公开(公告)号：US20050045591A1

公开(公告)日：2005-03-03

申请号：US10604991

申请日：2003-08-29

申请人： Steven Codding ,  Timothy Krywanczyk ,  Joseph Danaher ,  John Malinowski ,  James Palmer ,  Melvin Kelly ,  Caitlin Weinstein ,  Wolfgang Sauter

发明人： Steven Codding ,  Timothy Krywanczyk ,  Joseph Danaher ,  John Malinowski ,  James Palmer ,  Melvin Kelly ,  Caitlin Weinstein ,  Wolfgang Sauter

IPC分类号： C23F3/06 ,  H01L21/321 ,  C23F1/00

CPC分类号： H01L21/3212 ,  C23F3/06

摘要： A method of treating a molybdenum (moly) mask used in a C4 process to pattern C4 contacts. The moly mask has a wafer side which contacts a wafer during the C4 process and has a rough surface that includes spikes/projections of moly. The moly mask also has a non wafer side and a plurality of holes extending through the mask to pattern C4 contacts in the C4 process. An adhesive layer, such as an adhesive tape, is applied to the non wafer side of the moly mask, to enable a polishing tool to pull a vacuum on the non wafer side of the moly mask in spite of the presence of the holes to secure the moly mask during a subsequent polishing step. The tape also functions as a cushion so that defects on the non wafer side of the moly mask do not replicate through the moly mask to the polished wafer side of the moly mask. The wafer side of the moly mask is then subjected to mechanical or chemical/mechanical polishing to substantially remove the spikes of moly without significantly altering the dimensions of the moly mask or the holes.

摘要翻译： 一种处理C4工艺中使用的钼（钼）掩模的图案化C4接触的方法。 钼掩模具有在C4工艺期间接触晶片的晶片侧，并且具有包括钼的尖峰/突起的粗糙表面。 钼掩模还具​​有非晶片侧和在C4工艺中延伸穿过掩模以形成图案C4触点的多个孔。 粘合剂层例如胶带被施加到钼掩模的非晶片侧，以使得抛光工具能够在钼掩模的非晶片侧上拉真空，尽管存在孔以确保 在随后的抛光步骤期间的钼掩模。 胶带还起垫片的作用，使得钼掩模的非晶片侧的缺陷不会通过钼掩模复制到钼掩模的抛光晶片侧。 然后对钼掩模的晶片侧进行机械或化学/机械抛光，以基本上除去钼的尖峰而不显着改变钼掩模或孔的尺寸。

公开(公告)号：US20060060357A1

公开(公告)日：2006-03-23

申请号：US10946374

申请日：2004-09-21

申请人： Melvin Kelly ,  Christopher Jenkins

发明人： Melvin Kelly ,  Christopher Jenkins

IPC分类号： E21B29/12

CPC分类号： E21B43/129 ,  E21B23/08 ,  E21B33/076

摘要： A subsea well pumping system for installing and retrieving a hydraulically actuated down hole pump employed within the tubing suspended within casing extending from above a seabed, the system having a wellhead assembly affixed to the upper end of the casing for supporting the tubing and including provision for hydraulically communicating with the interior of the casing and the tubing, a remotely controllable main valve affixed to the tubing at its upper end, a tubular pump lubricator affixed at its lower end to the main valve, a removable pump latch sealably closing the pump lubricator at its upper end and having a pump catcher extending downwardly therefrom for removably latching onto the pump and a system for guiding the pump suspended form the pump catcher into the pump lubricator whereby the pump can be moved downwardly in the tubing into a pumping position by fluid injected into the tubing and can be moved upwardly in the tubing into a retrievable position for grasping by the pump catcher by fluid injected into the casing.

摘要翻译： 一种海底井泵送系统，用于安装和取回在从海床上方延伸的壳体内的管道内采用的液压致动的下孔泵，该系统具有固定到壳体的上端以支撑管道的井口组件， 与壳体和管道的内部液压连通，在其上端附接到管道的可远程控制的主阀，在其下端固定到主阀的管状泵润滑器，可拆卸的泵闩，其可密封地关闭泵润滑器 其上端并具有从其向下延伸的泵捕获器，用于可拆卸地锁定在泵上;以及系统，用于引导从泵捕集器悬挂的泵进入泵润滑器，由此泵可以通过流体喷射在管道中向下移动到泵送位置 进入管道并且可以在管道中向上移动到用于由泵抓取的可回收位置 捕获器通过注入到壳体中的流体。