公开(公告)号：US20050100748A1

公开(公告)日：2005-05-12

申请号：US10946051

申请日：2004-09-21

申请人： Bruce Cook ,  Yun Tian ,  Joel Harringa ,  Alan Constant ,  Alan Russell ,  Palaniappa Molian

发明人： Bruce Cook ,  Yun Tian ,  Joel Harringa ,  Alan Constant ,  Alan Russell ,  Palaniappa Molian

IPC分类号： B32B15/04 ,  B81B3/00 ,  B81B7/00 ,  C23C14/06 ,  C23C14/28 ,  C23C16/00

CPC分类号： C23C14/067 ,  B81B3/0075 ,  B81C2201/032 ,  C23C14/28 ,  Y10S428/938 ,  Y10T428/12736 ,  Y10T428/1275 ,  Y10T428/31678

摘要： Performance and reliability of microelectromechanical system (MEMS) components enhanced dramatically through the incorporation of protective thin film coatings. Current-generation MEMS devices prepared by the LIGA technique employ transition metals such as Ni, Cu, Fe, or alloys thereof, and hence lack stability in oxidizing, corrosive, and/or high temperature environments. Fabrication of a superhard, self-lubricating coating based on a ternary boride compound AlMgB14 is described in this letter as a potential breakthrough in protective coating technology for LIGA microdevices. Nanoindentation tests show that hardness of AlMgB14 films prepared by pulsed laser deposition ranges from 45 GPa to 51 GPa, when deposited at room temperature and 573 K, respectively. Extremely low friction coefficients of 0.04-0.05, which are thought to result from a self-lubricating effect, have also been confirmed by nanoscratch tests on the AlMgB14 films. Transmission electron microscopy studies show that the as-deposited films are amorphous, regardless of substrate temperature; however, analysis of FTIR spectra suggests that the higher substrate temperature facilitates formation of the B12 icosahedral framework, therefore leading to the higher hardness.

摘要翻译： 微机电系统（MEMS）组件的性能和可靠性通过并入保护性薄膜涂层而显着提高。 通过LIGA技术制备的当前一代MEMS器件采用过渡金属如Ni，Cu，Fe或其合金，因此在氧化，腐蚀性和/或高温环境中缺乏稳定性。 在本文中描述了基于三元硼化物AlMgB 14的超硬自润滑涂层的制造，作为LIGA微型器件的保护涂层技术的潜在突破。 纳米压痕测试显示，当分别在室温和573K下沉积时，通过脉冲激光沉积制备的AlMgB 14 N膜的硬度范围为45GPa至51GPa。 认为是由自润滑效应引起的非常低的摩擦系数0.04-0.05也已经通过AlMgB 14膜的纳米尺度试验证实。 透射电子显微镜研究表明，沉积膜是无定形的，不管基底温度如何; 然而，FTIR光谱的分析表明较高的底物温度有助于形成B 12二十面体骨架，因此导致更高的硬度。