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公开(公告)号：US5604443A
公开(公告)日：1997-02-18
申请号：US448264
申请日：1995-05-23
CPC分类号： G01R31/2831 , G01R31/2887 , Y10S414/137 , Y10S414/14
摘要： A probe test apparatus comprising a test section for testing a wafer, a cassette having an opening at one side through which the wafer is taken into and out of the cassette, grooves formed in inner faces of both sides of the cassette to hold wafers therein, and a convex member projected downward from the underside of the cassette, a stage on which the cassette is mounted keeping the wafers therein substantially horizontal, and holder members projected upward from the top of the cassette-mounted stage and having a recess into which the convex member of the cassette falls, wherein when the convex member is not fitted into the recess but contacted with the holder members, the wafers in the cassette are tilted and when it is fitted into the recess, they can be kept substantially horizontal in the cassette to thereby position the cassette relative to the test section.
摘要翻译： 一种探针测试装置，包括用于测试晶片的测试部分，具有在晶片被进入和离开的一侧具有开口的盒，在盒的两侧的内表面中形成的槽，用于将晶片保持在其中; 以及凸起部件，其从所述盒的下侧向下方突出，所述盒安装在所述台上，保持所述晶片基本上水平，并且保持器部件从所述盒式安装台的顶部向上突出并具有凹部， 盒子的部件落下，其中当凸形部件未装配到凹部中但与保持件相接触时，盒中的晶片倾斜，并且当它被装配到凹槽中时，它们可以保持在盒中基本上水平 从而使盒相对于测试部分定位。
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公开(公告)号：US08082977B2
公开(公告)日：2011-12-27
申请号：US11684828
申请日：2007-03-12
申请人： Yutaka Akaike , Munetoshi Nagasaka
发明人： Yutaka Akaike , Munetoshi Nagasaka
CPC分类号： H01L21/67103 , F28D2021/0077 , F28F13/00 , H01L21/67109
摘要： A mounting apparatus includes a surface plate; a temperature control unit integrated with the surface plate; and a bottom plate integrated with the temperature control unit via a heat insulation ring, wherein a temperature of a target object held on the surface plate is capable of being controlled and the surface plate is formed of ceramic. The surface plate and the temperature control unit are coupled to each other by a first coupling member at each portion thereof except for each peripheral portion thereof such that the peripheral portion of the surface plate being not coupled thereto. The peripheral portion of the temperature control unit is coupled to the heat insulation ring by a second coupling member.
摘要翻译： 一种安装设备，包括一个表面板; 与表面板一体化的温度控制单元; 以及通过隔热环与温度控制单元一体化的底板，其中能够控制保持在表面板上的目标物体的温度，并且表面板由陶瓷形成。 表面板和温度控制单元通过除了其每个周边部分之外的每个部分处的第一联接构件彼此联接，使得表面板的周边部分不与其连接。 温度控制单元的周边部分通过第二联接构件联接到隔热环。
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3.发明授权Probe card transfer assist apparatus, and inspection equipment and method using same 失效探针卡转移辅助装置，以及使用其的检查设备及方法公开(公告)号：US07541801B2
公开(公告)日：2009-06-02
申请号：US11523710
申请日：2006-09-20
IPC分类号： G01R31/02
CPC分类号： G01R31/2893
摘要： A probe card transfer assist apparatus for assisting an operation of transferring a probe card used in an electrical inspection apparatus includes a holder for holding the probe card; a support for supporting the holder in a freely-rotate manner about a point; and an elevation unit for moving the support up and down. Further, an inspection equipment includes an electrical inspection apparatus; and a probe card transfer assist apparatus for assisting an operation of transferring a probe card used in the electrical inspection apparatus, the assist apparatus including a holder for holding the probe card; a support for supporting the holder in a freely-rotating manner about a point; and an elevation unit for moving the support up and down.
