公开(公告)号：US20080134785A1

公开(公告)日：2008-06-12

申请号：US11986327

申请日：2007-11-20

Applicant: Odd-Axel Pruetz

Inventor： Odd-Axel Pruetz

IPC: G01P15/125

CPC classification number: G01P15/125 ,  G01P2015/0831

Abstract: A micromechanical inertial sensor having at least one seismic mass which may be deflected relative to a substrate, and at least one electrode surface which in terms of circuitry, together with at least portions of the seismic mass forms at least one capacitor having a capacitance which is dependent on the deflection of the seismic mass. At least one additional auxiliary electrode is included which is located outside the region which forms the capacitor and which may be set at a potential that deviates from the potential of the seismic mass.

Abstract translation: 具有至少一个相对于基板偏转的地震质量的微机械惯性传感器，以及至少一个电路表面，该电极表面根据电路与至少一部分地震块形成至少一个电容器，该电容器的电容为 取决于地震块的偏转。 包括至少一个额外的辅助电极，其位于形成电容器的区域外部，并且可以将其设置为偏离地震质量的电位的电位。

公开(公告)号：US08408059B2

公开(公告)日：2013-04-02

申请号：US12857758

申请日：2010-08-17

Applicant: Odd-Axel Pruetz

Inventor： Odd-Axel Pruetz

IPC: G01C19/56

CPC classification number: G01C19/574

Abstract: A yaw rate sensor is described which includes a substrate having a main plane of extension and a Coriolis element, the Coriolis element being excitable to a driving oscillation along a first direction parallel to the main plane of extension, using a driving arrangement, and a deflection of the Coriolis element along a second direction perpendicular to the first direction being detectable, and the yaw rate sensor having an interference element for exciting the Coriolis element to an interference oscillation.

Abstract translation: 描述了一种横摆率传感器，其包括具有主平面延伸的基板和科里奥利元件，科里奥利元件可使用驱动装置沿平行于主平面的主平面的第一方向激发到驱动振荡，并且偏转 沿着与第一方向垂直的第二方向的科里奥利元件是可检测的，并且横摆率传感器具有用于将科里奥利元件激发到干涉振荡的干涉元件。

公开(公告)号：US20140373627A1

公开(公告)日：2014-12-25

申请号：US14313330

申请日：2014-06-24

Applicant: Odd-Axel PRUETZ

Inventor： Odd-Axel PRUETZ

IPC: G01C19/5705

CPC classification number: G01C19/574 ,  G01C19/5712

Abstract: A rotation rate sensor for detecting a rotation rate about a rotational axis parallel to a main extension plane of a substrate of the sensor includes: a first oscillating mass; and a second oscillating mass mechanically coupled to the first oscillating mass. The first oscillating mass is (i) deflectable along a first oscillations plane parallel to the main extension plane, (ii) extends in a planar manner parallel to the first oscillations plane in a rest position, and (iii) deflectable out of the first oscillations plane into a first deflection position. The second oscillating mass is (i) deflectable along a second oscillations plane parallel to the first oscillations plane, (ii) extends in a planar manner parallel to the second oscillations plane in a rest position, and (iii) deflectable out of the second oscillations plane into a second deflection position.

Abstract translation: 用于检测围绕与所述传感器的基板的主延伸面平行的旋转轴线的旋转速度的旋转速率传感器包括：第一振荡块; 以及机械耦合到所述第一振荡块的第二振荡质量块。 第一振荡质量是（i）沿着平行于主延伸平面的第一振荡平面可偏转，（ii）在静止位置以平行于第一振荡平面的平面方式延伸，以及（iii）可偏离第一振荡 平面进入第一偏转位置。 第二振荡质量是（i）沿着平行于第一振荡平面的第二振荡平面偏转，（ii）在静止位置以平行于第二振荡平面的平面方式延伸，以及（iii）可偏离第二振荡 平面进入第二偏转位置。

公开(公告)号：US20110041603A1

公开(公告)日：2011-02-24

申请号：US12857758

申请日：2010-08-17

Applicant: Odd-Axel PRUETZ

Inventor： Odd-Axel PRUETZ

IPC: G01C19/56

CPC classification number: G01C19/574

Abstract: A yaw rate sensor is described which includes a substrate having a main plane of extension and a Coriolis element, the Coriolis element being excitable to a driving oscillation along a first direction parallel to the main plane of extension, using a driving arrangement, and a deflection of the Coriolis element along a second direction perpendicular to the first direction being detectable, and the yaw rate sensor having an interference element for exciting the Coriolis element to an interference oscillation.

