公开(公告)号：US5862003A

公开(公告)日：1999-01-19

申请号：US667880

申请日：1996-06-20

Applicant: Muhammad T. A. Saif ,  Trent Huang ,  Noel C. MacDonald

Inventor： Muhammad T. A. Saif ,  Trent Huang ,  Noel C. MacDonald

IPC: B81B3/00 ,  G02B26/08 ,  H02N1/00 ,  G02B7/182 ,  G02B5/08 ,  G02B26/00

CPC classification number: H02N1/008 ,  B81B3/0037 ,  G02B26/0833 ,  B81B2201/045 ,  B81B2203/0109 ,  B81B2203/0315 ,  B81B2203/051 ,  B81B2203/053 ,  B81B2203/058 ,  Y10S359/904 ,  Y10S977/70 ,  Y10S977/724 ,  Y10S977/725

Abstract: A microelectromechanical micromotion amplifier generates a controlled lateral motion in response to a small deformation in the axial direction of a MEM beam or body. Lateral motion is produced by buckling of one or more long slender beams, the buckling motion being relatively large with respect to the axial motion which causes such lateral motion. The beams may be designed with a slight asymmetry to achieve gradual buckling in a desired direction. The device is capable of amplifying a driving motion in the range of 1-5 micrometers to produce a transverse motion in the range of 50-200 micrometers.

Abstract translation: 微机电微动作放大器响应于MEM束或身体的轴向方向上的小变形而产生受控的横向运动。 横向运动通过一根或多根细长梁的弯曲产生，相对于引起这种侧向运动的轴向运动，该弯曲运动相对较大。 梁可以被设计为具有轻微的不对称性，以在期望的方向上实现逐渐的屈曲。 该装置能够在1-5微米的范围内放大驱动运动，以产生在50-200微米范围内的横向运动。