摘要翻译： 用于辅助传送在电气检查装置中使用的探针卡的操作的探针卡传送辅助装置包括用于保持探针卡的保持器; 用于以一个点自由旋转的方式支撑支架的支撑件; 以及用于上下移动支架的升降单元。 此外，检查设备包括电检查装置; 以及用于辅助传送在所述电气检查装置中使用的探针卡的操作的探针卡传送辅助装置，所述辅助装置包括用于保持所述探针卡的保持器; 支撑支架以自由旋转的方式支撑支架; 以及用于上下移动支架的升降单元。
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公开(公告)号：USD383683S
公开(公告)日：1997-09-16
申请号：US53608
申请日：1996-04-25
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公开(公告)号：USD612879S1
公开(公告)日：2010-03-30
申请号：US29257350
申请日：2006-04-04
申请人： Munetoshi Nagasaka
设计人： Munetoshi Nagasaka
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公开(公告)号：USD609652S1
公开(公告)日：2010-02-09
申请号：US29331222
申请日：2009-01-22
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7.发明授权公开(公告)号：US07528620B2
公开(公告)日：2009-05-05
申请号：US11563427
申请日：2006-11-27
CPC分类号： G01R31/2887
摘要： A probe card transfer assist apparatus for assisting an operation of transferring a probe card employed in an electrical inspection apparatus includes a holding unit for holding a pair of grips of the probe card wherein the grips are supported by being placed onto or suspended by the holding unit; a supporting unit for movably supporting the holding unit; and an elevation mechanism for moving the supporting unit up and down. Further, an inspecting equipment is provided with the probe card transfer assist apparatus having a holding unit for holding a pair of grips of the probe card wherein the grips are supported by being placed onto or suspended by the holding unit; a supporting unit for movably supporting the holding unit; and an elevation mechanism for moving the supporting unit up and down.
摘要翻译： 用于辅助传送在电气检查装置中使用的探针卡的操作的探针卡传送辅助装置包括：保持单元，用于保持探针卡的一对夹具，其中夹持器被放置在保持单元上或悬挂在支撑单元上 ; 支撑单元，用于可移动地支撑保持单元; 以及用于上下移动支撑单元的升降机构。 此外，检查设备设置有具有保持单元的探针卡传送辅助装置，该保持单元用于保持探针卡的一对把手，其中夹持器被放置在保持单元上或悬挂在支撑单元上; 支撑单元，用于可移动地支撑保持单元; 以及用于上下移动支撑单元的升降机构。
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公开(公告)号：US20080267741A1
公开(公告)日：2008-10-30
申请号：US12108150
申请日：2008-04-23
申请人： Munetoshi NAGASAKA , Ikuo OGASAWARA
发明人： Munetoshi NAGASAKA , Ikuo OGASAWARA
IPC分类号： H01L21/67
CPC分类号： H01L21/6838 , Y10S414/135
摘要： A substrate attracting device includes an attracting body for attracting and holding a substrate to transfer the substrate. The attracting body includes a first attracting unit for attracting and holding a top surface of the substrate according to Bernoulli principle and a second attracting unit for vacuum-attracting and holding a bottom surface of the substrate.
摘要翻译： 基板吸引装置包括用于吸引和保持基板以转移基板的吸引体。 吸引体包括用于根据伯努利原理吸引并保持基板的顶表面的第一吸引单元和用于真空吸附和保持基板的底表面的第二吸引单元。
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公开(公告)号：US08196983B2
公开(公告)日：2012-06-12
申请号：US12108150
申请日：2008-04-23
申请人： Munetoshi Nagasaka , Ikuo Ogasawara
发明人： Munetoshi Nagasaka , Ikuo Ogasawara
IPC分类号： B25J15/06
CPC分类号： H01L21/6838 , Y10S414/135
摘要： A substrate attracting device includes an attracting body for attracting and holding a substrate to transfer the substrate. The attracting body includes a first attracting unit for attracting and holding a top surface of the substrate according to Bernoulli principle and a second attracting unit for vacuum-attracting and holding a bottom surface of the substrate.
摘要翻译： 基板吸引装置包括用于吸引和保持基板以转移基板的吸引体。 吸引体包括用于根据伯努利原理吸引并保持基板的顶表面的第一吸引单元和用于真空吸附和保持基板的底表面的第二吸引单元。
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公开(公告)号：USD589912S1
公开(公告)日：2009-04-07
申请号：US29298519
申请日：2007-12-06
申请人： Ikuo Ogasawara , Munetoshi Nagasaka
设计人： Ikuo Ogasawara , Munetoshi Nagasaka
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