公开(公告)号：US20110232383A1

公开(公告)日：2011-09-29

申请号：US13024578

申请日：2011-02-10

Applicant: Masashi SHIMURA

Inventor： Masashi SHIMURA

IPC: G01C19/56 ,  H01L41/053 ,  H02N11/00 ,  H01L41/113 ,  H01L41/047

CPC classification number: G01C19/5607

Abstract: A vibration piece includes: a base portion; a first driving arm which extends in a first axis direction from one end of the base portion in the first axis direction; a second driving arm which extends in the first axis direction from the other end of the base portion in the first axis direction; driving electrodes which are respectively provided in the first driving arm and the second driving arm; a detection arm which extends in a second axis direction perpendicular to the first axis direction from the base portion; a detection electrode which is provided in the detection arm; and a support portion which extends from the base portion, wherein the support portion is provided so as to surround the detection arm.

Abstract translation: 振动片包括：基部; 第一驱动臂，其从所述基部的所述第一轴方向的一端沿第一轴方向延伸; 第二驱动臂，其从所述基部的另一端沿所述第一轴方向在所述第一轴方向上延伸; 分别设置在第一驱动臂和第二驱动臂中的驱动电极; 检测臂，其从所述基部沿与所述第一轴方向垂直的第二轴方向延伸; 检测电极，设置在所述检测臂中; 以及从所述基部延伸的支撑部，其中，所述支撑部设置成围绕所述检测臂。

公开(公告)号：US09366535B2

公开(公告)日：2016-06-14

申请号：US13550903

申请日：2012-07-17

Applicant: Masashi Shimura ,  Takayuki Kikuchi

Inventor： Masashi Shimura ,  Takayuki Kikuchi

IPC: G01C19/5607 ,  G01C19/567

CPC classification number: G01C19/5607

Abstract: A vibration gyro element includes drive vibrating arms and detection vibrating arms at the opposite side, and has a first detection mode in which the drive vibrating arms flexurally vibrate oppositely to each other in an out-of-plane direction in an opposite phase to an action direction of Coriolis force and the detection vibrating arms flexurally vibrate oppositely to each other in the out-of-plane direction in an opposite phase to that of the drive vibrating arms, and a second detection mode in which the drive vibrating arms flexurally vibrate oppositely to each other in the out-of-plane direction in the same phase as the action direction of the Coriolis force and the detection vibrating arms flexurally vibrate oppositely to each other in the out-of-plane direction in the same phase as that of the drive vibrating arms.

Abstract translation: 振动陀螺元件包括在相对侧的驱动振动臂和检测振动臂，并且具有第一检测模式，其中驱动振动臂在相对于动作的相反相位的平面外方向上彼此相反地彼此振动 科里奥利力的方向和检测振动臂在与驱动振动臂相反的相位的方向上在面外方向上彼此相反地弯曲振动;第二检测模式，其中驱动振动臂相对于 在与科里奥利力的作用方向相同的相位的面外方向上彼此相邻，并且检测用振动臂在与驱动器相同的相位的面外的方向上彼此相反地弯曲地振动 振动臂。

公开(公告)号：US09121707B2

公开(公告)日：2015-09-01

申请号：US13527077

申请日：2012-06-19

Applicant: Masashi Shimura ,  Takayuki Kikuchi

Inventor： Masashi Shimura ,  Takayuki Kikuchi

IPC: G01C19/00 ,  G01C19/5621

CPC classification number: G01C19/5621

Abstract: A bending vibration piece has a pair of drive vibration arms and a pair of detection vibration arms in an opposite direction thereto which are connected to a supporting part. The supporting part has recessed portions formed on both lateral parts in a direction of width, and a through-hole formed substantially at the center in a plane part of the supporting part and more toward the drive vibration arms than the recessed portions are. On a surface of the supporting part, drive electrode pads are arranged toward the drive vibration arms and detection electrode pads are arranged toward the detection vibration arms, with these electrode pads being separated from each other in a longitudinal direction by the recessed portions on both lateral part of the supporting part and the through-hole in the plane part.

Abstract translation: 弯曲振动片具有与支撑部连接的一对驱动振动臂和与其相反的方向的一对检测振动臂。 支撑部分沿宽度方向形成在两个横向部分上的凹陷部分，以及在支撑部分的平面部分中基本上形成在中心并且比凹部更靠近驱动振动臂的通孔。 在支撑部件的表面上，驱动电极焊盘被布置成朝向驱动振动臂，并且检测电极焊盘被布置成朝向检测振动臂，这些电极焊盘在纵向方向上被两个侧面上的凹部彼此分离 支撑部分的一部分和平面部分中的通孔。

公开(公告)号：US09024508B2

公开(公告)日：2015-05-05

申请号：US13533511

申请日：2012-06-26

Applicant: Masashi Shimura ,  Takayuki Kikuchi

Inventor： Masashi Shimura ,  Takayuki Kikuchi

IPC: H03H9/21 ,  H01L41/09 ,  H03H3/02

CPC classification number: H03H3/02 ,  H03H9/21 ,  H03H2003/026 ,  Y10T29/42

Abstract: A double-side tuning fork-type bending vibration piece having a basal part, a pair of drive vibration arms, a pair of detection vibration arms, drive electrodes and detection electrodes includes adjustment films of a metallic material or the like formed in connecting areas between the vibration arms and the basal part. The adjustment films are formed in such a way as to cover an area of tapered portions formed in connecting parts between the drive vibration arms and the basal part, an area of the basal part near the tapered portions and an area of the drive vibration arms. While monitoring a detection current outputted from the detection electrodes when the drive vibration arms are excited in driving mode, the adjustment films are partly deleted by laser irradiation so that the detection current becomes 0.

