公开(公告)号：US5382342A

公开(公告)日：1995-01-17

申请号：US4767

申请日：1993-01-14

申请人： Richard M. Bionta ,  Daniel M. Makowiecki ,  Kenneth M. Skulina

发明人： Richard M. Bionta ,  Daniel M. Makowiecki ,  Kenneth M. Skulina

IPC分类号： C23C14/16 ,  C23C14/56 ,  G21K1/10 ,  C23C14/00

CPC分类号： C23C14/16 ,  C23C14/562 ,  G21K1/10

摘要： A process for fabricating high efficiency x-ray lenses that operate in the 0.5-4.0 keV region suitable for use in biological imaging, surface science, and x-ray lithography of integrated circuits. The gradient index x-ray optics fabrication process broadly involves co-sputtering multi-layers of film on a wire, followed by slicing and mounting on block, and then ion beam thinning to a thickness determined by periodic testing for efficiency. The process enables the fabrication of transmissive gradient index x-ray optics for the 0.5-4.0 keV energy range. This process allows the fabrication of optical elements for the next generation of imaging and x-ray lithography instruments m the soft x-ray region.

摘要翻译： 一种用于制造在0.5-4.0keV区域内工作的高效x射线透镜的方法，适用于集成电路的生物成像，表面科学和x射线光刻。 梯度指数x射线光学制造工艺广泛涉及在线上共同溅射多层膜，然后在块上切片并安装，然后将离子束薄化至通过周期性测试确定的厚度以获得效率。 该过程使得能够制造用于0.5-4.0keV能量范围的透射梯度折射率x射线光学器件。 该过程允许在软x射线区域制造用于下一代成像的光学元件和x射线光刻仪器。

公开(公告)号：US5381944A

公开(公告)日：1995-01-17

申请号：US145568

申请日：1993-11-04

申请人： Daniel M. Makowiecki ,  Richard M. Bionta

发明人： Daniel M. Makowiecki ,  Richard M. Bionta

IPC分类号： B23K35/00 ,  B23K35/32 ,  B23K35/34 ,  H01L21/50 ,  H01L23/10 ,  B23K31/02

CPC分类号： B23K35/001 ,  B23K35/32 ,  B23K35/34 ,  H01L21/50 ,  H01L23/10 ,  B23K2035/008 ,  H01L2924/0002 ,  Y10S428/941

摘要： The joining technique requires no external heat source and generates very little heat during joining. It involves the reaction of thin multilayered films deposited on faying surfaces to create a stable compound that functions as an intermediate or braze material in order to create a high strength bond. While high temperatures are reached in the reaction of the multilayer film, very little heat is generated because the films are very thin. It is essentially a room temperature joining process.

摘要翻译： 连接技术不需要外部热源，并且在接合期间产生很少的热量。 它涉及沉积在接合表面上的薄多层膜的反应，以产生用作中间体或钎焊材料的稳定化合物，以便产生高强度粘结。 虽然在多层膜的反应中达到高温，但由于膜非常薄，所以产生的热量很少。 它基本上是室温接合过程。

公开(公告)号：US06521101B1

公开(公告)日：2003-02-18

申请号：US08762572

申请日：1996-12-09

申请人： Kenneth M. Skulina ,  Richard M. Bionta ,  Daniel M. Makowiecki ,  Craig S. Alford

发明人： Kenneth M. Skulina ,  Richard M. Bionta ,  Daniel M. Makowiecki ,  Craig S. Alford

IPC分类号： C23C1434

CPC分类号： B82Y10/00 ,  C23C14/14 ,  C23C14/564 ,  G21K1/062 ,  G21K2201/061 ,  G21K2201/067

摘要： Beryllium-based multilayer structures and a process for fabricating beryllium-based multilayer mirrors, useful in the wavelength region greater than the beryllium K-edge (111 Å or 11.1 nm). The process includes alternating sputter deposition of beryllium and a metal, typically from the fifth row of the periodic table, such as niobium (Nb), molybdenum (Mo), ruthenium (Ru), and rhodium (Rh). The process includes not only the method of sputtering the materials, but the industrial hygiene controls for safe handling of beryllium. The mirrors made in accordance with the process may be utilized in soft x-ray and extreme-ultraviolet projection lithography, which requires mirrors of high reflectivity (>60%) for x-rays in the range of 60-140 Å (60-14.0 nm).

