公开(公告)号：US06825454B2

公开(公告)日：2004-11-30

申请号：US10473830

申请日：2004-02-19

Applicant: Norbert Czarnetzki ,  Thomas Scheruebl ,  Stefan Mack ,  Toshiro Kurosawa ,  Eckard Hagemann

Inventor： Norbert Czarnetzki ,  Thomas Scheruebl ,  Stefan Mack ,  Toshiro Kurosawa ,  Eckard Hagemann

IPC: G01J120

CPC classification number: G02B21/0024 ,  G02B7/34 ,  G02B21/004 ,  G02B21/006 ,  G02B21/245

Abstract: The invention is directed to an arrangement for autofocusing onto a measuring location on an object moving in a direction which is at least approximately vertical to the optical axis of the imaging optics. According to the invention, a diaphragm device is to be provided the diaphragm opening of which extends in a direction aligned with the direction of movement of the measuring location; a receiving device for the measuring light has receiving areas arranged in a row beside each other and is inclined relative to the optical axis so that the image from the diaphragm device is incident on the receiving areas at an inclination of an angle &agr;; wherein the receiving device and the diaphragm opening are positioned relative to each other in such a way that characteristic measuring values are measured on the receiving areas when the measuring location is in or near the focus position. An evaluating device compares the measured values read sequentially from the receiving areas with stored desired values and from them generates signals, for example, for a microscope arrangement and/or—if deviations have been determined—for correcting signals for a relocation device by means of which the relocation of the direction of movement into the focal plane of the imaging optics is effected.

Abstract translation: 本发明涉及一种用于自动聚焦到在至少大致垂直于成像光学器件的光轴的方向移动的物体上的测量位置上的装置。 根据本发明，隔膜装置的隔膜装置将沿着与测量位置的移动方向一致的方向延伸; 用于测量光的接收装置具有彼此相邻布置的接收区域，并且相对于光轴倾斜，使得来自隔膜装置的图像以角度α的倾斜入射到接收区域; 其中所述接收装置和所述光阑开口相对于彼此定位，使得当所述测量位置在聚焦位置中或附近时，在所述接收区域上测量特征测量值。 评估装置将从接收区域顺序读取的测量值与存储的期望值进行比较，并且从它们生成例如用于显微镜装置的信号和/或如果已经确定了偏差，则用于通过以下方式来校正重新定位装置的信号： 其中运动方向的重新定位进入成像光学器件的焦平面。

公开(公告)号：US06307690B1

公开(公告)日：2001-10-23

申请号：US09509272

申请日：2000-03-24

Applicant: Norbert Czarnetzki ,  Thomas Scheruebl ,  Manfred Matthae

Inventor： Norbert Czarnetzki ,  Thomas Scheruebl ,  Manfred Matthae

IPC: G02B504

CPC classification number: G02B27/144 ,  G02B21/082

Abstract: A microscope with incident light input coupling, wherein the light provided for the incident illumination is directed onto the partially reflecting layer of a beam splitter cube and is directed from there through the objective onto the specimen, while the light reflected and/or emitted by the specimen travels back to the partially reflecting layer and passes through the latter into the imaging beam path. In a microscope of this type, the beam splitter cube is provided with a negative spherical curvature at its outer surface facing the objective. Further, instead of the conventional tube lens, there is a combination formed of a converging lens and a diverging lens, wherein the surface curvatures of the converging lens and the diverging lens and the negative spherical curvature effected at the beam splitter cube are adapted to one another in such a way that the back-reflections of the incident illumination in the intermediate image plane are limited to a minimum.

Abstract translation: 具有入射光输入耦合的显微镜，其中为入射照明提供的光被引导到分束器立方体的部分反射层上，并且从那里通过物镜被引导到样本上，而被反射和/或发射的光 样品返回到部分反射层，并通过后者进入成像光束路径。 在这种类型的显微镜中，分束器立方体在其面向物镜的外表面处具有负的球形曲率。 此外，代替常规管透镜，存在由会聚透镜和发散透镜形成的组合，其中会聚透镜和发散透镜的表面曲率和在分束器立方体处实现的负球面曲率适合于一个 另一种方式是将中间像平面中的入射照明的背反射限制到最小。

公开(公告)号：US06674572B1

公开(公告)日：2004-01-06

申请号：US09194299

申请日：1999-08-11

Applicant: Thomas Scheruebl ,  Norbert Czarnetzki

Inventor： Thomas Scheruebl ,  Norbert Czarnetzki

IPC: G02B2100

CPC classification number: G02B21/006 ,  G01B2210/50 ,  G02B21/0024 ,  G02B21/0044 ,  G02B21/0064 ,  G02B21/008

Abstract: An autofocus for a confocal microscope is realized by means of a confocal microscope arrangement comprising an illumination arrangement for illuminating an object in a raster pattern, first means for generating a first wavelength-selective splitting of the illumination light and second means for generating a second wavelength-selective splitting of the light coming from the object in a parallel manner for a plurality of points of the object, and detection means for detecting the light distribution generated by the second means, wherein an at least point-by-point spectral splitting and detection of an object image in a wavelength-selective manner is carried out and a control signal is generated from the determination of the frequency deviation and/or intensity deviation from a predetermined reference value corresponding to the object position in order to adjust the focal position by means of the vertical object position and/or the imaging system of the microscope. Further, a process is realized for determining deviations of at least a first height profile from at least one simultaneously or previously detected second height profile, preferably for detecting and/or monitoring defects in semiconductor structures, wherein a first object is illuminated in a wavelength-selective manner by a light source and the light originating from the first object is detected and is compared electronically with a previously or simultaneously detected second object.

