利索-全球专利检索

  1. 登录
  2. 注册

搜索结果

5 条记录 (耗时 0.015 秒)

    Processing apparatus having integrated pumping system
    1.
    发明授权
    Processing apparatus having integrated pumping system 失效
    具有集成泵送系统的处理装置

    公开(公告)号：US07051759B2

    公开(公告)日：2006-05-30

    申请号：US10945727

    申请日：2004-09-21

    申请人： Paul Reimer ,  Pedram Sabouri ,  Dennis Smith

    发明人： Paul Reimer ,  Pedram Sabouri ,  Dennis Smith

    IPC分类号： C23C16/00 ,  F04F3/00

    CPC分类号： H01L21/6719 ,  F04D17/168 ,  F04D19/04 ,  F04D27/0261 ,  F04D29/4213 ,  F04D29/601 ,  H01L21/67017 ,  H01L21/67167 ,  H01L21/67184 ,  H01L21/67196 ,  Y10T137/86035 ,  Y10T137/86083 ,  Y10T137/86139 ,  Y10T137/86163

    摘要： An apparatus 115 for processing a substrate 20, comprises an integrated pumping system 155 having a high operating efficiency, small size, and low vibrational and noise levels. The apparatus 115 comprises a chamber, such as a load-lock chamber 110, transfer chamber 115, or process chamber 120. An integrated pump 165 is abutting or adjacent to one of the chambers 110, 115, 120 for evacuating gas from the chambers. In operation, the pump is located within the actual envelope or footprint of the apparatus and has an inlet 170 connected to a chamber 110, 115, 120, and an outlet 175 that exhausts the gas to atmospheric pressure. Preferably, the integrated pump 165 comprises a pre-vacuum pump or a low vacuum pump and is housed in a noise reducing enclosure having means for moving the pump between locations and means for stacking pumps vertically in use.

    摘要翻译： 用于处理衬底20的设备115包括具有高操作效率，小尺寸和低振动和噪声水平的集成泵送系统155。 设备115包括诸如加载锁定室110，传送室115或处理室120的室。 集成泵165邻接或邻近室110,115,120中的一个，用于从室抽空气体。 在操作中，泵位于设备的实际封壳或占地面积内，并且具有连接到室110,115,120的入口170和将气体排出到大气压的出口175。 优选地，集成泵165包括预真空泵或低真空泵，并且容纳在具有用于在位置之间移动泵的装置的降噪外壳和用于在使用中垂直堆叠的装置的装置。

    Processing apparatus having integrated pumping system
    2.
    发明授权
    Processing apparatus having integrated pumping system 失效
    具有集成泵送系统的处理装置

    公开(公告)号：US06817377B1

    公开(公告)日：2004-11-16

    申请号：US09505580

    申请日：2000-02-16

    申请人： Paul Reimer ,  Pedram Sabouri ,  Dennis Smith

    发明人： Paul Reimer ,  Pedram Sabouri ,  Dennis Smith

    IPC分类号： C23C1600

    CPC分类号： H01L21/6719 ,  F04D17/168 ,  F04D19/04 ,  F04D27/0261 ,  F04D29/4213 ,  F04D29/601 ,  H01L21/67017 ,  H01L21/67167 ,  H01L21/67184 ,  H01L21/67196 ,  Y10T137/86035 ,  Y10T137/86083 ,  Y10T137/86139 ,  Y10T137/86163

    摘要： An apparatus 115 for processing a substrate 20, comprises an integrated pumping system 155 having a high operating efficiency, small size, and low vibrational and noise levels. The apparatus 115 comprises a chamber, such as a load-lock chamber 110, transfer chamber 115, or process chamber 120. An integrated pump 165 is abutting or adjacent to one of the chambers 110, 115, 120 for evacuating gas from the chambers. In operation, the pump is located within the actual envelope or footprint of the apparatus and has an inlet 170 connected to a chamber 110, 115, 120, and an outlet 175 that exhausts the gas to atmospheric pressure. Preferably, the integrated pump 165 comprises a pre-vacuum pump or a low vacuum pump and is housed in a noise reducing enclosure having means for moving the pump between locations and means for stacking pumps vertically in use.

    摘要翻译： 用于处理衬底20的设备115包括具有高操作效率，小尺寸和低振动和噪声水平的集成泵送系统155。 设备115包括诸如加载锁定室110，传送室115或处理室120的室。集成泵165邻接或邻近其中一个室110,115,120，用于从室抽空气体。 在操作中，泵位于设备的实际封壳或占地面积内，并且具有连接到室110,115,120的入口170和将气体排出到大气压的出口175。 优选地，集成泵165包括预真空泵或低真空泵，并且容纳在具有用于在位置之间移动泵的装置的降噪外壳和用于在使用中垂直堆叠的装置的装置。

    Device and method for reducing vacuum pump energy consumption
    5.
    发明授权
    Device and method for reducing vacuum pump energy consumption 失效
    降低真空泵能耗的装置和方法

    公开(公告)号：US06589023B2

    公开(公告)日：2003-07-08

    申请号：US09975129

    申请日：2001-10-09

    申请人： Douglas Royce ,  Pedram Sabouri ,  Peter Reimer

    发明人： Douglas Royce ,  Pedram Sabouri ,  Peter Reimer

    IPC分类号： F04B2500

    CPC分类号： F04C28/02 ,  F04B37/14 ,  F04B41/06 ,  F04C25/02

    摘要： Generally, a vacuum pumping system having efficient power usage is provided. In one embodiment, the vacuum pumping system includes a first pump, a check valve and a second pump. The check valve and second pump are coupled in parallel to an exhaust line of the first pump. The first pump and second pump have a ratio of internal volume that is about 20 to about 130. In another embodiment, the vacuum pumping system includes a first pump, a check valve and a second pump. The check valve and second pump are coupled in parallel to an exhaust line of the first pump. The first pump and second pump have a ratio of power consumption that is about 5 to about 20. In yet another embodiment, the first pump and second pump have a ratio of pumping capacity that is about 50 to about 200.

    摘要翻译： 通常，提供了具有高效能量使用的真空泵系统。 在一个实施例中，真空泵系统包括第一泵，止回阀和第二泵。 止回阀和第二泵与第一泵的排气管并联。 第一泵和第二泵具有约20至约130的内部体积比。在另一个实施例中，真空泵系统包括第一泵，止回阀和第二泵。 止回阀和第二泵与第一泵的排气管并联。 第一泵和第二泵具有大约5至大约20的功率消耗比。在另一个实施例中，第一泵和第二泵具有大约50至大约200的泵送能力的比率。