Method for forming a multilayer superconducting circuit
    1.
    发明授权
    Method for forming a multilayer superconducting circuit 失效
    形成多层超导电路的方法

    公开(公告)号:US5229360A

    公开(公告)日:1993-07-20

    申请号:US831006

    申请日:1992-02-06

    IPC分类号: H01L39/24

    摘要: A method for forming a superconducting circuit is disclosed, comprising the steps of forming a mask pattern on a superconducting layer, forming a covering layer, containing a modifying element for superconductor, on the resultant structure, diffusing the modifying element for a superconductor, which is contained in the covering layer, into the superconducting layer to modify a corresponding location to a nonsuperconducting layer. A method for forming a multi-layer superconducting circuit is also disclosed, comprising sequentially repeating the same steps as set forth above over a substrate.

    摘要翻译: 公开了一种用于形成超导电路的方法,包括以下步骤:在超导层上形成掩模图案,在所得结构上形成包含用于超导体的修饰元件的覆盖层,扩散用于超导体的修饰元件,其为 包含在覆盖层中,进入超导层,以将对应的位置修改为非超导层。 还公开了一种用于形成多层超导电路的方法,包括在衬底上顺序地重复与上述相同的步骤。