Abstract translation: 共聚焦显微镜的自动对焦是通过共焦显微镜装置实现的，所述共聚焦显微镜装置包括用于以光栅图案照射物体的照明装置，用于产生照明光的第一波长选择性分裂的第一装置和用于产生第二波长的第二装置 对于物体的多个点，以并行方式选择性地分离来自物体的光;以及检测装置，用于检测由第二装置产生的光分布，其中至少逐点光谱分离和检测 执行波长选择方式的对象图像，并且从与对象位置对应的预定参考值的频率偏差和/或强度偏差的确定中产生控制信号，以便通过装置来调整焦点位置 的垂直物体位置和/或显微镜的成像系统。 此外，实现了用于确定至少一个第一高度分布与至少一个同时或先前检测到的第二高度分布的偏差的过程，优选地用于检测和/或监测半导体结构中的缺陷，其中第一对象被以波长 - 通过光源的选择性方式和来自第一物体的光被检测并且与先前或同时检测到的第二物体进行电子比较。

公开(公告)号：US06545265B1

公开(公告)日：2003-04-08

申请号：US09463722

申请日：2000-04-14

Applicant: Norbert Czarnetzki ,  Peter Muehlig

Inventor： Norbert Czarnetzki ,  Peter Muehlig

IPC: H01J314

CPC classification number: G02B21/008 ,  G02B21/0044 ,  G02B21/0072

Abstract: A method is disclosed for mixing pairs of confocal images and different arrangements for fast generation of parallel confocal images and the combination thereof in real time. The method is used for improving contrast and resolution in confocal images. The suggested arrangements point to some possibilities for a meaningful application of the method for image mixing in parallel confocal single-beam or double-beam methods for the generation of highly resolved images in real time for a wide variety of different applications, especially also for material inspection. By combining at least two confocal images, a resolution of the fine structure of the object is achieved in the mixed image. Contrast, lateral resolution and depth resolution are improved in the mixed image of the object to be examined, which can also be a phase object. Further, the method permits the generation of very highly resolved three-dimensional digital images of optical objects to be examined.

Abstract translation: 公开了一种用于混合成对的共焦图像和用于快速生成平行共焦图像及其组合的不同布置的方法。 该方法用于改善共焦图像中的对比度和分辨率。 建议的布置指出了在并行共焦单光束或双光束方法中有意义地应用图像混合方法的一些可能性，用于实时地生成用于各种不同应用的高分辨率图像，特别是对于材料 检查。 通过组合至少两个共焦图像，在混合图像中实现对象的精细结构的分辨率。 在被检查物体的混合图像中，对比度，横向分辨率和深度分辨率也得到改善，也可以是相位对象。 此外，该方法允许生成要检查的光学对象的非常高度分辨的三维数字图像。

公开(公告)号：US06429897B2

公开(公告)日：2002-08-06

申请号：US09779960

申请日：2001-02-09

Applicant: Eberhard Derndinger ,  Norbert Czarnetzki ,  Peter Ott ,  Thomas Scherübl

Inventor： Eberhard Derndinger ,  Norbert Czarnetzki ,  Peter Ott ,  Thomas Scherübl

IPC: H04N5335

CPC classification number: G02B21/0068 ,  G02B21/0036 ,  G02B21/004 ,  G02B21/0056 ,  G02B21/0072 ,  G02B21/008

Abstract: A confocal microscope has a motorized scanning table for moving the sample perpendicularly to the optical axis of the microscope. The object is illuminated simultaneously at many places by means of a light source array. The light reflected or scattered at the object is detected by means of a diaphragm array, which is conjugate to the object and to the light source array. A sensor array is provided as a detector and makes a displacement of charges possible between individual positions in the scanning direction. The sensor is a so-called TDI sensor. The displacement of the charges is synchronized with the motion of the object corresponding to the motion of the image points in the plane of the sensor array. The image data can thereby be recorded during the motion of the object, so that even large object fields can be sensed in a short time with high lateral resolution. The motion of the object takes place along linear paths (if necessary linear paths combined in a meander form) and the motion along the linear paths takes place uniformly. The microscope is particularly suitable for inspection in the semiconductor industry (wafer inspection, LCD inspection).

Abstract translation: 共焦显微镜具有用于使样品垂直于显微镜的光轴移动的电动扫描台。 物体通过光源阵列在许多地方同时照亮。 通过与物体和光源阵列共轭的光阑阵列检测在物体处反射或散射的光。 提供传感器阵列作为检测器，并使扫描方向上各个位置之间的电荷位移。 传感器是所谓的TDI传感器。 电荷的位移与对应于传感器阵列的平面中的图像点的运动的物体的运动同步。 因此，可以在对象的运动期间记录图像数据，使得甚至可以在具有高横向分辨率的短时间内感测到大的对象场。 物体的运动沿线性路径发生（如果必要的线性路径以曲折形式组合）并且沿线性路径的运动均匀地发生。 显微镜特别适用于半导体行业的检验（晶圆检查，液晶检测）。