公开(公告)号：US06356399B1

公开(公告)日：2002-03-12

申请号：US09463656

申请日：2000-05-05

Applicant: Kazumi Haga ,  Motoshi Sakai ,  Zenta Ushiyama

Inventor： Kazumi Haga ,  Motoshi Sakai ,  Zenta Ushiyama

IPC: G02B2702

CPC classification number: G01B11/303 ,  G01B11/255 ,  G01B11/30 ,  G01N21/8806 ,  G02B21/06 ,  G02B27/0025

Abstract: The present invention provides a light illuminating method, a surface examining method using the light illuminating method, and apparatuses for performing these methods. In the surface illuminating apparatus for illuminating an object with a light beam from a light source through a lens member for illumination, the lens member for illumination has a characteristics with respect to a longitudinal aberration caused by a spherical aberration in the light source side of the lens for illumination, that an amount of shift from a paraxial image surface to image formation points gradually increase or decrease, with an increase in height of light incidence into the lens; and the light source is set at a position in an outside of a group of the image formation points.

Abstract translation: 本发明提供光照射方法，使用光照射方法的表面检查方法以及用于执行这些方法的装置。 在用于通过用于照明的透镜构件的来自光源的光束照射物体的表面照明装置中，用于照明的透镜构件具有相对于由光源侧的球面像差引起的纵向像差的特性 透镜用于照明，随着光入射到透镜的高度的增加，从近轴图像表面到图像形成点的偏移量逐渐增加或减小; 并且光源被设置在一组图像形成点的外部的位置。

公开(公告)号：US06317204B2

公开(公告)日：2001-11-13

申请号：US09402052

申请日：2000-01-18

Applicant: Kazumi Haga ,  Motoshi Sakai ,  Yoshihiro Ishiguro

Inventor： Kazumi Haga ,  Motoshi Sakai ,  Yoshihiro Ishiguro

IPC: G01N2100

CPC classification number: G01B11/306

Abstract: A method enables measurement of the configuration of a pattern with irregularity in a wide surface region with a high accuracy and in a single operation. The surface inspecting method includes irradiating a measurement objective region with an illuminating light in an oblique direction thereto; forming an image of reflected light from the measurement objective region, the formed image of reflected light having points with luminance corresponding to the incident angle of the illuminating light at respective points on the measurement objective region picking up the formed image to collect luminance data of respective points in the measurement objective region; analyzing spatial frequencies of the luminance data with respect to positions in a desired direction to make a plurality of spatial frequency data; and extracting a desired frequency component from the plurality of spatial frequency data.

Abstract translation: 一种方法能够以高精度和单次操作来测量宽表面区域中的凹凸图案的构造。 表面检查方法包括：向测量对象区域倾斜照射光; 形成来自测量对象区域的反射光的图像，所形成的反射光图像具有对应于测量对象区域上的各点处的照明光的入射角的亮度的亮度，从而采集各个图像的亮度数据 测量目标区域中的点; 分析相对于期望方向上的位置的亮度数据的空间频率，以形成多个空间频率数据; 以及从所述多个空间频率数据中提取期望的频率分量。

公开(公告)号：US06621567B1

公开(公告)日：2003-09-16

申请号：US09462168

申请日：2000-03-24

Applicant: Kazumi Haga ,  Motoshi Sakai ,  Zenta Ushiyama

Inventor： Kazumi Haga ,  Motoshi Sakai ,  Zenta Ushiyama

IPC: G01N2188

CPC classification number: G01N21/8806 ,  G01B11/303

Abstract: A surface examining method and a surface examining apparatus, in which a large-sized lens of an object-side telecentric optical system is not required and which can observe a surface to be examined in a wide region. A surface examining method for examining a surface of an object to be measured, by observing a light reflected from the object through an object-side telecentric optical system or an image-object-side telecentric optical system, comprises the steps of; arranging the object-side telecentric optical system or the image-object-side telecentric optical system so that an optical axis thereof is inclined with respect to a direction normal to the object to be measured, and observing the light reflected from the object to be measured.

