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17 条记录 (耗时 0.015 秒)

    Device for producing an electron beam
    1.
    发明授权
    Device for producing an electron beam 有权
    用于产生电子束的装置

    公开(公告)号：US08878422B2

    公开(公告)日：2014-11-04

    申请号：US13821887

    申请日：2011-09-08

    申请人： Goesta Mattausch ,  Peter Feinaeugle ,  Volker Kirchhoff ,  Dieter Weiske ,  Henrik Flaske ,  Rainer Zeibe

    发明人： Goesta Mattausch ,  Peter Feinaeugle ,  Volker Kirchhoff ,  Dieter Weiske ,  Henrik Flaske ,  Rainer Zeibe

    IPC分类号： H01J1/02 ,  F03H1/00 ,  H01J27/26 ,  H01J37/075

    CPC分类号： H01J37/075 ,  H01J3/025 ,  H01J37/077 ,  H01J2237/3104 ,  H01J2237/3128 ,  H01J2237/3132

    摘要： Device for producing an electron beam includes a housing, which delimits a space that is evacuatable and has an electron beam outlet opening; an inlet structured and arranged for feeding process gas into the space; and a planar cathode and an anode, which are arranged in the space, and between which, a glow discharge plasma is producible by an applied electrical voltage. Ions are accelerateable from the glow discharge plasma onto a surface of the cathode and electrons emitted by the cathode are accelerateable into the glow discharge plasma. The cathode includes a first part made of a first material at least on an emission side, which forms a centrally arranged first surface region of the cathode, and a second part made of a second material, which forms a second surface region of the cathode that encloses the first surface region.

    摘要翻译： 用于制造电子束的装置包括壳体，其限定可抽空并具有电子束出口的空间; 一个构造和布置成用于将工艺气体供给到空间中的入口; 以及布置在该空间中的平面阴极和阳极之间，其中通过所施加的电压产生辉光放电等离子体。 离子可以从辉光放电等离子体加速到阴极的表面上，由阴极发射的电子可加速到辉光放电等离子体中。 阴极包括由至少在发射侧的第一材料制成的第一部分，其形成中心布置的阴极的第一表面区域，以及由第二材料制成的第二部分，其形成阴极的第二表面区域， 封闭第一表面区域。

    Method for monitoring alternating current discharge on a double electrode and apparatus
    5.
    发明授权
    Method for monitoring alternating current discharge on a double electrode and apparatus 失效
    双电极交流放电监测方法及装置

    公开(公告)号：US06420863B1

    公开(公告)日：2002-07-16

    申请号：US09581208

    申请日：2000-06-21

    申请人： Falk Milde ,  Torsten Winkler ,  Andreas Fickert ,  Volker Kirchhoff ,  Matthias Fahland

    发明人： Falk Milde ,  Torsten Winkler ,  Andreas Fickert ,  Volker Kirchhoff ,  Matthias Fahland

    IPC分类号： G01R1716

    CPC分类号： H01J37/3444 ,  H01J37/3405 ,  H05H1/0081

    摘要： Process for monitoring an alternating-voltage discharge between the electrodes of a double electrode and an apparatus. The process includes measuring values of at least one of a discharge current and a discharge voltage for each half-wave within an alternating-voltage discharge period, determining a difference between the measured values of a second half-wave and the measured values of the first half-wave, and comparing the determined differences to specific tolerance values. When the specific tolerance values are exceeded by the determined differences, a power supply is reduced, whereby the discharge is at least briefly suppressed. The apparatus includes a double magnetron including first and second targets arranged to form a double electrode, and a power supply coupled to supply power to the first and second targets. The power supply includes a measurement unit for measuring values of at least one of discharge current and discharge voltage, such that at least one of a discharge current and a discharge voltage for each half-wave within an alternating-voltage discharge period is measured. A device for determining a difference between the measured values of a second half-wave and the measured values of the first half-wave is provided, as well as a device for comparing the determined differences to specific tolerance values, and a device for at least briefly suppressing the discharge when the specific tolerance values are exceeded by the determined differences.

