公开(公告)号：US08147141B2

公开(公告)日：2012-04-03

申请号：US12041269

申请日：2008-03-03

申请人： Masashi Fumoto ,  Ryo Kikuchi ,  Takeshi Kakamu ,  Yasuhiro Otsuji

发明人： Masashi Fumoto ,  Ryo Kikuchi ,  Takeshi Kakamu ,  Yasuhiro Otsuji

IPC分类号： F16C33/10

CPC分类号： F16C29/0609 ,  F16C29/065 ,  F16C33/6681 ,  F16C2240/02

摘要： A linear motion guide unit is disclosed in which an end cap of a slider has a tube therein to feed even minor amounts of lubricant into a circulating circuit for rollers with no lubricant leakage, making sure of positive lubrication irrespective of working orientations or postures of the linear motion guide unit. A flexible tube made of fluorocarbon polymers is installed in the end cap to run from a lubricant inlet to a turnaround passage, thereby providing a lubricant-supply passage. A distal end of the tube fits into a three-way member made open to the turnaround passage on a spacer part, which is nested inside the end cap.

摘要翻译： 公开了一种直线运动引导单元，其中滑块的端盖具有一个管子，用于将甚至少量的润滑剂供给到没有润滑剂泄漏的滚子的循环回路中，确保正润滑，而不考虑工作方向或姿势 直线运动导向单元。 由氟碳聚合物制成的柔性管安装在端盖中，从润滑剂入口运行到周转通道，从而提供润滑剂供应通道。 管的远端装配在一个三通构件上，该三通构件在隔离件部分上敞开，该间隔件嵌套在端盖内。

公开(公告)号：US20080285899A1

公开(公告)日：2008-11-20

申请号：US12041269

申请日：2008-03-03

申请人： Masashi FUMOTO ,  Ryo Kikuchi ,  Takeshi Kakamu ,  Yasuhiro Otsuji

发明人： Masashi FUMOTO ,  Ryo Kikuchi ,  Takeshi Kakamu ,  Yasuhiro Otsuji

IPC分类号： F16C33/10

CPC分类号： F16C29/0609 ,  F16C29/065 ,  F16C33/6681 ,  F16C2240/02

摘要： A linear motion guide unit is disclosed in which an end cap of a slider has a tube therein to feed even minor amounts of lubricant into a circulating circuit for rollers with no lubricant leakage, making sure of positive lubrication irrespective of working orientations or postures of the linear motion guide unit. A flexible tube made of fluorocarbon polymers is installed in the end cap to run from a lubricant inlet to a turnaround passage, thereby providing a lubricant-supply passage. A distal end of the tube fits into a three-way member made open to the turnaround passage on a spacer part, which is nested inside the end cap.

摘要翻译： 公开了一种直线运动引导单元，其中滑块的端盖具有一个管子，用于将甚至少量的润滑剂供给到没有润滑剂泄漏的滚子的循环回路中，确保正润滑，而不考虑工作方向或姿势 直线运动导向单元。 由氟碳聚合物制成的柔性管安装在端盖中，从润滑剂入口运行到周转通道，从而提供润滑剂供应通道。 管的远端装配在一个三通构件上，该三通构件在隔离件部分上敞开，该间隔件嵌套在端盖内。

公开(公告)号：US5030057A

公开(公告)日：1991-07-09

申请号：US266651

申请日：1988-11-03

申请人： Hironobu Nishi ,  Kenichi Yamaga ,  Takanobu Asano ,  Kazutoshi Sawado ,  Masashi Fumoto ,  Shozo Ito ,  Yoshinori Mochizuki

发明人： Hironobu Nishi ,  Kenichi Yamaga ,  Takanobu Asano ,  Kazutoshi Sawado ,  Masashi Fumoto ,  Shozo Ito ,  Yoshinori Mochizuki

IPC分类号： H01L21/00 ,  H01L21/205 ,  H01L21/22 ,  H01L21/673 ,  H01L21/677

CPC分类号： H01L21/67313 ,  H01L21/67294 ,  H01L21/67326 ,  H01L21/67781 ,  Y10S414/136 ,  Y10S414/138 ,  Y10S414/14

摘要： A wafer transferring method for transferring wafers between a cassette and a boat having grooves to hold the wafers, comprises the steps of providing an identification mechanism for positional alignment on the boat in advance, detecting the identification mechanism, and aligning the boat to a predetermined position based on a detection result and transferring the wafers from the cassette to the boat. A wafer transferring apparatus comprises a loading device for extracting wafers from a cassette and transferring the wafers onto a boat, a detection device for detecting an identification section provided on the boat in order to identify a wafer transferring position on the boat, and a control device for acquiring the wafer transferring position on the boat based on a detection result attained from the detection device and controlling a mutual position between the boat and the cassette to come to a predetermined position.

摘要翻译： 一种晶片转印方法，用于在具有用于保持晶片的槽的盒和舟皿之间转移晶片，包括以下步骤：提供用于在船上进行位置对准的识别机构，检测识别机构，以及将船对准到预定位置 基于检测结果并将晶片从盒转移到船。 晶片转印装置包括用于从盒中提取晶片并将晶片转移到船上的装载装置，用于检测设置在船上的识别部分以识别船上的晶片转移位置的检测装置，以及控制装置 用于基于从检测装置获得的检测结果获取船上的晶片转移位置，并控制船和盒之间的相互位置到达预定位置。