公开(公告)号：US06604849B2

公开(公告)日：2003-08-12

申请号：US09854114

申请日：2001-05-11

申请人： Bih-Tiao Lin ,  Meng-Feng Tsai ,  Rong Jye Jang ,  Kung-Teng Huang

发明人： Bih-Tiao Lin ,  Meng-Feng Tsai ,  Rong Jye Jang ,  Kung-Teng Huang

IPC分类号： B01F1102

CPC分类号： B24B37/04 ,  B01F5/0646 ,  B01F5/0647 ,  B01F5/12 ,  B01F7/00 ,  B01F11/0241 ,  B01F13/1027 ,  B01F15/00136 ,  B01F2003/0028 ,  B01F2003/105 ,  B24B1/04 ,  B24B57/02

摘要： A slurry dilution system with an ultrasonic vibrator capable of diluting slurry in-situ to any desired level of concentration is proposed. Raw slurry and the de-ionized water fed into the slurry dilution system is mixed and homogenized by an ultrasonic vibrator and a mixer. The well-mixed slurry solution is then delivered to a chemical-mechanical polishing station. When the chemical-mechanical station requires slurry of a different concentration, the raw slurry can be diluted to the desired level simply by changing the rate of flow of de-ionized water into the dilution system.