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公开(公告)号：US20070062812A1
公开(公告)日：2007-03-22
申请号：US10565991
申请日：2004-07-23
IPC分类号： G01N27/26
CPC分类号： G01N27/128
摘要： The invention relates to a gas sensor comprising a membrane layer (3) formed on a semiconductor substrate (2), an evaluation structure (7) being arranged on said substrate in an evaluation area (8) and a heating structure (9) outside the evaluation area (8), in addition to a gas-sensitive layer (10) arranged above the evaluation structure (7) and the heating structure (9), wherein said gas-sensitive layer (10) can be heated by the heating structure (9) and the electrical resistance of the gas-sensitive layer (10) can be evaluated by the evaluation structure (7). The heating structure (9) is arranged on an adhesion-promoting oxide layer (6) on the top surface of the membrane layer (3) and is separated from the gas-sensitive layer by a cover oxide layer (11). In order to enable reliable functionality of the gas sensor, that in the evaluation area (8), an adhesion-promoting layer (13) insensitive to oxide etching is arranged between the membrane layer (3) and the evaluation structure (7) or the evaluation structure (7) in the evaluation area (8) corresponding to the heating structure (9) is separated from the gas-sensitive layer (10) by the cover oxide layer (11), wherein the cover oxide layer (11) has contact holes (12) which uncover a central area of the surface of the evaluation structure (7) in order to produce a direct contact between the evaluation structure (7) and the gas-sensitive layer (10).
摘要翻译： 本发明涉及一种气体传感器，包括形成在半导体衬底（2）上的膜层（3），评估结构（7）布置在评估区域（8）和加热结构（9）的所述衬底上 评价区域（8），除了设置在评价结构（7）和加热结构（9）之上的气敏层（10）之外，其中所述气敏层（10）可以被加热结构（ 9），气敏层（10）的电阻可以通过评价结构（7）进行评价。 加热结构（9）设置在膜层（3）的上表面上的粘附促进氧化物层（6）上，并通过覆盖氧化物层（11）与气敏层分离。 为了实现气体传感器的可靠功能，在评价区域（8）中，在膜层（3）和评价结构（7）之间设置对氧化物蚀刻不敏感的粘附促进层（13） 对应于加热结构（9）的评价区域（8）的评价结构（7）通过覆盖氧化物层（11）与气体敏感层（10）分离，其中，覆盖氧化物层（11）具有接触 孔（12），其露出评估结构（7）的表面的中心区域，以便产生评估结构（7）和气敏层（10）之间的直接接触。
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公开(公告)号：US07279759B2
公开(公告)日：2007-10-09
申请号：US10547041
申请日：2004-02-18
申请人： Roland Müller-Fiedler , Hans Hecht , Joerg Muchow , Matthias Fuertsch , Andreas Stratmann , Heribert Weber , Winfried Bernhard , Detlef Gruen , Andreas Duell , Rainer Schink , Ulrich Wagner , Christoph Schelling
发明人： Roland Müller-Fiedler , Hans Hecht , Joerg Muchow , Matthias Fuertsch , Andreas Stratmann , Heribert Weber , Winfried Bernhard , Detlef Gruen , Andreas Duell , Rainer Schink , Ulrich Wagner , Christoph Schelling
CPC分类号： G01L9/0042 , G01F1/6845 , G01N7/10
摘要： A micromechanical sensor and a method for manufacturing a micromechanical sensor which has at least one membrane are provided. The membrane is made of a first material which is accommodated in a surrounding second material, and the membrane is configured for sensing a medium surrounding it. The membrane is reinforced, at least partly, by a third material at break-sensitive points on the membrane rim. Reinforcement of the membrane rim increases the stability and thus also the service life of the membrane and the sensor.
摘要翻译： 提供了具有至少一个膜的微机械传感器和用于制造微机械传感器的方法。 膜由容纳在周围的第二材料中的第一材料制成，并且膜构造成用于感测周围的介质。 至少部分地，膜在膜边缘上的断裂点被第三材料增强。 膜边缘的加强增加了膜和传感器的稳定性，从而增加了膜的使用寿命。
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公开(公告)号：US07453254B2
公开(公告)日：2008-11-18
申请号：US10565984
申请日：2004-07-23
CPC分类号： G01N27/12 , G01N27/128
摘要： A chemical sensor has a substrate, a first metallization plane on the substrate, an electrode structure formed in the first metallization plane, a passivation layer applied to the first metallization plane and formed with contact holes, a sensitive ceramic layer on the passivation layer and in the contact holes, and a bond-promoting layer configured as a second metallization plane and between the passivation layer and the ceramic layer.
