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    Method and structure for detection and measurement of electrical and mechanical resonance associated with an E-beam lithography tool
    2.
    发明授权
    Method and structure for detection and measurement of electrical and mechanical resonance associated with an E-beam lithography tool 有权
    用于检测和测量与电子束光刻工具相关的电气和机械共振的方法和结构

    公开(公告)号：US06781141B2

    公开(公告)日：2004-08-24

    申请号：US10284509

    申请日：2002-10-29

    申请人： Michael Edward Scaman

    发明人： Michael Edward Scaman

    IPC分类号： A61N500

    CPC分类号： H01J37/304 ,  H01J2237/30433 ,  H01J2237/3175

    摘要： As disclosed herein, a system and method are provided for detection and measurement of noise on E beam tools and devices including a spectrum analyzer which looks at the different frequency components of the noise. The deflected electron beam from the tool is calibrated in a coarse and fine mode by scanning the beam over a grid-like calibration target. The position of where the bars are detected is compared to where they actually are, and the deflection can be calibrated so that it matches the grid. This invention can utilize a Fast Fourier Transform (FFT) of the time-ordered data which allows one to see peaks associated with noise.

    摘要翻译： 如本文所公开的，提供了一种用于检测和测量E波束工具和设备上的噪声的系统和方法，包括考虑噪声的不同频率分量的频谱分析仪。 来自工具的偏转的电子束通过扫描光栅在格子状的校准目标上，以粗略和精细的模式进行校准。 将检测条的位置与其实际位置进行比较，可以对偏转进行校准，使其与栅格匹配。 本发明可以利用时间有序数据的快速傅立叶变换（FFT），其允许人们看到与噪声相关联的峰值。

    Method and structure for detection of electromechanical problems using variance statistics in an E-beam lithography device
    3.
    发明授权
    Method and structure for detection of electromechanical problems using variance statistics in an E-beam lithography device 失效

    公开(公告)号：US06785615B2

    公开(公告)日：2004-08-31

    申请号：US10284510

    申请日：2002-10-29

    申请人： Michael Edward Scaman

    发明人： Michael Edward Scaman

    IPC分类号： G01N3100

    CPC分类号： H01J37/3045

    摘要： An apparatus and method for detection of electromechanical and mechanical errors in an electron beam device is provided. First the existing subfield is divided into a gridlike structure where each grid can be considered a target. Then a plurality of target points are provided on each grid for measuring combined directional variances. The separated horizontal and vertical variances is also measured for each of the target points. This leads to the performance of a significance tests, based on the F statistic which we refer to as FHV, for horizontal and vertical values of each target points during which FSTITCH values are also obtained. The FSTITCH values are then compared for horizontal and vertical values and an error alert provided when there is a sufficiently large disparity between the separated FSTITCH values. In an alternate embodiment of the present invention, a three dimensional grid is also provided to be used in a similar manner. The severity of the error can also be determined based on the disparity of the values. Lastly we refer to a simple F statistic for testing for flatness of the entire field, based on row and field information and refer to it as FROWS.

    Method and apparatus for multi-stream detection of high density metalization layers of multilayer structures having low contrast
    4.
    发明授权
    Method and apparatus for multi-stream detection of high density metalization layers of multilayer structures having low contrast 失效
    用于多流检测具有低对比度的多层结构的高密度金属化层的方法和装置

    公开(公告)号：US6005966A

    公开(公告)日：1999-12-21

    申请号：US799517

    申请日：1997-02-12

    申请人： Michael Edward Scaman

    发明人： Michael Edward Scaman

    IPC分类号： G01N21/956 ,  G06K9/00

    CPC分类号： G01N21/956

    摘要： A method and apparatus for detecting opens and shorts in a metalization layer includes creating a reference feature list of opens features and at least two reference feature lists of shorts features included in a top surface metalization. A first of the at least two reference feature lists include shorts features having a first threshold and the second of the at least two reference feature lists include shorts features having a second threshold more aggressive than the first threshold. High numerical aperture (NA) illumination is used to produce a grey level image of the top surface metalization. A first image stream is produced from the grey level image using a first digital threshold suitable for use in detecting opens exclusive of shorts and then opens features are extracted. At least a second image stream and a third image steam are then produced from the grey level image using second and third digital thresholds, respectively, suitable for use in detecting shorts exclusive of opens. Thereafter, shorts features are extracted from the second and third image streams. Lastly, a report of extra opens features and extra shorts features extracted from the first, second, and third image streams is generated, wherein the extra opens and shorts features constitute potential flaws.

    摘要翻译： 用于检测金属化层中的开口和短路的方法和装置包括创建打开特征的参考特征列表和包括在顶表面金属化中的短裤特征的至少两个参考特征列表。 所述至少两个参考特征列表中的第一个包括具有第一阈值的短路特征，并且所述至少两个参考特征列表中的第二个包括具有比第一阈值更具侵略性的第二阈值的短路特征。 高数值孔径（NA）照明用于产生顶部表面金属化的灰度图像。 使用适合用于检测打开而不是短裤的第一数字阈值从灰度级图像产生第一图像流，然后提取打开的特征。 然后，使用分别适用于检测不包括打开的短裤的第二和第三数字阈值，从灰度级图像产生至少第二图像流和第三图像蒸汽。 此后，从第二和第三图像流中提取短裤特征。 最后，产生从第一，第二和第三图像流中提取的额外打开特征和额外的短裤特征的报告，其中额外的打开和短裤特征构成潜在的缺陷。