公开(公告)号：US20100163725A1

公开(公告)日：2010-07-01

申请号：US12523287

申请日：2008-01-14

申请人： Ian Richard Barkshire ,  Peter John Statham ,  Marcus Jacka

发明人： Ian Richard Barkshire ,  Peter John Statham ,  Marcus Jacka

IPC分类号： H01J37/28 ,  H01J37/12 ,  H01J47/00 ,  G01N23/22

CPC分类号： H01J37/05 ,  H01J37/256 ,  H01J37/28 ,  H01J49/488 ,  H01J2237/053 ,  H01J2237/24415 ,  H01J2237/2448 ,  H01J2237/24485 ,  H01J2237/2449 ,  H01J2237/24585 ,  H01J2237/2516

摘要： A charged particle analyser (1) comprises a first non-imaging electrostatic lens (8, 9) for receiving charged particles having divergent, trajectories and for converting the said trajectories into substantially parallel trajectories. At least one planar filter (10) is provided for receiving the charged particles having the substantially parallel trajectories and for filtering the charged particles in accordance with their respective energies. A second non-imaging electrostatic lens (11) receives the energy filtered charged particles and selectively modifies their trajectories as a function of their energies. A charged particle detector (12) then receives the charged particles in accordance with their selectively modified trajectories.

摘要翻译： 带电粒子分析仪（1）包括用于接收具有发散轨迹的带电粒子并用于将所述轨迹转换成基本上平行轨迹的第一非成像静电透镜（8,9）。 提供至少一个平面过滤器（10）用于接收具有基本上平行轨迹的带电粒子并根据它们各自的能量对带电粒子进行过滤。 第二非成像静电透镜（11）接收能量过滤的带电粒子并根据其能量选择性地修改它们的轨迹。 带电粒子检测器（12）然后根据它们选择性地修改的轨迹接收带电粒子。

公开(公告)号：US20050230620A1

公开(公告)日：2005-10-20

申请号：US10518660

申请日：2003-06-13

申请人： Marcus Jacka ,  Martin Zadrazil ,  Filip Lopour

发明人： Marcus Jacka ,  Martin Zadrazil ,  Filip Lopour

IPC分类号： H01J37/244 ,  G01N23/00

CPC分类号： H01J37/244

摘要： The present invention deals with a secondary electron detector (1), especially in a scanning electron microscope. The subject matter of the invention provides a secondary electrons detector (1) constituted by a sensor (2) located in a detector chamber (3), to which a vacuum air pump (10) is connected to produce vacuum inside the detector chamber (3), the detector chamber (3) being in its wall near to the active surface of the sensor (2) enclosed with a diaphragm featuring high resistance to the transmission of gas and low resistance to the transmission of the electrons. The electrically conductive grid (11) is produced either in the form of a copper screen or as a kapton membrane (12) with orifices (13) and it is equipped on both sides with conductive coating (14, 15). Outside the detector chamber (3), the electrically conductive grid (11) is covered with an input screen (18), which is usually of hemispherical shape and is connected to the low voltage source (19) of 80 to 150 V.

摘要翻译： 本发明涉及二次电子检测器（1），特别是在扫描电子显微镜中。 本发明的主题提供了由位于检测器室（3）中的传感器（2）构成的二次电子检测器（1），真空气泵（10）连接到传感器（2），以在检测器室（3）内产生真空 ），检测器室（3）处于其靠近传感器（2）的有源表面的壁中，该膜被膜片包围，该膜片具有对气体透过的高阻力和对电子传输的低电阻。 导电栅格（11）以铜屏幕或具有孔口（13）的卡波膜（12）的形式产生，并且在两侧配备有导电涂层（14,15）。 在检测器室（3）的外部，导电栅格（11）被输入屏幕（18）覆盖，输入屏幕通常为半球形，并连接到80至150V的低电压源（19）。

公开(公告)号：US08421027B2

公开(公告)日：2013-04-16

申请号：US12523287

申请日：2008-01-14

申请人： Ian Richard Barkshire ,  Peter John Statham ,  Marcus Jacka

发明人： Ian Richard Barkshire ,  Peter John Statham ,  Marcus Jacka

IPC分类号： H01J3/26

CPC分类号： H01J37/05 ,  H01J37/256 ,  H01J37/28 ,  H01J49/488 ,  H01J2237/053 ,  H01J2237/24415 ,  H01J2237/2448 ,  H01J2237/24485 ,  H01J2237/2449 ,  H01J2237/24585 ,  H01J2237/2516

摘要： A charged particle analyzer (1) comprises a first non-imaging electrostatic lens (8, 9) for receiving charged particles having divergent, trajectories and for converting the said trajectories into substantially parallel trajectories. At least one planar filter (10) is provided for receiving the charged particles having the substantially parallel trajectories and for filtering the charged particles in accordance with their respective energies. A second non-imaging electrostatic lens (11) receives the energy filtered charged particles and selectively modifies their trajectories as a function of their energies. A charged particle detector (12) then receives the charged particles in accordance with their selectively modified trajectories.

