公开(公告)号：US06788385B2

公开(公告)日：2004-09-07

申请号：US10134607

申请日：2002-04-30

申请人： Keiichi Tanaka ,  Michael Binnard ,  Robert Martinek ,  Andrew J. Hazelton

发明人： Keiichi Tanaka ,  Michael Binnard ,  Robert Martinek ,  Andrew J. Hazelton

IPC分类号： G03B2742

CPC分类号： G03F7/707 ,  G03F7/70708 ,  G03F7/70716 ,  G03F7/70733 ,  G03F7/70766 ,  G03F7/709

摘要： In a stage device of an exposure apparatus, a first stage is driven in the X-axis direction by a first X-axis motor while being supported at one side by a first guide bar, and a second stage is driven in the X-axis direction by a second X-axis motor while being supported at one side by a second guide bar. The first guide bar and the second guide bar are independently driven in the Y-axis direction by a Y-axis linear motor. In a state in which the first guide bar and the second guide bar are closest to each other, the end of the first stage opposite from the side supported by the first guide bar is placed above the second guide bar, and the end of the second stage opposite from the side supported by the second guide bar is placed above the first guide bar. First and second substrate tables are supported above the first and second stages, respectively, via first and second minutely driving devices. The above configuration of the stage device permits and restrains a change in attitude of each stage due to driving of the substrate table.

摘要翻译： 在曝光装置的舞台装置中，第一级通过第一X轴电动机沿X轴方向驱动，同时由第一导杆一侧支撑，并且第二级在X轴上被驱动 方向由第二X轴电机同时由第二引导杆一侧支撑。 第一导杆和第二导杆通过Y轴线性电动机在Y轴方向上独立地驱动。 在第一引导杆和第二引导杆彼此最靠近的状态下，与由第一引导杆支撑的一侧相对的第一级的端部设置在第二引导杆的上方，而第二引导杆的端部 与由第二导杆支撑的一侧相对的台架放置在第一导杆的上方。 第一和第二衬底台分别经由第一和第二微动驱动装置支撑在第一和第二级上方。 舞台装置的上述构造允许并且抑制由于衬底台的驱动而引起的每一级的姿态变化。