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公开(公告)号：US5877421A
公开(公告)日：1999-03-02
申请号：US939358
申请日：1997-09-29
申请人： Markus Biebl , Ulrich Naeher , Christofer Hierold , Max Steger
发明人： Markus Biebl , Ulrich Naeher , Christofer Hierold , Max Steger
CPC分类号： G01P1/006 , G01P15/125 , G01P15/131 , G01P15/18
摘要： An acceleration sensor has a mass part movably attached over a substrate with pairs of electrodes arranged relative to the mass part so that one electrode of each pair is under the mass part and the other electrode of that pair is arranged above the mass part. The electrodes are attached immovably to the substrate. Controllable electrical voltages can be applied such via an electronic drive circuit to the electrically conductively doped mass part and to these electrodes so that excursions of the mass part can be electrostatically compensated and, at the same time, the magnitude of inertial forces acting on the mass part, and thus the magnitude of accelerations, can be measured.
摘要翻译： 一种加速度传感器具有可移动地附接在基板上的质量部分，其具有相对于质量部分布置的电极对，使得每对电极在质量部分下方，并且该对电极的另一个电极布置在质量部分的上方。 电极固定在衬底上。 可以通过电子驱动电路将可控电压施加到导电掺杂质量部分和这些电极，使得质量部件的偏移可以被静电补偿，并且同时，作用在质量上的惯性力的大小 部分，因此可以测量加速度的大小。
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公开(公告)号：US5974895A
公开(公告)日：1999-11-02
申请号：US880651
申请日：1997-06-23
申请人： Max Steger , Thomas Scheiter , Christofer Hierold , Reinhold Noe
发明人： Max Steger , Thomas Scheiter , Christofer Hierold , Reinhold Noe
CPC分类号： G01D5/24 , G01L9/12 , G01P15/125 , G01R27/2605
摘要： A capacitance to be measured is connected together with three further capacitances to form a bridge circuit, in which each two of the capacitors are connected in series, and these two series circuits are connected in parallel to one another, and which replaces a part of the input stage of a .SIGMA.-.DELTA. modulator. As inputs of this bridge circuit, terminals are provided at the ends of these series circuits, and as outputs terminals are respectively provided between the capacitors connected one after the other in series. In a sensor realized thereby, two capacitively measuring sensor elements of the same type are used. These capacitors are built into the bridge circuit together with two equally large reference capacitors in such a way that exactly one measurement capacitor and one reference capacitor is La connected is connected to each input and to each output of the bridge circuit.
摘要翻译： 要测量的电容与三个另外的电容连接在一起形成桥接电路，其中每两个电容器串联连接，并且这两个串联电路彼此并联连接，并且其中的一部分 SIGMA-DELTA调制器的输入级。 作为该桥式电路的输入端子，在这些串联电路的端部设置有端子，在串联连接的电容器之间分别设置有输出端子。 在由此实现的传感器中，使用相同类型的两个电容测量传感器元件。 这些电容器与两个同样大的参考电容器一起内置在桥式电路中，使得一个测量电容器和一个参考电容器La连接到桥接电路的每个输入和每个输出。
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公开(公告)号：US6094985A
公开(公告)日：2000-08-01
申请号：US308730
申请日：1999-05-24
申请人： Hergen Kapels , Christofer Hierold , Max Steger , Thomas Scheiter , Reinhold Noe , Ulrich Naher
发明人： Hergen Kapels , Christofer Hierold , Max Steger , Thomas Scheiter , Reinhold Noe , Ulrich Naher
CPC分类号： G01C19/5712
摘要： Rotation rate sensor as a micromechanical component in silicon, in which a ring with a rigid strut along a diameter is so suspended at elastic braces and anchoring arrangements on a substrate as to be able to perform rotation oscillations about its center axis and to be able to be tilted about the strut under the influence of outer torques. There are electrodes present at the ring and at the substrate, at which electrodes electrical voltages can be applied such that rotary oscillations of the ring about its center axis can be excited and rotary oscillations about the strut can be detected. To stabilize the position of the ring in the neutral position, additional electrodes can be provided at the ring and at the substrate for the generation of electrostatic forces.
摘要翻译： PCT No.PCT / DE97 / 02671 Sec。 371日期1999年5月24日 102（e）1999年5月24日PCT 1997年11月14日PCT PCT。 第WO98 / 23917号公报 日期1998年6月4日作为硅中的微机械部件的转速传感器，其中沿着直径的刚性支柱的环悬挂在基板上的弹性支架和锚定装置上，以便能够围绕其中心轴线执行旋转振荡 并且能够在外部扭矩的影响下围绕支柱倾斜。 存在于环和基板处的电极，电极可以施加电压，使得环绕其中心轴的旋转振荡可被激发，并且可以检测到围绕支柱的旋转振荡。 为了稳定环在中性位置的位置，可以在环和基板处设置附加电极以产生静电力。
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