Abstract translation: 表面检查方法和表面检查装置，其中不需要物体侧远心光学系统的大尺寸透镜，并且可以在广泛的区域观察待检查的表面。 通过观察通过物体侧远心光学系统或图像对象侧远心光学系统从物体反射的光来检查待测物体的表面的表面检查方法包括以下步骤： 布置物体侧远心光学系统或图像物体侧远心光学系统，使得其光轴相对于与被测量物体垂直的方向倾斜，并且观察从被测量物体反射的光 。

公开(公告)号：US5757479A

公开(公告)日：1998-05-26

申请号：US625136

申请日：1996-04-01

Applicant: Kazumi Haga ,  Motoshi Sakai ,  Satoshi Akiyama

Inventor： Kazumi Haga ,  Motoshi Sakai ,  Satoshi Akiyama

IPC: G01N21/88 ,  G01N21/47 ,  G01N21/94 ,  G01N21/95 ,  G01N21/956 ,  G01N21/00

CPC classification number: G01N21/9501 ,  G01N21/474 ,  G01N21/9503 ,  G01N2201/0632

Abstract: There is provided an inspection apparatus which illuminates at least part of a sample with diffused light from a diffused light source and inspects the sample based on light reflected from the sample. An illuminating chamber is defined by a wall member. The wall member has an inner wall surface for reflecting diffused light from the diffused light source, a sample-inserting opening formed through the wall member for inserting the at least part of the sample into the illuminating chamber therethrough, and a sample-observing opening formed through the wall member for permitting light reflected from the at least part of the sample to be emitted out of the illuminating chamber. The sample is observed by the use of an object-side telecentric optical system having a lens system for collecting parallel light from the light emitted from the sample-observing opening, and an aperture stop arranged at or in the vicinity of a back focal point of the lens system.

Abstract translation: 提供了一种检查装置，其利用来自扩散光源的漫射光来照射样品的至少一部分，并且基于从样品反射的光检查样品。 照明室由壁构件限定。 壁构件具有用于反射来自扩散光源的漫射光的内壁面，通过壁构件形成的插入样品，用于将至少部分样品插入到照明室中，形成有样品观察孔 通过所述壁构件，用于允许从所述至少一部分样品反射的光从所述照明室发射出。 通过使用具有透镜系统的物体侧远心光学系统观察样品，所述透镜系统用于收集从样品观察开口发射的光的平行光，以及孔径光阑，其布置在 镜头系统。

公开(公告)号：US5737074A

公开(公告)日：1998-04-07

申请号：US760603

申请日：1996-12-04

Applicant: Kazumi Haga ,  Motoshi Sakai

Inventor： Kazumi Haga ,  Motoshi Sakai

IPC: G01N21/88 ,  G01N21/00

CPC classification number: G01N21/8806

Abstract: The method comprises the steps of: irradiating an objective region to be measured with an illuminating light in an oblique direction thereto; forming an image of reflected light from the objective region by member of an object-side telecentric optical system or an image-object-side telecentric optical system, which has an optical axis coinciding with an incident direction of the illuminating light to the objective region and has a object-side angular aperture against a point on the objective region, which is set at a predetermined angle; picking up the formed image to collect luminance data of respective points in the objective region; and processing the luminance data to recognize bright and dark portions and thereby determining the presence or absence of an irregular portion and a shape of the irregular portion, in the objective region. The method enables measurement of the presence or absence of irregularity and the shape of the irregularity in a wide surface region with a high accuracy and in a single operation by using an apparatus having relatively simple construction.

Abstract translation: 该方法包括以下步骤：用与其倾斜方向的照明光照射待测量的目标区域; 通过物镜侧远心光学系统或图像对象侧远心光学系统的构件形成来自物镜区域的反射光的图像，其具有与照明光的入射方向一致的目标区域， 具有相对于物镜区域上设置为预定角度的点的物体侧角孔; 拾取形成的图像以收集目标区域中的各个点的亮度数据; 并且处理亮度数据以识别明暗部分，从而在目标区域中确定不规则部分的存在或不存在以及不规则部分的形状。 该方法能够通过使用具有相对简单结构的装置，以高精度和单次操作来测量宽表面区域的不规则性的存在或不存在以及形状的不均匀性。