公开(公告)号：US5412986A

公开(公告)日：1995-05-09

申请号：US631563

申请日：1990-12-21

申请人： Steven Beringhause ,  W. Donald Rolph, III ,  Raymond E. Mandeville ,  Siegbert Hartauer ,  Vaclav F. Vilimek

发明人： Steven Beringhause ,  W. Donald Rolph, III ,  Raymond E. Mandeville ,  Siegbert Hartauer ,  Vaclav F. Vilimek

IPC分类号： G01P15/12 ,  H01L29/84 ,  G01D15/12

CPC分类号： G01P15/123

摘要： An accelerometer device comprises a silicon semiconductor member having a mass mounted on a support by integral beams extending between the mass and support to permit movement of the mass in response to acceleration. Piezoresistive sensors are accommodated in the beams for sensing strain in the beams during movement of the mass to provide an output signal from the device corresponding to the acceleration. The beams each have an end secured to the support and an end secured to the mass and taper intermediate the beam ends to provide a high and substantially uniform strain throughout the tapered section of the beam. The piezoresistive sensor is accommodated in the tapered beam section to be responsive to that high, uniform strain. Preferably the member has four beams mounting the mass, each beam has a tapered section extending from each end of the beam toward the center of the beam, and each beam section has a piezoresistive sensor accommodated therein to be responsive to the uniform strain within that beam section. The piezoresistive sensors are conveniently interconnected to compensate for off-axis acceleration in one direction by compensation within each leg of a bridge circuit and to compensate for off-axis acceleration in another direction by compensation within the full bridge circuit.

摘要翻译： 加速度计装置包括硅半导体构件，其具有通过在质量块和支撑件之间延伸的整体梁安装在支撑件上的质量，以允许质量块响应于加速度的移动。 压阻传感器容纳在梁中，用于在质量块移动期间感测梁中的应变，以提供来自与加速度相对应的装置的输出信号。 每个梁各自具有固定到支撑件的端部，并且固定到质量体的端部和在梁端部之间的锥形的端部，以在梁的整个锥形部分中提供高且基本上均匀的应变。 压阻传感器容纳在锥形梁部分中以响应于该高的均匀应变。 优选地，构件具有安装质量块的四个梁，每个梁具有从梁的每个端部朝向梁的中心延伸的锥形部分，并且每个梁部分具有容纳在其中的压阻传感器，以响应于该梁内的均匀应变 部分。 压阻式传感器方便地互连，通过在桥接电路的每个支路内进行补偿来补偿一个方向的离轴加速度，并且通过在全桥电路内的补偿来补偿另一个方向上的离轴加速度。

公开(公告)号：US5542296A

公开(公告)日：1996-08-06

申请号：US367655

申请日：1995-01-03

申请人： Eric P. Reidemeister ,  Larry K. Johnson ,  Raymond E. Mandeville ,  Douglas B. Strott ,  Robert O. Southworth

发明人： Eric P. Reidemeister ,  Larry K. Johnson ,  Raymond E. Mandeville ,  Douglas B. Strott ,  Robert O. Southworth

IPC分类号： G01P15/08 ,  G01P1/02 ,  G01P15/00 ,  G01P15/125 ,  G01P15/18

CPC分类号： G01P1/023 ,  G01P15/125 ,  G01P15/18

摘要： An acceleration sensor (10, 10', 10") in which a metal blade member (24) having a source plate portion (24a), attachment portion (24p) and integral resilient beams (24b) extending between the source plate portion and the attachment portion is attached to a pin (22) received in turn in a bore (18a) of a substrate (18). The metal blade member (24) is mounted on the substrate (18) so that the source plate portion is a selected distance from a detect plate (18b) mounted on the substrate. The sensor is disposed in a cylindrical housing (12, 12', 12") which can be directly mounted to a circuit board (50) through terminal pins (18g, 18h, 18i) or can be provided with a threaded fastener (12"d). In one embodiment first and second sensor modules are received in a housing (42) to sense acceleration forces in two perpendicular directions. In another embodiment tab (30b) extending from a signal conditioning circuit (30) is placed between a connector body (20') and the sidewall (12b) of housing (12) with a detent (12c) formed in the sidewall (12b) to effect an electrical connection between circuit (30) and housing (12"). An O-ring gasket (13) is placed between the sidewall (12b) and the connector body (20') outboard of the detent to provide an environmental seal.

