公开(公告)号：US5882845A

公开(公告)日：1999-03-16

申请号：US696717

申请日：1996-08-14

申请人： Michel Ida ,  Brigitte Montmayeul

发明人： Michel Ida ,  Brigitte Montmayeul

IPC分类号： G03F1/20 ,  H01J9/02 ,  H01L21/027 ,  G03F7/00

CPC分类号： G03F1/20 ,  H01J9/025

摘要： A method and a device for the formation of holes in a layer of photosensitive material, in particular for the manufacture of electron sources.This method is characterized in that a membrane (121) with micro-perforations (122) is laid onto the layer of photosensitive material (120); the layer of photosensitive material is insolated through the membrane (121) in order to print areas (125) corresponding to the micro-perforations (122); the membrane (121) is separated from the layer of photosensitive material (120) thus insolated and the photosensitive layer (120) is then developed in order to form holes in it corresponding to the insolated areas (125).

摘要翻译： 用于在感光材料层中形成空穴的方法和装置，特别是用于制造电子源。 该方法的特征在于，将具有微穿孔（122）的膜（121）放置在感光材料层（120）上; 为了打印对应于微穿孔（122）的区域（125），感光材料层通过膜（121）进行绝缘。 膜（121）与所蚀刻的感光材料层（120）分离，然后显影感光层（120），以在其中形成与绝缘区域（125）相对应的孔。

公开(公告)号：US5669800A

公开(公告)日：1997-09-23

申请号：US533719

申请日：1995-09-26

申请人： Michel Ida ,  Brigitte Montmayeul

发明人： Michel Ida ,  Brigitte Montmayeul

IPC分类号： G03F7/00 ,  G03F7/20 ,  H01J9/02

CPC分类号： G03F7/0015 ,  G03F7/20 ,  H01J9/025

摘要： A process for the formation of holes in a photosensitive resin layer, which can be applied to the production of electron sources having emissive cathodes with microtips and flat display screens. According to this process, a resin layer is exposed through a monolayer of balls transparent to an exposure light, with each ball focussing the light onto the resin layer and in this way bringing about the exposure of an area of said resin layer so that the thus exposed resin layer is developed.

摘要翻译： 用于在感光性树脂层中形成孔的方法，其可以应用于具有微尖端和平面显示屏的具有发射阴极的电子源的生产。 根据该方法，树脂层通过对曝光光透明的单层球曝光，每个球将光聚焦到树脂层上，并以这种方式引起所述树脂层的面积的曝光， 开发了露出的树脂层。

公开(公告)号：US06537801B1

公开(公告)日：2003-03-25

申请号：US09787894

申请日：2001-03-28

申请人： Michel Ida ,  Alain Fargeix ,  François Perraut ,  Alexandre Lagrange

发明人： Michel Ida ,  Alain Fargeix ,  François Perraut ,  Alexandre Lagrange

IPC分类号： C12Q168

CPC分类号： G01N21/6452

摘要： A device for reading a biochip including plural molecular recognition areas and plural optical positioning marks, associated with recognition areas. The device includes an optical head capable of projecting excitation light onto the biochip. A device is provided to effectuate relative displacement between the head and the biochip. A first optical analysis system is associated with the optical head to receive any light arriving from recognition areas. A second optical positioning system is associated with the optical head to receive any light from at least one guide track and/or optical positioning mark. A device is further provided for servocontrolling scanning by the optical head. Such a device may find particular application to biological and chemical analysis.

摘要翻译： 一种用于读取包括与识别区域相关联的多个分子识别区域和多个光学定位标记的生物芯片的装置。 该装置包括能够将激发光投射到生物芯片上的光学头。 提供了一种用于实现头部和生物芯片之间的相对位移的装置。 第一光学分析系统与光学头相关联以接收从识别区域到达的任何光。 第二光学定位系统与光学头相关联以接收来自至少一个导轨和/或光学定位标记的任何光。 进一步提供用于由光学头进行伺服控制扫描的装置。 这样的装置可以发现特定的生物和化学分析应用。

公开(公告)号：US5835273A

公开(公告)日：1998-11-10

申请号：US433963

申请日：1995-05-04

申请人： Michel Ida ,  Patrick Chaton

发明人： Michel Ida ,  Patrick Chaton

IPC分类号： G02B1/10 ,  G02B5/18

CPC分类号： G02B5/0833 ,  G02B5/0883 ,  Y10S359/90

摘要： A high reflectivity, broad band mirror for a high flux laser and a process for producing such a mirror. The mirror includes a substrate on which is formed a metallic layer such as aluminum. A stack of layers are formed on the metallic layer. The stack includes alternating layers of two materials with the refractive index of one material being higher than that of the other. A surface layer of a third material is placed on the stack. The surface layer has a refractive index which varies in accordance with the continuous periodic profile. The mirror is formed by depositing the metallic layer on a substrate and forming the stack by an ion beam sputtering method.

