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公开(公告)号：US08721778B2
公开(公告)日：2014-05-13
申请号：US13395450
申请日：2010-09-14
CPC分类号： G03F7/70916 , G03F7/70166 , G03F7/70883 , G03F7/70958 , G03F7/70983 , Y10S977/778
摘要： The present invention relates to a foil trap device for debris mitigation, in particular in an EUV system. The foil trap comprises a plurality of spaced apart foils (4) extending from an entrance side towards an exit side of the foil trap, said foils (4) being arranged to allow a straight pass of radiation between the entrance side and the exit side. The foils (4) are coated at least at entrance side edges with a layer (8, 11) of a carbon material containing a fraction of at least 60% of sp3-hybridized carbon atoms, or with a layer (8, 11) of carbon nanotubes. As an alternative, the foils (4) are made of a bulk carbon material of the above composition. The proposed foil trap offers the combination of a high thermal conductivity, a high thermo-chemical resistance against Sn and other liquid metals and a high mechanical stiffness.
摘要翻译： 本发明涉及一种用于碎片减轻的箔捕获装置，特别是在EUV系统中。 箔捕获器包括从箔捕获器的入口侧朝向出口侧延伸的多个间隔开的箔片（4），所述箔片（4）布置成允许入射侧和出射侧之间的直线辐射通过。 至少在入口侧缘处，将箔（4）涂覆至含有至少60％的sp 3杂化碳原子的分数的碳材料层（8,11），或者涂覆有层（8,11） 碳纳米管。 作为替代，箔（4）由上述组成的块状碳材料制成。 所提出的箔夹具提供高导热性，对Sn和其他液态金属的高耐热化学性和高机械刚度的组合。
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公开(公告)号：US20120216681A1
公开(公告)日：2012-08-30
申请号：US13395450
申请日：2010-09-14
CPC分类号： G03F7/70916 , G03F7/70166 , G03F7/70883 , G03F7/70958 , G03F7/70983 , Y10S977/778
摘要： The present invention relates to a foil trap device for debris mitigation, in particular in an EUV system. The foil trap comprises a plurality of spaced apart foils (4) extending from an entrance side towards an exit side of the foil trap, said foils (4) being arranged to allow a straight pass of radiation between the entrance side and the exit side. The foils (4) are coated at least at entrance side edges with a layer (8, 11) of a carbon material containing a fraction of at least 60% of sp3-hybridized carbon atoms, or with a layer (8, 11) of carbon nanotubes. As an alternative, the foils (4) are made of a bulk carbon material of the above composition. The proposed foil trap offers the combination of a high thermal conductivity, a high thermo-chemical resistance against Sn and other liquid metals and a high mechanical stiffness.
摘要翻译： 本发明涉及一种用于碎片减轻的箔捕获装置，特别是在EUV系统中。 箔捕获器包括从箔捕获器的入口侧朝向出口侧延伸的多个间隔开的箔片（4），所述箔片（4）布置成允许入射侧和出射侧之间的直线辐射通过。 至少在入口侧缘处，将箔（4）涂覆至含有至少60％的sp 3杂化碳原子的分数的碳材料层（8,11），或者涂覆有层（8,11） 碳纳米管。 作为替代，箔（4）由上述组成的块状碳材料制成。 所提出的箔夹具提供高导热性，对Sn和其他液态金属的高耐热化学性和高机械刚度的组合。
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公开(公告)号：US20090028408A1
公开(公告)日：2009-01-29
申请号：US12162671
申请日：2007-01-22
IPC分类号： A61N5/10
CPC分类号： A61N5/1031
摘要： An improved radiation therapy planning procedure is suggested. The procedure comprises the steps of specifying and determining the absolute grade of cell degeneracy by in-vitro tests, whereby marker(s) indicative for specific cell degeneracy are detected and quantified, establishing a biology-based segmentation of areas with similar grade of relative cell degeneracy and applying the absolute grade of cell degeneracy to the biology-based segmentation data, thereby establishing an improved radiation therapy planning procedure. Moreover, the present invention suggests a system for an improved radiation therapy planning procedure and its use in procedures of diagnosis and/or therapy management of cancer
摘要翻译： 建议采用改进的放射治疗计划程序。 该方法包括以下步骤：通过体外测试来指定和确定细胞退化的绝对等级，由此检测和量化指示特异性细胞退化的标志物，建立具有相似等级的相对细胞的区域的基于生物学的分割 退化并将绝对等级的细胞退化应用于基于生物学的分割数据，从而建立改进的放射治疗计划程序。 此外，本发明提出了一种改进的放射治疗计划程序及其在癌症诊断和/或治疗管理程序中的应用的系统
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公开(公告)号：US20090166523A1
公开(公告)日：2009-07-02
申请号：US11568194
申请日：2005-04-12
CPC分类号： B82Y10/00 , H01J49/0418
摘要： The present invention relates to the use of carbon nanotubes as a substrate for chemical or biological analysis. The invention further relates to the use of this material in separation adherence and detection of chemical of biological samples. Carbon nanotubes are envisaged as surface material of a fixed substrate or in suspension and applications include but are not limited to processes which involve desorption-ionization of a sample, more specifically mass spectroscopy.
