公开(公告)号：US20140037849A1

公开(公告)日：2014-02-06

申请号：US13953982

申请日：2013-07-30

申请人： Sung-Joong Joo ,  You-Min Cha ,  Seuk-Hwan Park

发明人： Sung-Joong Joo ,  You-Min Cha ,  Seuk-Hwan Park

IPC分类号： B05B12/00

CPC分类号： B05B12/00 ,  C23C14/04 ,  C23C14/545

摘要： A deposition apparatus may uniformly control deposited quantities of a plurality of depositing sources by efficiently determining an abnormal depositing source. The deposition apparatus may reduce loss of materials by exactly determining an abnormal depositing source. The deposition apparatus includes: a plurality of depositing sources spraying a deposition material; a substrate holder fixing a substrate to face the depositing source; a depositing source shutter disposed at one side of the depositing source and opening and closing an passage of each depositing source; and a main shutter disposed between the depositing source and the substrate fixed to the substrate holder and depositing a part of the deposition material on the substrate through the main shutter.

摘要翻译： 沉积设备可以通过有效地确定异常沉积源来均匀地控制多个沉积源的沉积量。 沉积装置可以通过精确地确定异常沉积源来减少材料损失。 沉积设备包括：多个沉积源喷涂沉积材料; 固定衬底以面对沉积源的衬底保持器; 设置在所述沉积源的一侧并且打开和关闭每个沉积源的通道的沉积源快门; 以及主快门，其设置在所述沉积源和固定到所述基板保持器的所述基板之间，并且通过所述主快门将所述沉积材料的一部分沉积在所述基板上。

公开(公告)号：US08123863B2

公开(公告)日：2012-02-28

申请号：US12230803

申请日：2008-09-04

申请人： Kyung-Hoon Chung ,  Seuk-Hwan Park ,  Yoon-Sang Kwon

发明人： Kyung-Hoon Chung ,  Seuk-Hwan Park ,  Yoon-Sang Kwon

IPC分类号： C23C16/00

CPC分类号： C23C14/50

摘要： An evaporation apparatus is capable of preventing a sag phenomenon in a substrate. The evaporation apparatus includes a substrate supporting unit. The substrate supporting unit includes a substrate supporter for supporting side walls of a substrate in a chamber toward the same direction as an intake direction of the substrate entering the chamber; and a substrate-aiding supporter for supporting other side walls of the substrate that are not supported by the substrate supporter.

摘要翻译： 蒸发装置能够防止基板中的下垂现象。 蒸发装置包括基板支撑单元。 基板支撑单元包括：基板支撑件，用于支撑沿着与进入所述室的基板的进入方向相同的方向的室中的基板的侧壁; 以及用于支撑衬底的其他侧壁的衬底辅助支撑件，其不由衬底支撑件支撑。

公开(公告)号：US08574367B2

公开(公告)日：2013-11-05

申请号：US11723707

申请日：2007-03-21

申请人： Seuk Hwan Park ,  Kyung Hoon Chung ,  Yoon Sang Kwon ,  Kyong Tae Yu ,  Hyung Min Kim

发明人： Seuk Hwan Park ,  Kyung Hoon Chung ,  Yoon Sang Kwon ,  Kyong Tae Yu ,  Hyung Min Kim

IPC分类号： C23C16/00

CPC分类号： C23C14/12 ,  C23C14/243

摘要： In an evaporation source, a separable heater is used when an organic thin film is formed on a substrate in order to realize full-colors so that it is possible to correspond to crucibles of various capacities. The evaporation source comprises a crucible in which an organic material which is an organic thin film material is accommodated, and the crucible includes a heating unit and at least one spray nozzle for spraying the organic material onto a substrate. In the heating unit, a heater divided into at least two parts is provided on the external surface of the crucible at uniform intervals, and the heaters are separately disposed with respect to each other, but are connected to each other by connecting members. Therefore, it is not necessary to perform an additional design whenever the capacity of the crucible is changed, it is not necessary to exchange the evaporation source, and it is possible to reduce cost and to improve repairing ability.