摘要翻译： 化学传感器具有衬底，衬底上的第一金属化平面，形成在第一金属化平面中的电极结构，钝化层施加到第一金属化平面并形成有接触孔，钝化层上的敏感陶瓷层 所述接触孔和构造为第二金属化平面并且在所述钝化层和所述陶瓷层之间的增粘层。
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公开(公告)号：US20070234801A1
公开(公告)日：2007-10-11
申请号：US10565984
申请日：2004-07-23
IPC分类号： G01N27/12
CPC分类号： G01N27/12 , G01N27/128
摘要： The invention relates to a sensor comprising a first metallization plane located on a substrate (1), a passivation layer (6) that is structured by contact holes (7) and is applied to said substrate and a sensitive ceramic layer (9) formed by thick-film technology on the passivation layer and in the contact holes (7). The aim of the invention is to improve the adhesion of the ceramic layer (9). To achieve this, the sensor is provided with an adhesion promoter layer (8) that is configured as a second metallization plane and is located between the passivation layer (6) and the ceramic layer (9).
摘要翻译： 本发明涉及一种传感器，其包括位于基板（1）上的第一金属化平面，由接触孔（7）构成的钝化层（6），并被施加到所述基板和敏感陶瓷层（9） 在钝化层和接触孔（7）中的厚膜技术。 本发明的目的是提高陶瓷层（9）的粘合性。 为了实现这一点，传感器设置有被配置为第二金属化平面并且位于钝化层（6）和陶瓷层（9）之间的粘附促进层（8）。
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5.发明授权公开(公告)号：US08207585B2
公开(公告)日：2012-06-26
申请号：US12300544
申请日：2007-04-03
IPC分类号： H01L29/84
CPC分类号： B81C1/00158 , B81B2201/0257 , B81B2201/0264 , B81B2203/0127 , H04R19/04 , Y10T428/24802
摘要： A method is provided for producing a micromechanical component and a micromechanical component is provided, particularly a microphone, a micro-loudspeaker or a pressure sensor (an absolute pressure sensor or a relative pressure sensor) having a substrate and having a diaphragm pattern, for the production of the diaphragm pattern, process steps being provided that are compatible only with a circuit that is monolithically integrated into or on the substrate, a sacrificial pattern applied onto the substrate being removed for the production of the diaphragm pattern.
摘要翻译： 提供了一种用于制造微机械部件并提供微机械部件的方法，特别是麦克风，具有基板并具有光阑图案的微型扬声器或压力传感器（绝对压力传感器或相对压力传感器），用于 膜片图案的生产，仅提供与单片集成到基板中或基板上的电路相兼容的工艺步骤，施加到基板上的牺牲图案被去除以用于生产隔膜图案。
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公开(公告)号：US07863072B2
公开(公告)日：2011-01-04
申请号：US11884563
申请日：2005-12-21
IPC分类号： H01L21/00
CPC分类号： B81C1/00158 , B81B2201/0264 , B81C1/00476 , B81C2201/0109 , B81C2201/053
摘要： A method for producing a micromechanical diaphragm sensor, and a micromechanical diaphragm sensor produced with the method. The micromechanical diaphragm sensor has at least one first diaphragm as well as a second diaphragm, which is disposed essentially on top of the first diaphragm. Furthermore, the micromechanical diaphragm sensor has a first cavity and a second cavity, which is essentially disposed above the first cavity.
摘要翻译： 一种微机械振动膜传感器的制造方法以及利用该方法制造的微机械振动膜传感器。 微机械振动膜传感器具有至少一个第一隔膜以及第二隔膜，其基本上设置在第一隔膜的顶部上。 此外，微机械隔膜传感器具有第一空腔和第二空腔，其基本上设置在第一空腔的上方。
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公开(公告)号：US20090206422A1
公开(公告)日：2009-08-20
申请号：US11884563
申请日：2005-12-21
CPC分类号： B81C1/00158 , B81B2201/0264 , B81C1/00476 , B81C2201/0109 , B81C2201/053
摘要： A method for producing a micromechanical diaphragm sensor, and a micromechanical diaphragm sensor produced with the method. The micromechanical diaphragm sensor has at least one first diaphragm as well as a second diaphragm, which is disposed essentially on top of the first diaphragm. Furthermore, the micromechanical diaphragm sensor has a first cavity and a second cavity, which is essentially disposed above the first cavity.
