ELECTROMECHANICAL MICROSYSTEMS WITH AIR GAPS
    1.
    发明申请
    ELECTROMECHANICAL MICROSYSTEMS WITH AIR GAPS 有权
    具有空气GAPS的电化学微观结构

    公开(公告)号:US20130270096A1

    公开(公告)日:2013-10-17

    申请号:US13814928

    申请日:2011-08-11

    CPC classification number: B81B3/0051 B81B3/0008 B81B3/0086

    Abstract: The present invention relates to an microelectromechanical system (1) comprising: a base (15) comprising a substrate (20) and a substrate electrode (40); a moveable beam (30); a voltage generator (10) able to generate a potential difference between the beam (30) and the substrate electrode (40); and at least one mechanical stop (70) connected to the beam and designed to make contact with the base (15) when a potential difference is applied between the beam (30) and the substrate electrode (40), thereby defining an air-filled cavity (80) between the beam (30) and the substrate electrode (40), characterized in that it furthermore comprises an electrical-charge blocking element (50) placed on the substrate (20), said element facing the at least one mechanical stop (70) and being electrically connected to the beam (30).

    Abstract translation: 本发明涉及一种微电子机械系统(1),包括:基底(15),包括基底(20)和基底电极(40); 可动梁(30); 电压发生器(10),其能够产生所述光束(30)和所述衬底电极(40)之间的电位差; 以及连接到所述梁并且当在所述梁(30)和所述基板电极(40)之间施加电位差时被设计成与所述基座(15)接触的至少一个机械止动件(70),从而限定充满气体 在所述光束(30)和所述衬底电极(40)之间的空腔(80),其特征在于,其还包括放置在所述衬底(20)上的电荷阻挡元件(50),所述元件面向所述至少一个机械停止 (70)并且电连接到所述梁(30)。

    Frequency filter and its manufacturing process
    2.
    发明授权
    Frequency filter and its manufacturing process 有权
    频率滤波器及其制造过程

    公开(公告)号:US07332988B2

    公开(公告)日:2008-02-19

    申请号:US11156553

    申请日:2005-06-21

    CPC classification number: H01P1/207 H01P11/007

    Abstract: The invention relates to a frequency filter including a structure with, on one face, two extreme evanescent areas and at least one wave guide area between the evanescent areas. The at least one wave guide area and the evanescent areas form a single closed cavity. The single cavity is partitioned by at least two resonator elements that are embedded in the single cavity at placement areas and that contribute to delimiting the at least one wave guide area and the evanescent areas.

    Abstract translation: 本发明涉及一种频率滤波器,其包括在一个面上具有两个极端渐逝区域和在渐逝区域之间的至少一个波导区域的结构。 所述至少一个波导区域和所述渐逝区域形成单个封闭空腔。 单个腔被至少两个共振器元件划分,所述至少两个谐振器元件嵌入在放置区域的单个空腔中,并有助于限定至少一个波导区域和渐逝区域。

    Microcomponent including a capacitive component
    3.
    发明授权
    Microcomponent including a capacitive component 有权
    微电子元件包括电容元件

    公开(公告)号:US06650530B2

    公开(公告)日:2003-11-18

    申请号:US09989584

    申请日:2001-11-20

    CPC classification number: H01G5/16 H01G5/38

    Abstract: A microcomponent which includes a capacitive component, of at least two elementary capacitors (C1, C2, C3, C4) which are connected in series. Each elementary capacitor is made up of two plates namely: a plate (10) fixed with respect to the rest of the microcomponent; and a second plate (12), part of which is capable of being displaced with respect to the first fixed plate (10) due to the effect of a control signal, so as to vary the value of the capacitance of the elementary capacitor C1. The control signals for the various elementary capacitors are generated independently so as to vary the overall capacitance of the capacitor by independent variation of the capacitances of each elementary capacitor.

    Abstract translation: 包括串联连接的至少两个基本电容器(C1,C2,C3,C4)的电容部件的微型部件。 每个基本电容器由两个板组成,即相对于微组件的其余部分固定的板(10) 以及第二板(12),其部分能够由于控制信号的影响而相对于第一固定板(10)移位,以便改变基本电容器C1的电容值。 独立地生成各种基本电容器的控制信号,以通过每个基本电容器的电容的独立变化来改变电容器的总体电容。

    Electrical resonator with a ribbon loop and variable capacitors formed at the parallel ends
    4.
    发明授权
    Electrical resonator with a ribbon loop and variable capacitors formed at the parallel ends 有权
    具有带状环的电气谐振器和在并联端形成的可变电容器

