Vertical Comb Drive and Uses Thereof
    5.
    发明申请
    Vertical Comb Drive and Uses Thereof 审中-公开
    垂直梳齿驱动及其用途

    公开(公告)号:US20080197748A1

    公开(公告)日:2008-08-21

    申请号:US10565980

    申请日:2004-07-26

    Abstract: A method for providing a vertical comb drive. The method comprises: fabricating a device comprising rotor comb element, the rotor element comb comprising a main body and a plurality of substantially parallel extensions in a comb arrangement, and at least one of a plurality of stator comb elements, comprising a main body and a plurality of substantially parallel extensions in a comb arrangement, adapted to be interlaced with the rotor, all on a single layer of a substrate.

    Abstract translation: 一种用于提供垂直梳齿驱动的方法。 该方法包括:制造包括转子梳形元件的装置,所述转子元件梳包括主体和梳状布置中的多个基本平行的延伸部,以及多个定子梳形元件中的至少一个,包括主体和 多个基本上平行的梳齿布置的延伸件,适于与转子交错,全部在基底的单层上。

    APPARATUS AND METHODS FOR LOCKING RESONATING FREQUENCY OF A MINIATURE SYSTEM
    7.
    发明申请
    APPARATUS AND METHODS FOR LOCKING RESONATING FREQUENCY OF A MINIATURE SYSTEM 有权
    用于锁定微型系统的共振频率的装置和方法

    公开(公告)号:US20140218700A1

    公开(公告)日:2014-08-07

    申请号:US14342676

    申请日:2012-09-04

    Abstract: A resonance locking system for a pico-projector, the system comprising a resonance frequency sensor operative for sensing change in resonance frequency of a miniature mechanical device (10) including a moving mirror assembly having a driving frequency, by comparing a current resonance frequency to a reference; and a feedback loop changing at least one aspect of use of the miniature moving mirror assembly responsive to a current value of the resonance frequency measured by the sensor.

    Abstract translation: 一种用于微型投影仪的共振锁定系统,该系统包括谐振频率传感器,该谐振频率传感器用于通过将电流谐振频率与电流谐振频率进行比较来检测包括具有驱动频率的移动反射镜组件的微型机械装置(10)的谐振频率的变化 参考; 以及反馈回路,响应于由传感器测量的谐振频率的当前值,改变微型移动镜组件的使用的至少一个方面。

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