Abstract translation: 描述了一种横摆率传感器，其包括具有主平面延伸的基板和科里奥利元件，科里奥利元件可使用驱动装置沿平行于主平面的主平面的第一方向激发到驱动振荡，并且偏转 沿着与第一方向垂直的第二方向的科里奥利元件是可检测的，并且横摆率传感器具有用于将科里奥利元件激发到干涉振荡的干涉元件。

公开(公告)号：US07721604B2

公开(公告)日：2010-05-25

申请号：US11986327

申请日：2007-11-20

Applicant: Odd-Axel Pruetz

Inventor： Odd-Axel Pruetz

IPC: G01P15/125

CPC classification number: G01P15/125 ,  G01P2015/0831

Abstract: A micromechanical inertial sensor having at least one seismic mass which may be deflected relative to a substrate, and at least one electrode surface which in terms of circuitry, together with at least portions of the seismic mass forms at least one capacitor having a capacitance which is dependent on the deflection of the seismic mass. At least one additional auxiliary electrode is included which is located outside the region which forms the capacitor and which may be set at a potential that deviates from the potential of the seismic mass.

Abstract translation: 具有至少一个相对于基板偏转的地震质量的微机械惯性传感器，以及至少一个电路表面，该电极表面根据电路与至少一部分地震块形成至少一个电容器，该电容器的电容为 取决于地震块的偏转。 包括至少一个额外的辅助电极，其位于形成电容器的区域外部，并且可以将其设置为偏离地震质量的电位的电位。

公开(公告)号：US20070062812A1

公开(公告)日：2007-03-22

申请号：US10565991

申请日：2004-07-23

Applicant: Heribert Weber ,  Odd-Axel Pruetz ,  Christian Krummel ,  Christoph Schelling ,  Detlef Gruen

Inventor： Heribert Weber ,  Odd-Axel Pruetz ,  Christian Krummel ,  Christoph Schelling ,  Detlef Gruen

IPC: G01N27/26

CPC classification number: G01N27/128

Abstract: The invention relates to a gas sensor comprising a membrane layer (3) formed on a semiconductor substrate (2), an evaluation structure (7) being arranged on said substrate in an evaluation area (8) and a heating structure (9) outside the evaluation area (8), in addition to a gas-sensitive layer (10) arranged above the evaluation structure (7) and the heating structure (9), wherein said gas-sensitive layer (10) can be heated by the heating structure (9) and the electrical resistance of the gas-sensitive layer (10) can be evaluated by the evaluation structure (7). The heating structure (9) is arranged on an adhesion-promoting oxide layer (6) on the top surface of the membrane layer (3) and is separated from the gas-sensitive layer by a cover oxide layer (11). In order to enable reliable functionality of the gas sensor, that in the evaluation area (8), an adhesion-promoting layer (13) insensitive to oxide etching is arranged between the membrane layer (3) and the evaluation structure (7) or the evaluation structure (7) in the evaluation area (8) corresponding to the heating structure (9) is separated from the gas-sensitive layer (10) by the cover oxide layer (11), wherein the cover oxide layer (11) has contact holes (12) which uncover a central area of the surface of the evaluation structure (7) in order to produce a direct contact between the evaluation structure (7) and the gas-sensitive layer (10).

Abstract translation: 本发明涉及一种气体传感器，包括形成在半导体衬底（2）上的膜层（3），评估结构（7）布置在评估区域（8）和加热结构（9）的所述衬底上 评价区域（8），除了设置在评价结构（7）和加热结构（9）之上的气敏层（10）之外，其中所述气敏层（10）可以被加热结构（ 9），气敏层（10）的电阻可以通过评价结构（7）进行评价。 加热结构（9）设置在膜层（3）的上表面上的粘附促进氧化物层（6）上，并通过覆盖氧化物层（11）与气敏层分离。 为了实现气体传感器的可靠功能，在评价区域（8）中，在膜层（3）和评价结构（7）之间设置对氧化物蚀刻不敏感的粘附促进层（13） 对应于加热结构（9）的评价区域（8）的评价结构（7）通过覆盖氧化物层（11）与气体敏感层（10）分离，其中，覆盖氧化物层（11）具有接触 孔（12），其露出评估结构（7）的表面的中心区域，以便产生评估结构（7）和气敏层（10）之间的直接接触。