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公开(公告)号：US07387859B2
公开(公告)日：2008-06-17
申请号：US10892119
申请日：2004-07-16
申请人： Steffen Gerlach
发明人： Steffen Gerlach
IPC分类号： G03F9/00
CPC分类号： G03F7/70633 , G03F9/7076 , H01L21/67259
摘要： A method for measuring overlay shift is disclosed. An image is acquired of at least one reference element that comprises at least one first pattern element in a first plane and at least one second pattern element in a second plane. An image of a measurement element is likewise acquired. The shift value between the reference element and measurement element is ascertained by comparing the image of the reference element with the image of the measurement element. An output on a user interface indicates whether a predefined tolerance value is being exceeded.
摘要翻译： 公开了一种用于测量重叠位移的方法。 获取至少一个参考元件的图像，所述参考元件包括第一平面中的至少一个第一图案元素和第二平面中的至少一个第二图案元素。 同样获取测量元件的图像。 通过将参考元件的图像与测量元件的图像进行比较来确定参考元件和测量元件之间的偏移值。 用户界面上的输出指示是否超过预定义的公差值。
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2.发明授权Detecting defects by three-way die-to-die comparison with false majority determination 有权通过与多数确定的三次模 - 对数比较来检测缺陷公开(公告)号：US07657077B2
公开(公告)日：2010-02-02
申请号：US11364103
申请日：2006-02-28
CPC分类号： G06T7/001 , G01N21/95607 , G06T2207/30148
摘要： A method of determining defects in a plurality of images having essentially the same image contents is disclosed. A comparison operation is carried out once three fully comparable images having essentially the same image contents are present in the intermediate memory. The stored individual images are accessed randomly. A paired comparison operation between the three difference images is carried out.
摘要翻译： 公开了一种确定具有基本上相同图像内容的多个图像中的缺陷的方法。 一旦在中间存储器中存在具有基本上相同的图像内容的三个完全可比的图像，则进行比较操作。 存储的各个图像被随机访问。 执行三个差分图像之间的配对比较操作。
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公开(公告)号：US20050037270A1
公开(公告)日：2005-02-17
申请号：US10892119
申请日：2004-07-16
申请人： Steffen Gerlach
发明人： Steffen Gerlach
CPC分类号： G03F7/70633 , G03F9/7076 , H01L21/67259
摘要： A method for measuring overlay shift is disclosed. An image is acquired of at least one reference element that comprises at least one first pattern element in a first plane and at least one second pattern element in a second plane. An image of a measurement element is likewise acquired. The shift value between the reference element and measurement element is ascertained by comparing the image of the reference element with the image of the measurement element. An output on a user interface indicates whether a predefined tolerance value is being exceeded.
摘要翻译： 公开了一种用于测量重叠位移的方法。 获取至少一个参考元件的图像，所述参考元件包括第一平面中的至少一个第一图案元素和第二平面中的至少一个第二图案元素。 同样获取测量元件的图像。 通过将参考元件的图像与测量元件的图像进行比较来确定参考元件和测量元件之间的偏移值。 用户界面上的输出指示是否超过预定义的公差值。
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公开(公告)号：US20060204109A1
公开(公告)日：2006-09-14
申请号：US11364103
申请日：2006-02-28
CPC分类号： G06T7/001 , G01N21/95607 , G06T2207/30148
摘要： A method of determining defects in a plurality of images having essentially the same image contents is disclosed. A comparison operation is carried out once three fully comparable images having essentially the same image contents are present in the intermediate memory. The stored individual images are accessed randomly. A paired comparison operation between the three difference images is carried out.
摘要翻译： 公开了一种确定具有基本上相同图像内容的多个图像中的缺陷的方法。 一旦在中间存储器中存在具有基本上相同的图像内容的三个完全可比的图像，则进行比较操作。 存储的各个图像被随机访问。 执行三个差分图像之间的配对比较操作。
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