摘要翻译： 带电粒子分析仪（1）包括用于接收具有发散轨迹的带电粒子并用于将所述轨迹转换成基本上平行轨迹的第一非成像静电透镜（8,9）。 提供至少一个平面过滤器（10）用于接收具有基本上平行轨迹的带电粒子并根据它们各自的能量对带电粒子进行过滤。 第二非成像静电透镜（11）接收能量过滤的带电粒子并根据其能量选择性地修改它们的轨迹。 带电粒子检测器（12）然后根据它们选择性地修改的轨迹接收带电粒子。

公开(公告)号：US07709807B2

公开(公告)日：2010-05-04

申请号：US12116522

申请日：2008-05-07

申请人： Jabez J. McClelland ,  James L. Hanssen ,  Marcus Jacka ,  Shannon B. Hill

发明人： Jabez J. McClelland ,  James L. Hanssen ,  Marcus Jacka ,  Shannon B. Hill

IPC分类号： H05H3/00

CPC分类号： H01J37/08 ,  H01J27/24 ,  H01J2237/0815 ,  H01J2237/31749

摘要： A system and method are disclosed for producing a source of ions, and particularly, a focused ion beam. The system and method use a magneto-optical trap (MOT) to produce a population of neutral atoms. A laser is then utilized to ionize atoms and produce a population of ions. An extraction element is then used to transfer the ions so that they can be used in a wide array of applications.

摘要翻译： 公开了用于产生离子源，特别是聚焦离子束的系统和方法。 该系统和方法使用磁光阱（MOT）产生一群中性原子。 然后利用激光离子化原子并产生离子群。 然后使用提取元件转移离子，使得它们可以用于广泛的应用中。

公开(公告)号：US20080296483A1

公开(公告)日：2008-12-04

申请号：US12116522

申请日：2008-05-07

申请人： Jabez J. McClelland ,  James L. Hanssen ,  Marcus Jacka ,  Shannon B. Hill

发明人： Jabez J. McClelland ,  James L. Hanssen ,  Marcus Jacka ,  Shannon B. Hill

IPC分类号： H01J27/24 ,  H05H3/02

CPC分类号： H01J37/08 ,  H01J27/24 ,  H01J2237/0815 ,  H01J2237/31749

摘要： A system and method are disclosed for producing a source of ions, and particularly, a focused ion beam. The system and method use a magneto-optical trap (MOT) to produce a population of neutral atoms. A laser is then utilized to ionize atoms and produce a population of ions. An extraction element is then used to transfer the ions so that they can be used in a wide array of applications.

摘要翻译： 公开了用于产生离子源，特别是聚焦离子束的系统和方法。 该系统和方法使用磁光阱（MOT）产生一群中性原子。 然后利用激光离子化原子并产生离子群。 然后使用提取元件转移离子，使得它们可以用于广泛的应用中。

公开(公告)号：US07193222B2

公开(公告)日：2007-03-20

申请号：US10518660

申请日：2003-06-13

申请人： Marcus Jacka ,  Martin Zadrazil ,  Filip Lopour

发明人： Marcus Jacka ,  Martin Zadrazil ,  Filip Lopour

IPC分类号： G01N23/00

CPC分类号： H01J37/244

摘要： The present invention deals with a secondary electron detector (1), especially in a scanning electron microscope. The subject matter of the invention provides a secondary electrons detector (1) constituted by a sensor (2) located in a detector chamber (3), to which a vacuum air pump (10) is connected to produce vacuum inside the detector chamber (3), the detector chamber (3) being in its wall near to the active surface of the sensor (2) enclosed with a diaphragm featuring high resistance to the transmission of gas and low resistance to the transmission of the electrons. The electrically conductive grid (11) is produced either in the form of a copper screen or as a kapton membrane (12) with orifices (13) and it is equipped on both sides with conductive coating (14, 15). Outside the detector chamber (3), the electrically conductive grid (11) is covered with an input screen (18), which is usually of hemispherical shape and is connected to the low voltage source (19) of 80 to 150 V.

摘要翻译： 本发明涉及二次电子检测器（1），特别是在扫描电子显微镜中。 本发明的主题提供了由位于检测器室（3）中的传感器（2）构成的二次电子检测器（1），真空气泵（10）连接到传感器（2），以在检测器室（3）内产生真空 ），检测器室（3）处于其靠近传感器（2）的有源表面的壁中，该膜被膜片包围，该膜片具有对气体透过的高阻力和对电子传输的低电阻。 导电栅格（11）以铜屏幕或具有孔口（13）的卡波膜（12）的形式产生，并且其两侧配备有导电涂层（14,15）。 在检测器室（3）的外部，导电栅格（11）被输入屏幕（18）覆盖，输入屏幕通常为半球形，并连接到80至150V的低电压源（19）。