公开(公告)号：US06605312B2

公开(公告)日：2003-08-12

申请号：US09962212

申请日：2001-09-26

申请人： Torsten Winkler ,  Ralf Blüthner ,  Klaus Goedicke ,  Michael Junghähnel ,  Hans Buchberger ,  Manfred Müller ,  Arno Hebgen ,  Hans-Hermann Schneider

发明人： Torsten Winkler ,  Ralf Blüthner ,  Klaus Goedicke ,  Michael Junghähnel ,  Hans Buchberger ,  Manfred Müller ,  Arno Hebgen ,  Hans-Hermann Schneider

IPC分类号： B05D100

CPC分类号： C23C14/35 ,  C23C16/515

摘要： Production of a thin-film system containing at least one ultra-thin film, preferentially in the film thickness range from 1 to 10 nm, which is deposited by plasma-aided chemical or physical vapor-phase deposition using magnetron discharges. The method is characterized in that in the course of deposition of the ultra-thin film the power output is introduced into the plasma in the form of a controlled number of power pulses and that the average power output during the pulse-on time is set higher by a factor of at least 3 than the averaged power output over the entire coating time during deposition of the ultra-thin film.

摘要翻译： 生产含有至少一种超薄膜的薄膜系统，优选在1至10nm的膜厚度范围内，其通过使用磁控管放电的等离子体辅助化学或物理气相沉积来沉积。 该方法的特征在于，在沉积超薄膜的过程中，功率输出以受控数量的功率脉冲的形式被引入到等离子体中，并且将脉冲接通时间期间的平均功率输出设置得更高 比在超薄膜沉积期间的整个涂布时间的平均功率输出至少3倍。

公开(公告)号：US06340416B1

公开(公告)日：2002-01-22

申请号：US09341998

申请日：1999-07-22

申请人： Klaus Goedicke ,  Torsten Winkler ,  Michael Junghähnel ,  Fred Fietzke ,  Volker Kirchhoff ,  Jonathan Reschke

发明人： Klaus Goedicke ,  Torsten Winkler ,  Michael Junghähnel ,  Fred Fietzke ,  Volker Kirchhoff ,  Jonathan Reschke

IPC分类号： C23C1434

CPC分类号： H01J37/34

摘要： Magnetron discharges are pulse-operated to avoid the so-called “arcing”. In the case of magnetron discharges from alternating current-fed magnetrons, the process is limited to the minor power of the energy supply because of the load-carrying capacity of the required electric components. When the magnetron discharges are fed by direct current, their effectiveness deteriorates because of the deposition of layers on the anode surfaces. The new process should enable a high supply power and prevent arcing. In magnetron discharges with at least two magnetron electrodes, the energy is supplied in such a way that at least one magnetron electrode is a cathode or anode and a number n1 of direct current pulses of said polarity is supplied. The poles of at least one magnetron electrode are then reversed and a number n2 of direct currents of this polarity are supplied. The process is carried on in this manner, the frequency of the direct current pulses being higher than that of the polarity reversals. The energy supply effectiveness is thus improved. This process and system enable the production of layers having the most different properties, for example for the glass, packaging, electronic, and machine construction industries.

摘要翻译： 磁控管放电是脉冲操作的，以避免所谓的“电弧”。 在由交流馈电磁控管放电的磁控管的情况下，由于所需的电气部件的承载能力，该过程被限制在能量供应的次要功率。 当磁控管放电由直流供电时，由于层在阳极表面上的沉积，它们的有效性降低。 新的过程应该能够实现高供电和防止电弧。 在具有至少两个磁控管电极的磁控管放电中，以至少一个磁控管电极为阴极或阳极并且提供所述极性的直流电脉冲数n1的方式提供能量。 然后至少一个磁控管电极的极被反转，并且提供这个极性的直流电的数量n2。 以这种方式进行该过程，直流脉冲的频率高于极性反转的频率。 从而提高能源供应效率。 该方法和系统能够生产具有最不同性质的层，例如用于玻璃，包装，电子和机械制造业。