    公开(公告)号:US06549097B2

    公开(公告)日:2003-04-15

    申请号:US09975352

    申请日:2001-10-11

    CPC classification number: H01P7/082 H01P1/203

    Abstract: An elementary electrical resonator which includes a ribbon conductor forming a flat loop with at least one turn, the conductor having ends which form two parallel segments. The resonator further includes a conducting bridge which forms an arch straddling the two parallel segments of the ribbon conductor wherein opposing surfaces of the arch and the parallel segments form a capacitor. A part of the bridge is capable of being displaced with respect to the parallel segments under the action of a control signal so as to cause the capacitance of the capacitor and therefore the tuning frequency of the resonator to vary.

    Abstract translation: 一种基本电谐振器,其包括形成具有至少一匝的平坦环的带状导体,所述导体具有形成两个平行段的端部。 谐振器还包括导电桥,其形成跨过带状导体的两个平行段的拱,其中拱形和平行段的相对表面形成电容器。 桥接器的一部分能够在控制信号的作用下相对于平行段移位,从而引起电容器的电容,因此谐振器的调谐频率发生变化。

    Electromechanical microsystems with air gaps
    5.
    发明授权
    Electromechanical microsystems with air gaps 有权
    具有气隙的机电微系统

    公开(公告)号:US08941452B2

    公开(公告)日:2015-01-27

    申请号:US13814928

    申请日:2011-08-11

    CPC classification number: B81B3/0051 B81B3/0008 B81B3/0086

    Abstract: The present invention relates to an microelectromechanical system (1) comprising: a base (15) comprising a substrate (20) and a substrate electrode (40); a moveable beam (30); a voltage generator (10) able to generate a potential difference between the beam (30) and the substrate electrode (40); and at least one mechanical stop (70) connected to the beam and designed to make contact with the base (15) when a potential difference is applied between the beam (30) and the substrate electrode (40), thereby defining an air-filled cavity (80) between the beam (30) and the substrate electrode (40), characterized in that it furthermore comprises an electrical-charge blocking element (50) placed on the substrate (20), said element facing the at least one mechanical stop (70) and being electrically connected to the beam (30).

    Abstract translation: 本发明涉及一种微电子机械系统(1),包括:基底(15),包括基底(20)和基底电极(40); 可动梁(30); 电压发生器(10),其能够产生所述光束(30)和所述衬底电极(40)之间的电位差; 以及连接到所述梁并且当在所述梁(30)和所述基板电极(40)之间施加电位差时被设计成与所述基座(15)接触的至少一个机械止动件(70),从而限定充满气体 在所述光束(30)和所述衬底电极(40)之间的空腔(80),其特征在于,其还包括放置在所述衬底(20)上的电荷阻挡元件(50),所述元件面向所述至少一个机械停止 (70)并且电连接到所述梁(30)。

    Frequency filter and its manufacturing process
    6.
    发明申请
    Frequency filter and its manufacturing process 有权
    频率滤波器及其制造过程

    公开(公告)号:US20060125579A1

    公开(公告)日:2006-06-15

    申请号:US11156553

    申请日:2005-06-21

    CPC classification number: H01P1/207 H01P11/007

    Abstract: The invention relates to a frequency filter comprising a structure with, on one face, two extreme evanescent areas and at least one wave guide area between the evanescent areas, characterised in that the at least one wave guide area and the evanescent areas form a single closed cavity, the said single cavity being partitioned by at least two resonator elements that are embedded in the said single cavity at placement areas and that contribute to delimiting the said at least one wave guide area and the evanescent areas. The invention also relates to a process for manufacturing at least one such frequency filter, the said process comprising the following steps: manufacture of a structure comprising at least one cavity on one of its faces, called the back face, embedment of at least two resonator elements in the cavity at placement areas so as to delimit the at least one wave guide area and the evanescent areas.

    Abstract translation: 本发明涉及一种频率滤波器,其包括在一个面上具有两个极端渐逝区域和在该渐逝区域之间的至少一个波导区域的结构,其特征在于,所述至少一个波导区域和渐近区域形成单个闭合 所述单个腔被至少两个共振器元件隔开,所述至少两个谐振器元件嵌入所述单个空腔中的放置区域并且有助于限定所述至少一个波导区域和渐逝区域。 本发明还涉及一种用于制造至少一个这种频率滤波器的方法,所述方法包括以下步骤:制造包括称为背面的其一个面上的至少一个空腔的结构,至少两个谐振器 在放置区域处的空腔中的元件,以限定至少一个波导区域和渐逝区域。

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