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公开(公告)号:US07709807B2
公开(公告)日:2010-05-04
申请号:US12116522
申请日:2008-05-07
IPC分类号: H05H3/00
CPC分类号: H01J37/08 , H01J27/24 , H01J2237/0815 , H01J2237/31749
摘要: A system and method are disclosed for producing a source of ions, and particularly, a focused ion beam. The system and method use a magneto-optical trap (MOT) to produce a population of neutral atoms. A laser is then utilized to ionize atoms and produce a population of ions. An extraction element is then used to transfer the ions so that they can be used in a wide array of applications.
摘要翻译: 公开了用于产生离子源,特别是聚焦离子束的系统和方法。 该系统和方法使用磁光阱(MOT)产生一群中性原子。 然后利用激光离子化原子并产生离子群。 然后使用提取元件转移离子,使得它们可以用于广泛的应用中。
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公开(公告)号:US20080296483A1
公开(公告)日:2008-12-04
申请号:US12116522
申请日:2008-05-07
CPC分类号: H01J37/08 , H01J27/24 , H01J2237/0815 , H01J2237/31749
摘要: A system and method are disclosed for producing a source of ions, and particularly, a focused ion beam. The system and method use a magneto-optical trap (MOT) to produce a population of neutral atoms. A laser is then utilized to ionize atoms and produce a population of ions. An extraction element is then used to transfer the ions so that they can be used in a wide array of applications.
摘要翻译: 公开了用于产生离子源,特别是聚焦离子束的系统和方法。 该系统和方法使用磁光阱(MOT)产生一群中性原子。 然后利用激光离子化原子并产生离子群。 然后使用提取元件转移离子,使得它们可以用于广泛的应用中。
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