公开(公告)号：US07704326B2

公开(公告)日：2010-04-27

申请号：US11004335

申请日：2004-12-02

申请人： Nobuo Hagiwara ,  Hideo Nagasaki ,  Tsutomu Mori ,  Tatsushiro Hirata ,  Hajime Yagi

发明人： Nobuo Hagiwara ,  Hideo Nagasaki ,  Tsutomu Mori ,  Tatsushiro Hirata ,  Hajime Yagi

IPC分类号： C23C16/00 ,  C23C16/04

CPC分类号： C23C14/042 ,  C23C14/12 ,  H01L27/3211 ,  H01L51/0011

摘要： A deposition mask with which position precision of a passage hole is improved and deposition can be conducted precisely and a manufacturing method thereof are provided. A mask body made of a metal thin film is fixed and tightly mounted on a frame body having an opening. The mask body has at least one pattern region including a plurality of passage holes for letting through a deposition material, a stress relaxation region including a plurality of fine holes provided at the periphery of the pattern region, and a holding region provided at the periphery of the stress relaxation region. The mask body is tightly mounted on the frame body at a holding region.

摘要翻译： 提供了通过孔的位置精度提高并且精确地进行沉积的沉积掩模及其制造方法。 由金属薄膜制成的面罩体固定并牢固地安装在具有开口的框体上。 荫罩主体具有至少一个图案区域，该图案区域包括多个通过沉积材料的通孔，包括设置在图案区域的周边的多个细孔的应力松弛区域和设置在图案区域周边的保持区域 应力松弛区域。 面罩体在保持区域紧密地安装在框体上。

公开(公告)号：US20050115503A1

公开(公告)日：2005-06-02

申请号：US11004335

申请日：2004-12-02

申请人： Nobuo Hagiwara ,  Hideo Nagasaki ,  Tsutomu Mori ,  Tatsushiro Hirata ,  Hajime Yagi

发明人： Nobuo Hagiwara ,  Hideo Nagasaki ,  Tsutomu Mori ,  Tatsushiro Hirata ,  Hajime Yagi

IPC分类号： H05B33/10 ,  C23C14/04 ,  C23C14/12 ,  H01L27/32 ,  H01L51/00 ,  H01L51/50 ,  H01L21/76 ,  C23C16/00

CPC分类号： C23C14/042 ,  C23C14/12 ,  H01L27/3211 ,  H01L51/0011

摘要： A deposition mask with which position precision of a passage hole is improved and deposition can be conducted precisely and a manufacturing method thereof are provided. A mask body made of a metal thin film is fixed and tightly mounted on a frame body having an opening. The mask body has at least one pattern region including a plurality of passage holes for letting through a deposition material, a stress relaxation region including a plurality of fine holes provided at the periphery of the pattern region, and a holding region provided at the periphery of the stress relaxation region. The mask body is tightly mounted on the frame body at a holding region.

摘要翻译： 提供了通过孔的位置精度提高并且精确地进行沉积的沉积掩模及其制造方法。 由金属薄膜制成的面罩体固定并牢固地安装在具有开口的框体上。 荫罩主体具有至少一个图案区域，该图案区域包括多个通过沉积材料的通孔，包括设置在图案区域的周边的多个细孔的应力松弛区域和设置在图案区域周边的保持区域 应力松弛区域。 面罩体在保持区域紧密地安装在框体上。