摘要翻译： 本发明涉及碳纳米管作为化学或生物学分析用底物的用途。 本发明还涉及这种材料在分离粘附和生物样品化学物质检测中的应用。 碳纳米管被设想为固定基板的表面材料或悬浮液，并且应用包括但不限于涉及样品的解吸电离的方法，更具体地说是质谱法。
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公开(公告)号：US20090052615A1
公开(公告)日：2009-02-26
申请号：US12162692
申请日：2007-01-23
申请人： Carolina Ribbing , Peter Klaus Bachmann , Matthijs Adriaansz , Han Kroon , Herman Stegehuis , Hans Nikol
发明人： Carolina Ribbing , Peter Klaus Bachmann , Matthijs Adriaansz , Han Kroon , Herman Stegehuis , Hans Nikol
IPC分类号： A61B6/00
CPC分类号： A61B6/405 , A61B6/032 , A61B6/4007 , A61B6/4241 , A61B6/4266 , A61B6/482 , G01N23/046 , G01N2223/419
摘要： An imaging apparatus is disclosed. The imaging apparatus comprises a multidimensional assembly that further comprises a plurality of x-ray sources that are individually addressable. The plurality of x-ray sources is further configurable to simultaneously emit x-ray spectra at different mean energies. Furthermore, the multi-dimensional assembly further comprises a plurality of x-ray detectors that are arranged to detect at least a part of the x-rays that are emitted from at least one of the x-ray sources.
摘要翻译： 公开了一种成像装置。 成像设备包括多维组件，其进一步包括可单独寻址的多个x射线源。 多个x射线源还可配置成以不同的平均能量同时发射X射线光谱。 此外，多维组件还包括多个x射线检测器，其被布置成检测从至少一个x射线源发射的X射线的至少一部分。
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公开(公告)号：US06625254B2
公开(公告)日：2003-09-23
申请号：US09973313
申请日：2001-10-09
申请人： Peter Klaus Bachmann , Volker Van Elsbergen , Bernd David , Rainer Willi Eckart , Geoffrey Harding
发明人： Peter Klaus Bachmann , Volker Van Elsbergen , Bernd David , Rainer Willi Eckart , Geoffrey Harding
IPC分类号： G21K100
CPC分类号： H01J33/04 , H01J5/18 , H01J35/18 , H01J2235/082
摘要： The invention relates to a window transparent to electron rays comprising a foil (1, 10, 300a) transparent to electron rays and separated from a carrier substrate as well as a retaining element (2, 300b) for supporting a peripheral region of the foil transparent to electron rays in the operational state, which retaining element (2, 300b) is made of a material which has a linear thermal expansion coefficient which matches the linear thermal expansion coefficient of the foil material. The invention further relates to a method of manufacturing a window transparent to electron rays and an X-ray device with such a window.
摘要翻译： 本发明涉及对电子射线透明的窗口，该窗口包括对电子射线透明并与载体衬底分离的箔片（1,10,300a）以及用于支撑箔片周边区域透明的保持元件（2,300b） 与保持元件（2,300b）由具有与箔材料的线性热膨胀系数相匹配的线性热膨胀系数的材料制成的工作状态下的电子射线。本发明还涉及一种制造 窗口对电子射线透明，并具有这样的窗口的X射线装置。
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公开(公告)号：US06548937B1
公开(公告)日：2003-04-15
申请号：US10137492
申请日：2002-05-01
申请人： Mareike Katharine Klee , Hans-Wolfgang Brand , Egon Krafczyk , Hans-Peter Loebl , Peter Klaus Bachmann
发明人： Mareike Katharine Klee , Hans-Wolfgang Brand , Egon Krafczyk , Hans-Peter Loebl , Peter Klaus Bachmann
IPC分类号： H01L4108
CPC分类号： B06B1/0688
摘要： The invention relates to an array of ultrasound transducers which each comprise a membrane that is comprised of diamond or diamond-like carbon, a barrier structure, a piezoelectric layer, a first electrode and a second electrode. The barrier structure ensures strong adhesion of the piezoelectric layer to the barrier structure and thus to the device and that the piezoelectric layer only comprises a single phase. In addition, the barrier structure protects the membrane against oxidation/decomposition during the manufacturing process of piezoelectric layer. The invention further relates to an ultrasound transducer.