摘要翻译： 铍基多层结构和制造铍基多层反射镜的方法，可用于大于铍K边缘（111或11.1nm）的波长区域。 该方法包括交替溅射沉积铍和通常从元素周期表第五行的金属，例如铌（Nb），钼（Mo），钌（Ru）和铑（Rh）。 该方法不仅包括溅射材料的方法，还包括用于安全处理铍的工业卫生控制。 根据该方法制造的反射镜可用于软X射线和极紫外投影光刻，其需要60-140埃（60-14.0）范围内的X射线具有高反射率（> 60％）的反射镜 nm）。

公开(公告)号：US5349194A

公开(公告)日：1994-09-20

申请号：US011636

申请日：1993-02-01

申请人： Craig R. Wuest ,  Richard M. Bionta

发明人： Craig R. Wuest ,  Richard M. Bionta

IPC分类号： H01J47/06 ,  G01J5/28 ,  H01J40/06

CPC分类号： H01J47/06

摘要： A microgap ultra-violet detector of photons with wavelengths less than 400 run (4000 Angstroms) which comprises an anode and a cathode separated by a gas-filled gap and having an electric field placed across the gap. Either the anode or the cathode is semi-transparent to UV light. Upon a UV photon striking the cathode an electron is expelled and accelerated across the gap by the electric field causing interactions with other electrons to create an electron avalanche which contacts the anode. The electron avalanche is detected and converted to an output pulse.

摘要翻译： 具有波长小于400nm（4000埃）的光子的微间隙紫外检测器，其包括由气体填充的间隙分隔开并具有横跨间隙的电场的阳极和阴极。 阳极或阴极对于紫外线都是半透明的。 当UV光子撞击阴极时，电子被电场排出并通过电场加速跨越间隙，引起与其他电子的相互作用以产生接触阳极的电子雪崩。 电子雪崩被检测并转换成输出脉冲。

公开(公告)号：US5308987A

公开(公告)日：1994-05-03

申请号：US11637

申请日：1993-02-01

申请人： Craig R. Wuest ,  Richard M. Bionta ,  Elden Ables

发明人： Craig R. Wuest ,  Richard M. Bionta ,  Elden Ables

IPC分类号： G01T1/29 ,  H01J47/02 ,  H01J47/10

CPC分类号： H01J47/02 ,  G01T1/2935

摘要： An x-ray detector which provides for the conversion of x-ray photons into photoelectrons and subsequent amplification of these photoelectrons through the generation of electron avalanches in a thin gas-filled region subject to a high electric potential. The detector comprises a cathode (photocathode) and an anode separated by the thin, gas-filled region. The cathode may comprise a substrate, such a beryllium, coated with a layer of high atomic number material, such as gold, while the anode can be a single conducting plane of material, such as gold, or a plane of resistive material, such as chromium/silicon monoxide, or multiple areas of conductive or resistive material, mounted on a substrate composed of glass, plastic or ceramic. The charge collected from each electron avalanche by the anode is passed through processing electronics to a point of use, such as an oscilloscope.

摘要翻译： 一种X射线检测器，其提供将X射线光子转换成光电子，并且随后通过在具有高电位的薄气体填充区域中产生电子雪崩而随后放大这些光电子。 检测器包括阴极（光电阴极）和由薄的气体填充区分隔的阳极。 阴极可以包括涂覆有诸如金的高原子序列材料层的基底，诸如铍，而阳极可以是诸如金的单一导电平面或电阻材料的平面，例如 铬/一氧化硅或导电或电阻材料的多个区域，安装在由玻璃，塑料或陶瓷组成的基底上。 由阳极从每个电子雪崩收集的电荷通过处理电子器件传递到诸如示波器的使用点。