公开(公告)号：US20060172472A1

公开(公告)日：2006-08-03

申请号：US11395434

申请日：2006-03-30

申请人： Jeong-Young Lee ,  Se-Hwam Yu ,  Sang-Jin Jeon ,  Min-Wook Park

发明人： Jeong-Young Lee ,  Se-Hwam Yu ,  Sang-Jin Jeon ,  Min-Wook Park

IPC分类号： H01L29/04 ,  H01L21/84

CPC分类号： H01L27/12 ,  G02F1/13458 ,  G02F1/136286 ,  G02F1/1368 ,  G02F2001/136231 ,  G02F2001/13629 ,  H01L27/124 ,  H01L27/1288

摘要： A method of manufacturing a thin film transistor array panel is provided, which includes: forming a gate line on a substrate; depositing a gate insulating layer and a semiconductor layer in sequence on the gate line; depositing a lower conductive film and an upper conductive film on the semiconductor layer; photo-etching the upper conductive film, the lower conductive film, and the semiconductor layer; depositing a passivation layer; photo-etching the passivation layer to expose first and second portions of the upper conductive film; removing the first and the second portions of the upper conductive film to expose first and second portions of the lower conductive film; forming a pixel electrode on the first portion of the lower conductive film; removing the second portion of the lower conductive film to expose a portion of the semiconductor layer; and forming a columnar spacer on the exposed portion of the semiconductor layer.

摘要翻译： 提供一种制造薄膜晶体管阵列面板的方法，包括：在基板上形成栅极线; 在栅极线上依次沉积栅极绝缘层和半导体层; 在半导体层上沉积下导电膜和上导电膜; 对上导电膜，下导电膜和半导体层进行光蚀刻; 沉积钝化层; 对所述钝化层进行光蚀刻以暴露所述上导电膜的第一和第二部分; 去除上导电膜的第一和第二部分以暴露下导电膜的第一和第二部分; 在所述下导电膜的第一部分上形成像素电极; 去除下导电膜的第二部分以暴露半导体层的一部分; 以及在半导体层的暴露部分上形成柱状间隔物。