摘要翻译： 在蒸发源中，当在基板上形成有机薄膜以实现全色时，可以使用可分离的加热器，从而可以对应于各种容量的坩埚。 蒸发源包括坩埚，其中容纳有机材料作为有机薄膜材料，并且坩埚包括加热单元和用于将有机材料喷射到基底上的至少一个喷嘴。 在加热单元中，以均匀的间隔在坩埚的外表面上设置分为至少两部分的加热器，并且加热器彼此分开设置，但是通过连接构件彼此连接。 因此，只要坩埚的容量变化，就不需要进行额外的设计，不需要更换蒸发源，可以降低成本，提高修理能力。

公开(公告)号：US20070283890A1

公开(公告)日：2007-12-13

申请号：US11723707

申请日：2007-03-21

申请人： Seuk Hwan Park ,  Kyung Hoon Chung ,  Yoon Sang Kwon ,  Kyong Tae Yu ,  Hyung Min Kim

发明人： Seuk Hwan Park ,  Kyung Hoon Chung ,  Yoon Sang Kwon ,  Kyong Tae Yu ,  Hyung Min Kim

IPC分类号： C23C16/00

CPC分类号： C23C14/12 ,  C23C14/243

摘要： In an evaporation source, a separable heater is used when an organic thin film is formed on a substrate in order to realize full-colors so that it is possible to correspond to crucibles of various capacities. The evaporation source comprises a crucible in which an organic material which is an organic thin film material is accommodated, and the crucible includes a heating unit and at least one spray nozzle for spraying the organic material onto a substrate. In the heating unit, a heater divided into at least two parts is provided on the external surface of the crucible at uniform intervals, and the heaters are separately disposed with respect to each other, but are connected to each other by connecting members. Therefore, it is not necessary to perform an additional design whenever the capacity of the crucible is changed, it is not necessary to exchange the evaporation source, and it is possible to reduce cost and to improve repairing ability.

摘要翻译： 在蒸发源中，当在基板上形成有机薄膜以实现全色时，可以使用可分离的加热器，从而可以对应于各种容量的坩埚。 蒸发源包括坩埚，其中容纳有机材料作为有机薄膜材料，并且坩埚包括加热单元和用于将有机材料喷射到基底上的至少一个喷嘴。 在加热单元中，以均匀的间隔在坩埚的外表面上设置分为至少两部分的加热器，并且加热器彼此分开设置，但是通过连接构件彼此连接。 因此，只要坩埚的容量变化，就不需要进行额外的设计，不需要更换蒸发源，可以降低成本，提高修理能力。

公开(公告)号：US20090081364A1

公开(公告)日：2009-03-26

申请号：US12230803

申请日：2008-09-04

申请人： Kyung-Hoon Chung ,  Seuk-Hwan Park ,  Yoon-Sang Kwon

发明人： Kyung-Hoon Chung ,  Seuk-Hwan Park ,  Yoon-Sang Kwon

IPC分类号： C23C16/44 ,  C23C16/54

CPC分类号： C23C14/50

摘要： An evaporation apparatus is capable of preventing a sag phenomenon in a substrate. The evaporation apparatus includes a substrate supporting unit. The substrate supporting unit includes a substrate supporter for supporting side walls of a substrate in a chamber toward the same direction as an intake direction of the substrate entering the chamber; and a substrate-aiding supporter for supporting other side walls of the substrate that are not supported by the substrate supporter.

摘要翻译： 蒸发装置能够防止基板中的下垂现象。 蒸发装置包括基板支撑单元。 基板支撑单元包括：基板支撑件，用于支撑沿着与进入所述室的基板的进入方向相同的方向的室中的基板的侧壁; 以及用于支撑衬底的其他侧壁的衬底辅助支撑件，其不由衬底支撑件支撑。