摘要翻译： 本发明涉及一种超声波换能器阵列，每个超声换能器包括由金刚石或类金刚石碳组成的膜，阻挡结构，压电层，第一电极和第二电极。 阻挡结构确保了压电层对阻挡结构的强粘合性，从而确保了对器件的强粘附性，并且压电层仅包括单相。 此外，阻挡结构在压电层的制造过程中保护膜免受氧化/分解。 本发明还涉及一种超声换能器。
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公开(公告)号：US06503609B1
公开(公告)日：2003-01-07
申请号：US09487148
申请日：2000-01-19
申请人： Hans-Peter Löbl , Detlef Raasch , Horst Bentin , Gerd Much , Peter Klaus Bachmann , Mareike Klee
发明人： Hans-Peter Löbl , Detlef Raasch , Horst Bentin , Gerd Much , Peter Klaus Bachmann , Mareike Klee
IPC分类号： H01G430
CPC分类号： C04B35/462 , C04B2235/3208 , C04B2235/3224 , H01L28/55 , H01L28/60 , Y10T428/24917 , Y10T428/31681
摘要： The invention relates to a passive ceramic component with a carrier substrate, at least one first electrode, at least one first barrier layer, at least one dielectric, and at least one second electrode. A metal, an alloy, or a conductive oxide is used for the barrier layer.
摘要翻译： 本发明涉及具有载体衬底，至少一个第一电极，至少一个第一阻挡层，至少一个电介质和至少一个第二电极的无源陶瓷部件。 阻挡层使用金属，合金或导电氧化物。
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公开(公告)号：US07864917B2
公开(公告)日：2011-01-04
申请号：US12162692
申请日：2007-01-23
申请人： Carolina Ribbing , Peter Klaus Bachmann , Matthijs Adriaansz , Han Kroon , Herman Stegehuis , Hans Nikol
发明人： Carolina Ribbing , Peter Klaus Bachmann , Matthijs Adriaansz , Han Kroon , Herman Stegehuis , Hans Nikol
IPC分类号： H05G1/60 , G01N23/087 , A61B6/03
CPC分类号： A61B6/405 , A61B6/032 , A61B6/4007 , A61B6/4241 , A61B6/4266 , A61B6/482 , G01N23/046 , G01N2223/419
摘要： An imaging apparatus includes a multi-dimensional assembly supporting a plurality of x-ray sources that are individually addressable. The plurality of x-ray sources is further configurable to simultaneously emit x-ray spectra at different mean energies. Furthermore, the multi-dimensional assembly includes a plurality of x-ray detectors that are arranged to detect at least a part of the x-rays that are emitted from at least one of the x-ray sources.
摘要翻译： 成像设备包括支撑可单独寻址的多个x射线源的多维组件。 多个x射线源还可配置成以不同的平均能量同时发射X射线光谱。 此外，多维组件包括多个x射线检测器，其被布置成检测从至少一个x射线源发射的x射线的至少一部分。
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10.发明授权公开(公告)号：US06791262B2
公开(公告)日：2004-09-14
申请号：US10210498
申请日：2002-08-01
IPC分类号： H05B3300
CPC分类号： H01L51/5253
摘要： The invention relates to an organic electroluminescent display device comprising a front electrode member, a counterelectrode member, an organic electroluminescent member arranged between the front electrode member and the counterelectrode member, and a protective layer of an amorphous carbon modification, by means of which the organic electroluminescent display device is sealed in a gastight and moistureproof manner. The invention also relates to a method of manufacturing such a display device.
摘要翻译： 本发明涉及一种有机电致发光显示装置，包括前电极部件，反电极部件，布置在前电极部件和反电极部件之间的有机电致发光部件，以及无定形碳改性保护层，通过该有机电致发光部件， 电致发光显示装置以气密和防湿的方式被密封。本发明还涉及一种制造这种显示装置的方法。
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