摘要翻译： 用于高通量激光器的高反射率，宽带镜和用于制造这种镜子的方法。 反射镜包括在其上形成诸如铝的金属层的基板。 在金属层上形成一叠层。 堆叠包括具有一种材料的折射率高于另一种材料的两种材料的交替层。 将第三材料的表面层放置在堆叠上。 表面层具有根据连续周期轮廓而变化的折射率。 通过将金属层沉积在基板上并通过离子束溅射法形成叠层来形成反射镜。

公开(公告)号：US06509061B1

公开(公告)日：2003-01-21

申请号：US08931000

申请日：1997-10-21

申请人： Michel Ida ,  Aimé Perrin ,  Michel Borel ,  Raymond Charles

发明人： Michel Ida ,  Aimé Perrin ,  Michel Borel ,  Raymond Charles

IPC分类号： C23C1400

CPC分类号： H01J9/025 ,  C23C14/24 ,  C23C14/243 ,  C23C14/505

摘要： An apparatus for depositing a material by evaporation on a substrate having a large surface. The apparatus includes an enclosure in which are placed a number of material evaporation sources. It also includes a device for channeling or piping of vapors emitted by the sources toward the substrate during evaporation. This is formed by walls or covers which define compartments within the enclosure, each evaporation source being placed in a compartment. The apparatus can also utilize a device for moving the substrate in order to improve the uniformity of the deposit.

摘要翻译： 一种用于通过蒸发将材料沉积在具有大表面的基底上的装置。 该装置包括其中放置有多个材料蒸发源的外壳。 它还包括用于在蒸发期间将源发射到衬底的蒸气引导或管道的装置。 这由壁或盖形成，其限定了外壳内的隔室，每个蒸发源被放置在隔室中。 该装置还可以利用用于移动基板的装置，以便提高沉积物的均匀性。

公开(公告)号：US6030266A

公开(公告)日：2000-02-29

申请号：US899169

申请日：1997-07-23

申请人： Michel Ida ,  Marc Rabarot

发明人： Michel Ida ,  Marc Rabarot

IPC分类号： G03F7/20 ,  H01J9/02 ,  H01J31/12 ,  H01L21/027 ,  H01J9/00

CPC分类号： G03F7/70075 ,  G03F7/2022 ,  G03F7/2053 ,  G03F7/70383 ,  H01J9/025 ,  H01J2329/00

摘要： Process and apparatus for the formation of patterns in a photosensitive resin layer or photoresist by continuous laser irradiation, application to the production of microtip emissive cathode electron sources and flat display screens. Formation takes place of non-mutually interfering elementary light beams (41), there is at least one relative translation at constant light power and speed of said beams with respect to the layer in order to irradiate lines thereof, each line receiving a light dose lower than that necessary for the development of the resin, a relative rotation of all the beams with respect to the layer takes place, the translation is recommenced in order to irradiate other lines, each line receiving a light dose complimentary to the preceding dose and the resin is developed.

摘要翻译： 用于通过连续激光照射在感光性树脂层或光致抗蚀剂中形成图案的方法和装置，应用于生产微尖端发射阴极电子源和平面显示屏。 形成发生在非相互干扰的基本光束（41）上，所述光束相对于该层的恒定光功率和速度存在至少一个相对平移，以便照射它们的线，每条线接收较低的光剂量 比开发树脂所需的那样，发生所有光束相对于层的相对旋转，重新开始平移以便照射其它线，每条线接收与前一剂量互补的光剂量，并且树脂 是开发的

公开(公告)号：US5700627A

公开(公告)日：1997-12-23

申请号：US696716

申请日：1996-08-14

申请人： Michel Ida ,  Robert Baptist

发明人： Michel Ida ,  Robert Baptist

IPC分类号： G03B7/20 ,  G03F7/20 ,  H01J9/02 ,  H01L21/027 ,  G03C5/00

CPC分类号： B82Y30/00 ,  G03F7/20 ,  G03F7/70383 ,  H01J9/025

摘要： A device for insolating micrometric areas in a photosensitive layer and a method for producing patterns in such a layer. The method is characterized in that the layer is subjected to an atmosphere containing a transparent liquid that does not wet the photosensitive material, in order to produce on this layer a monolayer of micro-droplets (121), the layer of photosensitive material is insolated through the monolayer of micro-droplets (121) in order to selectively print the areas of exposure (122) of the layer, the micro-droplets (121) are removed, and the layer of photosensitive material is developed in order to form said patterns in accordance with the areas of exposure.

摘要翻译： 用于在感光层中分离微测量区域的装置以及在这种层中产生图案的方法。 该方法的特征在于，该层经受含有不润湿感光材料的透明液体的气氛，以便在该层上产生单层微滴（121），感光材料层通过 为了选择性地打印该层的曝光区域（122），微滴（121）的单层被去除，微滴（121）被除去，并且感光材料层被显影以形成所述图案 按照曝光区域。