摘要翻译： 一种加速度传感器（10,10'，10“），其中具有源极板部分（24a），连接部分（24p）和整体的弹性梁（24b）的金属叶片构件（24）在源极板部分和 附接部分依次连接在基板（18）的孔（18a）中的销（22）上。 金属刀片构件（24）安装在基板（18）上，使得源极板部分距安装在基板上的检测板（18b）的选定距离。 传感器设置在圆柱形壳体（12,12'，12“）中，该壳体可以通过端子销（18g，18h，18i）直接安装到电路板（50）上，或者可以设置有螺纹紧固件（12 ''d）。 在一个实施例中，第一和第二传感器模块被容纳在壳体（42）中以感测两个垂直方向上的加速力。 在另一个实施例中，从信号调理电路（30）延伸的突片（30b）被放置在连接器主体（20'）和壳体（12）的侧壁（12b）之间，其中形成在侧壁（12b）中的制动器（12c） 以实现电路（30）和外壳（12“）之间的电连接。 O形环垫圈（13）放置在制动器外侧的侧壁（12b）和连接器主体（20'）之间以提供环境密封。

公开(公告)号：US5345823A

公开(公告)日：1994-09-13

申请号：US790956

申请日：1991-11-12

申请人： Eric P. Reidemeister ,  Larry K. Johnson ,  Keith W. Kawate ,  Raymond E. Mandeville ,  Douglas B. Christensen ,  Robert O. Southworth

发明人： Eric P. Reidemeister ,  Larry K. Johnson ,  Keith W. Kawate ,  Raymond E. Mandeville ,  Douglas B. Christensen ,  Robert O. Southworth

IPC分类号： G01P1/02 ,  G01P15/08 ,  G01P15/125

CPC分类号： G01P15/125 ,  G01P1/023 ,  G01P2015/0828

摘要： An accelerometer unit has a capacitor detect plate and a source place connector preferably defined respectively inside and outside a groove in one surface of a ceramic substrate. A flat metal member has an attachment portion secured in electrically conductive relation to the connector, has a source plate portion spaced over the detect plate to form a capacitor, and has integral resilient beams extending from the attachment portion to support the source plate portion spaced from the detect plate to be movable relative to the detect plate in response to acceleration force to provide an electrical signal. Preferably glass rods between the attachment member portion and source place connector facilitate the spacing. An electrically insulating housing base has integral pins extending through openings in the accelerometer unit substrate and in a separate electrical circuit unit to mount the circuit unit in spaced, overlying relation to the accelerometer unit, and an electrically conductive adhesive extends through guide holes in a gasket between the accelerometer and circuit units to electrically connect the circuit to the detect plate and to the connector on the ceramic substrate.

摘要翻译： 加速度计单元具有电容器检测板和源极连接器，优选地分别限定在陶瓷衬底的一个表面中的槽内和外侧。 扁平金属构件具有与连接器导电关系固定的附接部分，具有在检测板上隔开形成电容器的源极板部分，并且具有从附接部分延伸的一体的弹性梁，以支撑源板部分与 检测板相对于检测板响应于加速力而可移动以提供电信号。 优选地，在附接构件部分和源地连接器之间的玻璃杆有助于间隔。 电绝缘壳体基座具有延伸穿过加速度计单元基板中的开口并且在单独的电路单元中的整体销，以将电路单元以与加速度计单元隔开的重叠关系安装，并且导电粘合剂延伸穿过垫圈中的引导孔 在加速度计和电路单元之间，将电路电连接到检测板和陶瓷基板上的连接器。

公开(公告)号：US5121180A

公开(公告)日：1992-06-09

申请号：US718523

申请日：1991-06-21

申请人： Steven Beringhause ,  Raymond E. Mandeville ,  W. Donald Rolph, III

发明人： Steven Beringhause ,  Raymond E. Mandeville ,  W. Donald Rolph, III

IPC分类号： G01P15/08 ,  G01P15/12 ,  G01P15/18

CPC分类号： G01P15/123 ,  G01P15/0802 ,  G01P2015/084

摘要： An accelerometer is shown with improved drop resistance for regulating automotive safety air-bag systems and the like. The device comprises a member of silicon semiconducting material having a central seismic mass mounted on a surrounding support by intervening beams, a pair of beams extending from each of four sides of the mass to the support and the mass being otherwise free of connection to the support to permit movement of the mass along an axis perpendicular to the plane of the support in highly sensitive response to acceleration forces along that axis. Each beam extends from a location near an end of one side of the mass so that the two beams extending from each side of the mass are widely spaced relative to each other to oppose rotational or twisting movement of the mass in response to off-axis acceleration forces to prevent damage to the beams during dropping of the accelerometer to the extent possible consistent with providing the desired sensitivity of response. Piezoresistive sensors are accommodated in selected beams to sense strain during movement of the mass to provide an output signal corresponding to acceleration force along the device axis. Stops limit movement of the mass along that axis to further avoid damage to the beams.