公开(公告)号：US07156951B1

公开(公告)日：2007-01-02

申请号：US10600273

申请日：2003-06-20

申请人： Qinghong K. Gao ,  Brian McMillin ,  Bill Denty

发明人： Qinghong K. Gao ,  Brian McMillin ,  Bill Denty

IPC分类号： C23F1/00 ,  H01L21/306 ,  C23C16/00

CPC分类号： H01L21/67109 ,  H01L21/3065

摘要： A gas distribution apparatus delivers a coolant gas, such as helium, to an upper surface of a chuck for controlling a temperature of a wafer placed on the chuck. The gas distribution apparatus allows first and second zones, such as an inner zone and an outer zone of the chuck, to be supplied with a coolant gas at different pressures for control of the temperature across the wafer. The gas distribution apparatus includes a pressure and flow control system for supplying the coolant gas at selected pressures and bleed lines which provide the dual function of allowing rapid evacuation of the inner and outer zones and preventing excess pressure from one zone from migrating to another zone.

摘要翻译： 气体分配装置将诸如氦气的冷却剂气体输送到卡盘的上表面，以控制放置在卡盘上的晶片的温度。 气体分配装置允许在不同压力下向第一和第二区域（例如卡盘的内部区域和外部区域）供应冷却剂气体，以控制跨越晶片的温度。 气体分配装置包括用于以选定压力供应冷却剂气体的压力和流量控制系统以及排气管线，其提供允许内部和外部区域的快速排空并防止来自一个区域的过度压力迁移到另一个区域的双重功能。

公开(公告)号：US6029790A

公开(公告)日：2000-02-29

申请号：US166386

申请日：1998-10-05

申请人： Huiyao Liu ,  Qinghong K. Gao ,  Richard Martello

发明人： Huiyao Liu ,  Qinghong K. Gao ,  Richard Martello

IPC分类号： F16D23/14

CPC分类号： F16D23/14

摘要： A composite release sleeve includes a first cylindrical sleeve of a non-metallic material, and a second cylindrical sleeve of a metallic material. The composite release sleeve enables translation movement of a bearing such as a clutch release bearing, upon a guide element such as an input shaft. Preferably, the first cylindrical sleeve material is a polymer composite having a molded-in second cylindrical sleeve such as a bronze bushing. An integral flange extending outwardly from one end of the first cylindrical sleeve transfers the axial motion of the release sleeve to the clutch assembly. The first cylindrical sleeve further includes an integrally molded cavity which serves as a lubrication reservoir to reduce friction and facilitate slidable movement of the composite release sleeve along the input shaft.

摘要翻译： 复合释放套筒包括非金属材料的第一圆柱形套筒和金属材料的第二圆柱形套筒。 复合释放套筒能够使诸如离合器分离轴承的轴承在诸如输入轴的引导元件上平移运动。 优选地，第一圆柱形套筒材料是具有模制的第二圆柱形套筒（例如青铜衬套）的聚合物复合材料。 从第一圆柱形套筒的一端向外延伸的整体凸缘将释放套筒的轴向运动传递到离合器组件。 第一圆柱形套筒还包括整体模制的空腔，其用作润滑容器以减少摩擦并促进复合材料释放套筒沿着输入轴的滑动运动。