一个电极（21; 21'），它使组件以共振频率或另一已知频率相对于衬底振荡;以及检测器，用于检测所述振荡的实际频率和/或振幅。 实际的频率和/或振幅受外部环境的条件，特别是压力的影响，并且相对于由电极设定的值的频率和振幅的变化用于测量周围环境中的压力变化。

公开(公告)号：US20050126295A1

公开(公告)日：2005-06-16

申请号：US10971885

申请日：2004-10-22

Applicant: Raffaele Correale ,  Cristian Maccarrone ,  Mario Busso

Inventor： Raffaele Correale ,  Cristian Maccarrone ,  Mario Busso

IPC: G01L21/22 ,  G01L9/00 ,  G01P3/00 ,  H01L29/84

CPC classification number: G01L9/0016 ,  G01L9/0019 ,  G01L21/22

Abstract: A pressure sensor is a micro-electro-mechanical vibrating device, with a silicon substrate (15; 15′) onto which a single-layer or multilayer vibrating assembly (121; 221; 321) is formed. It comprises an electrode (21; 21′), which makes the assembly to oscillate relative to the substrate at the resonance frequency or at another known frequency, and a detector for detecting the actual frequency and/or amplitude of said oscillation. The actual frequency and/or amplitude are affected by the conditions, in particular the pressure, of the external environment and the variations of the frequency and amplitude with respect to the values set by the electrode is used to measure pressure variations in the surrounding environment.

Abstract translation: 压力传感器是微电子机械振动装置，其上形成有单层或多层振动组件（121; 221; 321）的硅衬底（15; 15'）。 它包括一个电极（21; 21'），它使组件以共振频率或另一已知频率相对于衬底振荡;以及检测器，用于检测所述振荡的实际频率和/或振幅。 实际的频率和/或振幅受外部环境的条件，特别是压力的影响，并且相对于由电极设定的值的频率和振幅的变化用于测量周围环境中的压力变化。

公开(公告)号：US4713619A

公开(公告)日：1987-12-15

申请号：US799411

申请日：1985-11-19

Applicant: Mario Busso ,  Marco Pierini

Inventor： Mario Busso ,  Marco Pierini

IPC: G01L23/30 ,  G01L21/00 ,  G01L21/30 ,  G05F1/20 ,  H01J41/12 ,  H02M5/293 ,  H02P13/06 ,  F04B37/14

CPC classification number: H02M5/293 ,  G05F1/20 ,  H01J41/12 ,  H02P13/06

Abstract: An electronic device for feeding an ion pump with two different tensions and for improved measuring of the pressure in the pump, the two different tensions being a normal operating tension and a lower tension at which a correct measurement of the pressure can be made in a pressure range up to beyond 10.sup.-10 torr. through a transformer whose primary or secondary winding is divided into two sections that can be connected and separated by switches controlled by oscillator circuits. Alternatively feeding at two different tensions can be obtained by feeding to the primary winding of the transformer a pulsed tension having a rectangular wave form and a high frequency controlled by a field effect transistor having an isolated gate. A sampling and holding circuit permits the pressure to be measured only in the conditions of feeding at the lower tension.

Abstract translation: 用于给具有两个不同张力的离子泵进料的电子装置，并且用于改进泵中的压力的​​测量，两个不同的张力是正常的操作张力和较低的张力，在该张力下可以在压力下进行正确的压力测量 范围可达10-10 torr以上。 通过变压器，其初级或次级绕组被分成两部分，可以由振荡器电路控制的开关连接和分离。 或者，通过向变压器的初级绕组馈送具有矩形波形的脉冲张力和由具有隔离栅极的场效应晶体管控制的高频，可以获得两种不同张力的馈电。 采样和保持电路仅允许在较低张力的馈送条件下测量压力。

公开(公告)号：US07621721B2

公开(公告)日：2009-11-24

申请号：US10846248

申请日：2004-05-14

Applicant: Roberto Carboneri ,  Mario Busso

Inventor： Roberto Carboneri ,  Mario Busso

IPC: F04B49/06

CPC classification number: F04C28/08 ,  H02P29/40

Abstract: An oil mechanical vacuum pump, which is equipped with an electric motor comprises an electronic control device for supplying the electric motor with power. The electronic control device comprises a frequency converter for controlling the excitation frequency Fecc of the voltage signal SU by which the motor is powered as a function of at least one operating parameter of the pump and of at least one threshold value that can be modified depending on the operating conditions of the pump.

Abstract translation: 装有电动机的油机械真空泵包括用于向电动机供电的电子控制装置。 电子控制装置包括变频器，用于控制电动机供电的电压信号SU的激励频率Fecc作为泵的至少一个操作参数的功能，以及至少一个可根据 泵的运行条件。

公开(公告)号：US5017836A

公开(公告)日：1991-05-21

申请号：US331636

申请日：1989-03-30

Applicant: Mario Busso ,  Mauro Audi

Inventor： Mario Busso ,  Mauro Audi

IPC: H01J37/18 ,  H01J41/12

CPC classification number: H01J41/12

Abstract: An improved electronic device allows for the feeding of an ion pump with a plurality of voltages that are changed as a function of the current drawn by the pump and therefore of the pressure value within the pump.