摘要翻译： 一种微机械振动膜传感器的制造方法以及利用该方法制造的微机械振动膜传感器。 微机械振动膜传感器具有至少一个第一隔膜以及第二隔膜，其基本上设置在第一隔膜的顶部上。 此外，微机械隔膜传感器具有第一空腔和第二空腔，其基本上设置在第一空腔的上方。
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8.发明申请公开(公告)号：US20090162619A1
公开(公告)日：2009-06-25
申请号：US12300544
申请日：2007-04-03
CPC分类号： B81C1/00158 , B81B2201/0257 , B81B2201/0264 , B81B2203/0127 , H04R19/04 , Y10T428/24802
摘要： A method is provided for producing a micromechanical component and a micromechanical component is provided, particularly a microphone, a micro-loudspeaker or a pressure sensor (an absolute pressure sensor or a relative pressure sensor) having a substrate and having a diaphragm pattern, for the production of the diaphragm pattern, process steps being provided that are compatible only with a circuit that is monolithically integrated into or on the substrate, a sacrificial pattern applied onto the substrate being removed for the production of the diaphragm pattern.
摘要翻译： 提供了一种用于制造微机械部件并提供微机械部件的方法，特别是麦克风，具有基板并具有光阑图案的微型扬声器或压力传感器（绝对压力传感器或相对压力传感器），用于 膜片图案的生产，仅提供与单片集成到基板中或基板上的电路相兼容的工艺步骤，施加到基板上的牺牲图案被去除以用于生产隔膜图案。
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公开(公告)号：US20050020007A1
公开(公告)日：2005-01-27
申请号：US10868602
申请日：2004-06-14
IPC分类号： H01L21/3205 , H01L21/768 , H01L23/34 , H01L23/522 , H01L21/8234
CPC分类号： H01L23/345 , H01L21/76838 , H01L23/5228 , H01L2924/0002 , H01L2924/09701 , H01L2924/00
摘要： A method of producing conducting tracks and resistors in a semiconductor element that includes at least one conductive layer. The conductive layer is regionally through-oxidized so that at least one region of the conductive layer is electrically insulated by the oxidized regions with respect to the remaining regions of the conductive layer.
摘要翻译： 一种在包括至少一个导电层的半导体元件中制造导电轨道和电阻器的方法。 导电层被区域通过氧化，使得导电层的至少一个区域相对于导电层的其余区域被氧化区域电绝缘。
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10.发明授权Micromechanical component having an inclined structure and corresponding manufacturing method 有权具有倾斜结构的微机械部件和相应的制造方法公开(公告)号：US08847336B2
公开(公告)日：2014-09-30
申请号：US12937093
申请日：2008-11-28
申请人： Tjalf Pirk , Stefan Pinter , Hubert Benzel , Heribert Weber , Michael Krueger , Robert Sattler , Frederic Njikam Njimonzie , Joerg Muchow , Joachim Fritz , Christoph Schelling , Christoph Friese
发明人： Tjalf Pirk , Stefan Pinter , Hubert Benzel , Heribert Weber , Michael Krueger , Robert Sattler , Frederic Njikam Njimonzie , Joerg Muchow , Joachim Fritz , Christoph Schelling , Christoph Friese
IPC分类号： H01L29/788 , B81C1/00
CPC分类号： B81C1/00103 , B81B2203/0118 , B81B2203/0307
摘要： In a micromechanical component having an inclined structure and a corresponding manufacturing method, the component includes a substrate having a surface; a first anchor, which is provided on the surface of the substrate and which extends away from the substrate; and at least one cantilever, which is provided on a lateral surface of the anchor, and which points at an inclination away from the anchor.
摘要翻译： 在具有倾斜结构和相应的制造方法的微机械部件中，该部件包括具有表面的基板; 第一锚，其设置在基板的表面上并且远离基板延伸; 以及至少一个悬臂，其设置在锚固件的侧表面上，并且其倾斜远离锚固件。
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