    摘要翻译： 用于监视双电极的电极与装置之间的交流电压放电的方法。 该过程包括在交流电压放电周期内测量每个半波的放电电流和放电电压中的至少一个的值，确定第二半波的测量值与第一半波的测量值之间的差值 半波，并将确定的差异与特定容差值进行比较。 当通过所确定的差异超过特定公差值时，电源减少，从而至少简化了放电。 该装置包括双重磁控管，其包括布置成形成双电极的第一和第二靶，以及耦合以向第一和第二靶提供电力的电源。 电源包括测量单元，用于测量放电电流和放电电压中的至少一个的值，以便测量交流电压放电周期内的每个半波的放电电流和放电电压中的至少一个。 提供了一种用于确定第二半波的测量值与第一半波的测量值之间的差异的装置，以及用于将确定的差异与特定公差值进行比较的装置，以及用于至少 当确定的差异超过特定公差值时，暂时抑制放电。

    Device and method for altering the characteristics of three-dimensional shaped parts using electrons and use of said method
    9.
    发明授权
    Device and method for altering the characteristics of three-dimensional shaped parts using electrons and use of said method 有权
    使用电子改变三维成形部件的特性的装置和方法

    公开(公告)号：US08178858B2

    公开(公告)日：2012-05-15

    申请号：US12293756

    申请日：2007-03-20

    申请人： Rainer Bartel ,  Volker Kirchhoff ,  Goesta Mattausch ,  Olaf Roeder ,  Joerg Kubusch

    发明人： Rainer Bartel ,  Volker Kirchhoff ,  Goesta Mattausch ,  Olaf Roeder ,  Joerg Kubusch

    IPC分类号： A61N5/00

    CPC分类号： H01J33/00 ,  A61L2/087 ,  A61L2202/14 ,  A61L2202/23 ,  A61L2202/24

    摘要： The invention relates to a device and a method for altering the characteristics of a three-dimensional article by means of electrons, including at least one electron accelerator for generating accelerated electrons and two electron exit windows, wherein the two electron exit windows are arranged opposite one another, wherein the two electron exit windows and at least one reflector delimit a process chamber in which the surface or surface layer of the article are bombarded with electrons, wherein an energy density distribution inside the process chamber can be detected at least over one spatial dimension by means of a sensor system.

    摘要翻译： 本发明涉及一种通过电子来改变三维制品的特性的装置和方法，该电子包括至少一个用于产生加速电子的电子加速器和两个电子出射窗，其中两个电子出射窗口相对地布置 另一个，其中两个电子出射窗口和至少一个反射器限定处理室，其中制品的表面或表面层用电子轰击，其中可以至少在一个空间维度上检测处理室内部的能量密度分布 通过传感器系统。

    Process and system for operating magnetron discharges
    10.
    发明授权
    Process and system for operating magnetron discharges 有权
    用于操作磁控管放电的过程和系统

    公开(公告)号：US06340416B1

    公开(公告)日：2002-01-22

    申请号：US09341998

    申请日：1999-07-22

    申请人： Klaus Goedicke ,  Torsten Winkler ,  Michael Junghähnel ,  Fred Fietzke ,  Volker Kirchhoff ,  Jonathan Reschke

    发明人： Klaus Goedicke ,  Torsten Winkler ,  Michael Junghähnel ,  Fred Fietzke ,  Volker Kirchhoff ,  Jonathan Reschke

    IPC分类号： C23C1434

    CPC分类号： H01J37/34

    摘要： Magnetron discharges are pulse-operated to avoid the so-called “arcing”. In the case of magnetron discharges from alternating current-fed magnetrons, the process is limited to the minor power of the energy supply because of the load-carrying capacity of the required electric components. When the magnetron discharges are fed by direct current, their effectiveness deteriorates because of the deposition of layers on the anode surfaces. The new process should enable a high supply power and prevent arcing. In magnetron discharges with at least two magnetron electrodes, the energy is supplied in such a way that at least one magnetron electrode is a cathode or anode and a number n1 of direct current pulses of said polarity is supplied. The poles of at least one magnetron electrode are then reversed and a number n2 of direct currents of this polarity are supplied. The process is carried on in this manner, the frequency of the direct current pulses being higher than that of the polarity reversals. The energy supply effectiveness is thus improved. This process and system enable the production of layers having the most different properties, for example for the glass, packaging, electronic, and machine construction industries.

    摘要翻译： 磁控管放电是脉冲操作的，以避免所谓的“电弧”。 在由交流馈电磁控管放电的磁控管的情况下，由于所需的电气部件的承载能力，该过程被限制在能量供应的次要功率。 当磁控管放电由直流供电时，由于层在阳极表面上的沉积，它们的有效性降低。 新的过程应该能够实现高供电和防止电弧。 在具有至少两个磁控管电极的磁控管放电中，以至少一个磁控管电极为阴极或阳极并且提供所述极性的直流电脉冲数n1的方式提供能量。 然后至少一个磁控管电极的极被反转，并且提供这个极性的直流电的数量n2。 以这种方式进行该过程，直流脉冲的频率高于极性反转的频率。 从而提高能源供应效率。 该方法和系统能够生产具有最不同性质的层，例如用于玻璃，包装，电子和机械制造业。