Abstract translation: 具有基部，一对驱动振动臂，一对检测振动臂，驱动电极和检测电极的双侧音叉式弯曲振动片包括形成在金属材料等之间的连接区域中的调整膜 振动臂和基部。 调整膜形成为覆盖形成在驱动振动臂和基部之间的连接部分的锥形部分的区域，靠近锥形部分的基部的区域和驱动振动臂的区域。 当在驱动模式下驱动振动臂被激励时监测从检测电极输出的检测电流，通过激光照射部分地去除调整膜，使得检测电流变为0。

公开(公告)号：US20130019681A1

公开(公告)日：2013-01-24

申请号：US13550903

申请日：2012-07-17

Applicant: Masashi SHIMURA ,  Takayuki KIKUCHI

Inventor： Masashi SHIMURA ,  Takayuki KIKUCHI

IPC: G01C19/5607

CPC classification number: G01C19/5607

Abstract: A vibration gyro element includes drive vibrating arms and detection vibrating arms at the opposite side, and has a first detection mode in which the drive vibrating arms flexurally vibrate oppositely to each other in an out-of-plane direction in an opposite phase to an action direction of Coriolis force and the detection vibrating arms flexurally vibrate oppositely to each other in the out-of-plane direction in an opposite phase to that of the drive vibrating arms, and a second detection mode in which the drive vibrating arms flexurally vibrate oppositely to each other in the out-of-plane direction in the same phase as the action direction of the Coriolis force and the detection vibrating arms flexurally vibrate oppositely to each other in the out-of-plane direction in the same phase as that of the drive vibrating arms.

Abstract translation: 振动陀螺元件包括在相对侧的驱动振动臂和检测振动臂，并且具有第一检测模式，其中驱动振动臂在与驱动振动臂相反的相位的相位相反的方向上彼此相反地彼此振动 科里奥利力的方向和检测振动臂在与驱动振动臂相反的相位的方向上在面外方向上彼此相反地弯曲振动;第二检测模式，其中驱动振动臂相对于 在与科里奥利力的作用方向相同的相位的面外方向上彼此相邻，并且检测用振动臂在与驱动器相同的相位的面外的方向上彼此相反地弯曲地振动 振动臂。

公开(公告)号：US20120326571A1

公开(公告)日：2012-12-27

申请号：US13533511

申请日：2012-06-26

Applicant: Masashi SHIMURA ,  Takayuki KIKUCHI

Inventor： Masashi SHIMURA ,  Takayuki KIKUCHI

IPC: H01L41/04 ,  H01L41/22

CPC classification number: H03H3/02 ,  H03H9/21 ,  H03H2003/026 ,  Y10T29/42

Abstract: A double-side tuning fork-type bending vibration piece having a basal part, a pair of drive vibration arms, a pair of detection vibration arms, drive electrodes and detection electrodes includes adjustment films of a metallic material or the like formed in connecting areas between the vibration arms and the basal part. The adjustment films are formed in such a way as to cover an area of tapered portions formed in connecting parts between the drive vibration arms and the basal part, an area of the basal part near the tapered portions and an area of the drive vibration arms. While monitoring a detection current outputted from the detection electrodes when the drive vibration arms are excited in driving mode, the adjustment films are partly deleted by laser irradiation so that the detection current becomes 0.

Abstract translation: 具有基部，一对驱动振动臂，一对检测振动臂，驱动电极和检测电极的双侧音叉式弯曲振动片包括形成在金属材料等之间的连接区域中的调整膜 振动臂和基部。 调整膜形成为覆盖形成在驱动振动臂和基部之间的连接部分的锥形部分的区域，靠近锥形部分的基部的区域和驱动振动臂的区域。 当在驱动模式下驱动振动臂被激励时监测从检测电极输出的检测电流，通过激光照射部分地去除调整膜，使得检测电流变为0。

公开(公告)号：US20120325000A1

公开(公告)日：2012-12-27

申请号：US13527077

申请日：2012-06-19

Applicant: Masashi SHIMURA ,  Takayuki KIKUCHI

Inventor： Masashi SHIMURA ,  Takayuki KIKUCHI

IPC: G01C19/5607

CPC classification number: G01C19/5621

Abstract: A bending vibration piece has a pair of drive vibration arms and a pair of detection vibration arms in an opposite direction thereto which are connected to a supporting part. The supporting part has recessed portions formed on both lateral parts in a direction of width, and a through-hole formed substantially at the center in a plane part of the supporting part and more toward the drive vibration arms than the recessed portions are. On a surface of the supporting part, drive electrode pads are arranged toward the drive vibration arms and detection electrode pads are arranged toward the detection vibration arms, with these electrode pads being separated from each other in a longitudinal direction by the recessed portions on both lateral part of the supporting part and the through-hole in the plane part.

Abstract translation: 弯曲振动片具有与支撑部连接的一对驱动振动臂和与其相反的方向的一对检测振动臂。 支撑部分沿宽度方向形成在两个横向部分上的凹陷部分，以及在支撑部分的平面部分中基本上形成在中心并且比凹部更靠近驱动振动臂的通孔。 在支撑部件的表面上，驱动电极焊盘被布置成朝向驱动振动臂，并且检测电极焊盘被布置成朝向检测振动臂，这些电极焊盘在纵向方向上被两个侧面上的凹部彼此分离 支撑部分的一部分和平面部分中的通孔。