公开(公告)号：US6163145A

公开(公告)日：2000-12-19

申请号：US917922

申请日：1997-08-27

申请人： Hiromichi Yamada ,  Kunio Kobayashi ,  Sekio Ito ,  Eiri Yuhara ,  Shinji Semba ,  Jiro Takamura ,  Shinji Sogabe ,  Hiroyuki Shinmen ,  Mitsuru Yamazaki

发明人： Hiromichi Yamada ,  Kunio Kobayashi ,  Sekio Ito ,  Eiri Yuhara ,  Shinji Semba ,  Jiro Takamura ,  Shinji Sogabe ,  Hiroyuki Shinmen ,  Mitsuru Yamazaki

IPC分类号： G01R31/26 ,  G01R1/067 ,  G01R1/04 ,  B65G59/02 ,  G01R31/02

CPC分类号： G01R1/06705

摘要： A transporting apparatus used in testing a plurality of semiconductor devices includes a magazine in which a plurality of pallets are stacked in plural stages, each pallet with a plurality of semiconductor device placed thereon; a distributing stocker mechanism for placing the plurality of pallets in the magazine onto a carrier; a carrier transporting mechanism for transporting the carrier into a test station in a constant temperature room and transporting the carrier after to outside the constant temperature room; and a recovery stocker mechanism for recovering the plurality of pallets after test on the carrier into the magazine. Thus, the transporting apparatus with high installing area efficiency and high test efficiency can be fabricated at low production cost.

摘要翻译： 用于测试多个半导体器件的传送装置包括多个托盘以多个层叠的盒子，每个托盘上放置有多个半导体器件; 用于将所述多个托盘放置在所述盒中的分配储存器机构到载体上; 载体输送机构，用于将载体输送到恒温室内的试验台，并将载体运送到恒温室外; 以及回收储存器机构，用于在载体上测试之后将多个托盘回收到料盒中。 因此，可以以低生产成本制造具有高安装面积效率和高测试效率的输送装置。