公开(公告)号：US6013556A

公开(公告)日：2000-01-11

申请号：US924728

申请日：1997-09-05

申请人： Gregg Sumio Higashi ,  Mon-Fen Hong ,  Lionel Cooper Kimerling ,  Yi Ma

发明人： Gregg Sumio Higashi ,  Mon-Fen Hong ,  Lionel Cooper Kimerling ,  Yi Ma

IPC分类号： H01L21/322 ,  H01L21/76

CPC分类号： H01L21/3225

摘要： Crochralski wafers are desirably thermally processed at an elevated temperature prior to integrated circuit fabrication. The thermal processing reduces the number of oxygen nucleation centers and prevents subsequent oxygen precipitation from interfering with iron contamination measurements.

摘要翻译： Crockralski晶片希望在集成电路制造之前在升高的温度下热处理。 热处理减少氧成核中心的数量，并防止后续的氧沉淀干扰铁污染测量。

公开(公告)号：US20180024072A1

公开(公告)日：2018-01-25

申请号：US15425443

申请日：2017-02-06

申请人： Zhaohong HAN ,  Jianwei MU ,  Anuradha Murthy AGARWAL ,  Pao Tai LIN ,  Lionel Cooper KIMERLING

发明人： Zhaohong HAN ,  Jianwei MU ,  Anuradha Murthy AGARWAL ,  Pao Tai LIN ,  Lionel Cooper KIMERLING

IPC分类号： G01N21/77 ,  G01N33/543

CPC分类号： G01N21/7746 ,  G01N21/41 ,  G01N21/648 ,  G01N21/65 ,  G01N33/54373 ,  G01N2021/655 ,  G01N2021/7776 ,  G01N2021/7783 ,  G01N2021/7786 ,  G01N2021/7789 ,  G01N2201/061

摘要： A sensing apparatus includes a light source to transmit a light beam, an input switch, a first sensing element, a second sensing element, and a detector. The input switch receives the light beam and includes a phase change material having a first state and a second state. The first sensing element receives the light beam from the input switch when the phase change material is in the first state and produces a first change in the light beam in response to a presence of a first analyte. The second sensing element receives the light beam from the input switch when the phase change material is in the second state and produces a second change in the light beam in response to a presence of a second analyte. The detector detects the first change and/or the second change in the light beam.

公开(公告)号：US20170299434A1

公开(公告)日：2017-10-19

申请号：US15602323

申请日：2017-05-23

申请人： Juejun Hu ,  Tian GU ,  Kazumi WADA ,  Anuradha Murthy AGARWAL ,  Lionel Cooper KIMERLING ,  Derek Matthew KITA ,  Junying LI ,  Fleur Jacolien FOK

发明人： Juejun Hu ,  Tian GU ,  Kazumi WADA ,  Anuradha Murthy AGARWAL ,  Lionel Cooper KIMERLING ,  Derek Matthew KITA ,  Junying LI ,  Fleur Jacolien FOK

IPC分类号： G01J3/12 ,  G01J3/02 ,  G01J3/28

CPC分类号： G01J3/12 ,  G01J3/0208 ,  G01J3/0218 ,  G01J3/0237 ,  G01J3/2823 ,  G01J3/32 ,  G01J2003/1226

摘要： An apparatus for generating a spectral image includes a filter to receive incident light. The filter has a variable refractive index. The apparatus also includes a modulator, operably coupled to the filter, to modulate the variable refractive index of the filter so as to generate a plurality of optical patterns from the incident light. The plurality of optical patterns represents the spectral image and each optical pattern in the plurality of optical patterns corresponds to a different modulation of the variable refractive index. The apparatus further includes a detector, in optical communication with the filter, to detect the plurality of optical patterns.

公开(公告)号：US10240980B2

公开(公告)日：2019-03-26

申请号：US15602323

申请日：2017-05-23

申请人： Juejun Hu ,  Tian Gu ,  Kazumi Wada ,  Anuradha Murthy Agarwal ,  Lionel Cooper Kimerling ,  Derek Matthew Kita ,  Junying Li ,  Fleur Jacolien Fok

发明人： Juejun Hu ,  Tian Gu ,  Kazumi Wada ,  Anuradha Murthy Agarwal ,  Lionel Cooper Kimerling ,  Derek Matthew Kita ,  Junying Li ,  Fleur Jacolien Fok

IPC分类号： G01N21/25 ,  G01J3/12 ,  G01J3/02 ,  G01J3/28 ,  G01J3/32

摘要： An apparatus for generating a spectral image includes a filter to receive incident light. The filter has a variable refractive index. The apparatus also includes a modulator, operably coupled to the filter, to modulate the variable refractive index of the filter so as to generate a plurality of optical patterns from the incident light. The plurality of optical patterns represents the spectral image and each optical pattern in the plurality of optical patterns corresponds to a different modulation of the variable refractive index. The apparatus further includes a detector, in optical communication with the filter, to detect the plurality of optical patterns.