公开(公告)号：US3940960A

公开(公告)日：1976-03-02

申请号：US541953

申请日：1975-01-17

申请人： Shinya Tanifuji ,  Yasuo Morooka ,  Masaya Tanuma

发明人： Shinya Tanifuji ,  Yasuo Morooka ,  Masaya Tanuma

IPC分类号： B21B37/48 ,  B21B37/00 ,  B21B37/52 ,  G05D5/02

CPC分类号： B21B37/52

摘要： In a tandem rolling mill consisting of at least a first rolling stand and a second rolling stand, the interstand tension is controlled by the steps of detecting the rolling force P.sub.10 and rolling torque G.sub.10 at the first rolling stand after a workpiece is fed into the nip between the rolls of the first rolling stand but before the workpiece is fed into the nip between the rolls of the second rolling stand, storing in a memory the ratio G.sub.10 /P.sub.10 representative of the reference torque arm value for the first rolling stand in a tension-free state, detecting the rolling forces P.sub.1B, P.sub.2B and rolling torques G.sub.1B, G.sub.2B at the respective rolling stands immediately after the workpiece is fed into the nip between the rolls of the second rolling stand, computing the reference torque arm value G.sub.20 /P.sub.20 for the second rolling stand in a tension-free state on the basis of these detected values, and controlling the rolling speed of the first or second rolling stand so that (G.sub.10 /P.sub.10) - (G.sub.1 /P.sub.1) representing the deviation of the torque arm value detected at the first rolling stand in rolling operation from the reference torque arm value G.sub.10 /P.sub.10 stored in the memory is equal to (G.sub.20 /P.sub.20) - (G.sub.2 /P.sub.2) representing the deviation of the torque arm value detected at the second rolling stand in rolling operation from the reference torque arm value G.sub.20 /P.sub.20, whereby the workpiece can be rolled tension-free.

摘要翻译： 在由至少第一轧制机架和第二轧制机组构成的串联式轧机中，通过在将工件进给到轧辊中之后检测轧制力P10和第一轧制机架的轧制转矩G10的步骤来控制台架张力 在第一轧制机架的辊之间，但是在工件被供给到第二轧制机架的辊之间的辊隙之前，在存储器中存储代表第一轧机机架的参考转矩臂值的张力G10 / P10的张力 在工件被送入第二轧制机架的轧辊之间的辊隙之后立即检测在相应轧制机架处的轧制力P1B，P2B和轧制转矩G1B，G2B，计算参考转矩臂值G20 / P20，以便为 根据这些检测值将第二轧制机架置于无张力状态，并且控制第一轧制机架或第二轧制机架的轧制速度，使得（G10 / P10） - （G1 / P1）代表 滚动操作中的第一轧制机架检测到的转矩臂值与存储在存储器中的基准转矩臂值G10 / P10的偏差等于表示转矩臂偏差的（G20 / P20） - （G2 / P2） 在第二轧制机架中从参考转矩臂值G20 / P20在轧制操作中检测到​​的值，由此可以无张力地轧制工件。

公开(公告)号：US4738910A

公开(公告)日：1988-04-19

申请号：US872506

申请日：1986-06-10

申请人： Tetsuo Ito ,  Masaya Tanuma ,  Yoshiyuki Nakagomi ,  Kazuya Kadota ,  Kazunari Kobayashi

发明人： Tetsuo Ito ,  Masaya Tanuma ,  Yoshiyuki Nakagomi ,  Kazuya Kadota ,  Kazunari Kobayashi

IPC分类号： B05D7/00 ,  B05D1/32 ,  B05D1/40 ,  B05D3/06 ,  G03F7/16 ,  H01L21/027 ,  H01L21/30 ,  H01L21/302 ,  G03C5/00

CPC分类号： G03F7/162 ,  Y10S430/136

摘要： A photoresist process which comprises a process for spin-coating a substrate with a resist, a process for transferring a mask pattern onto the coated resist film followed by exposure, and a developing process for forming a pattern on the substrate after the pattern has been exposed. When the developed pattern of the resist pulsates with the increase or decrease of parameters in the process for applying resist, the value of the parameter is set to a value that corresponds to an extreme value of the pulsation.

摘要翻译： 一种光致抗蚀剂工艺，其包括用抗蚀剂旋涂衬底的方法，将掩模图案转印到涂覆的抗蚀剂膜上以进行曝光的工艺，以及在图案曝光之后在衬底上形成图案的显影工艺 。 当抗蚀剂的施加过程中抗蚀剂的显影图案随着参数的增加或减少而波动时，参数值被设定为对应于脉动极值的值。

公开(公告)号：US4292825A

公开(公告)日：1981-10-06

申请号：US123418

申请日：1980-02-21

申请人： Yasuo Morooka ,  Shinya Tanifuji ,  Masaya Tanuma

发明人： Yasuo Morooka ,  Shinya Tanifuji ,  Masaya Tanuma

IPC分类号： G05D5/02 ,  B21B37/00 ,  B21B37/18 ,  B21B37/52 ,  G05B13/00 ,  G05B13/02

CPC分类号： B21B37/52

摘要： A gauge and tension control system for a tandem mill comprises a delivered strip thickness deviation calculating unit for detecting output strip thickness at each of rolling stands, a tension calculating unit for arithmetically determining interstand tensions between two adjacent rolling stands on the basis of armature currents of drive motors and rolling loads at every rolling stand, a memory unit supplied with the output from the delivered strip thickness deviation calculating unit and detecting rolling speed values to thereby produce input strip thicknesses at every rolling stand, an optimal control unit for arithmetically determining optimal speed control quantity and press-down control quantity on the basis of the outputs from the delivered strip thickness deviation calculating unit, the tension calculating unit, the memory unit and a rolling schedule, a speed controller for controlling the speeds of the roll drive motors in dependence on the speed control quantities and a press-down controller for controlling the screw-down position of the rolling stands in dependence on the associated press-down control quantity.

摘要翻译： 用于串列式轧机的量规和张力控制系统包括用于检测每个轧制机架处的输出带材厚度的输送带材厚度偏差计算单元，用于根据电枢电流对两个相邻轧制机架之间的间隙张力进行算术确定的张力计算单元 驱动电机和轧制负载，每个轧制机架上提供的存储器单元，以及检测轧制速度值，从而在每个轧制机架上产生输入板厚度的最佳控制单元，用于算术确定最佳转速 控制量和下压控制量，根据输送带厚度偏差计算单元，张力计算单元，存储单元和滚动排程的输出，用于依次控制辊驱动马达的速度的速度控制器 关于速度控制量和压力 自己的控制器，用于根据相关的压下控制量来控制轧机的拧紧位置。