公开(公告)号：US20050245739A1

公开(公告)日：2005-11-03

申请号：US11116265

申请日：2005-04-28

申请人： Hitoshi Fukushima ,  Hiroshi Takiguchi ,  Tatsuya Shimoda ,  Takashi Masuda ,  Richard Bushby ,  Stephan Evans ,  J.P. Jeyadevan ,  Kevin Critchley

发明人： Hitoshi Fukushima ,  Hiroshi Takiguchi ,  Tatsuya Shimoda ,  Takashi Masuda ,  Richard Bushby ,  Stephan Evans ,  J.P. Jeyadevan ,  Kevin Critchley

IPC分类号： C07D207/40 ,  C07D207/404 ,  G03F7/004 ,  G03F7/16 ,  C07D487/04

CPC分类号： C07D207/404 ,  B82Y30/00 ,  G03F7/0045 ,  G03F7/165 ,  Y10S430/116 ,  Y10S430/136

摘要： Aspects of the invention provide a method of controlling the solid-state property of the solid-phase surface or controlling forming reactive region. The method can be attained by using a device for ejecting droplets and a molecule for inclusion in a SAM which can be photo-patterned in a short period of time using low energy UV radiation, that is TV radiation having a relatively long wavelength. The invention can provide monomolecular film that is formed from molecules comprising a structural component (B) which is hydrophobic and/or lipophobic, and a structural component (A) which decomposes when irradiated with UV light having a wavelength in the range 254-400 nm to cleave away a part of the molecule having the structural component (B) leaving a residual hydrophilic structural component (C). Further, the invention can provide a method of forming a film pattern comprising; at least a step of ejecting a droplet, which includes a compound represented as the following Formula (0), on a solid-phase surface having a functional moiety: X—Y—Z   (0) where, X represents a structure having reactivity to a functional moiety which exists at the solid-phase surface, Y represents a decomposable structure by itself and Z represents a structure which is capable of changing solid-state properties on the solid-phase surface or a reactive structure.

摘要翻译： 本发明的方面提供了一种控制固相表面的固态特性或控制成形反应区的方法。 该方法可以通过使用用于喷射液滴的装置和用于包含在SAM中的分子来实现，该SAM可以使用低能量UV辐射（即具有相对长的波长的电视辐射）在短时间内进行光刻图案化。 本发明可以提供由分子构成的单分子膜，该分子包含疏水性和/或疏水性的结构成分（B）和当波长为254-400nm的紫外线照射时分解的结构成分（A） 以除去具有结构组分（B）的分子的一部分，留下残留的亲水结构组分（C）。 此外，本发明可以提供一种形成膜图案的方法，包括： 在具有功能部分的固相表面上至少喷射包含下述式（0）表示的化合物的液滴的步骤：<？in-line-formula description =“In-line Formulas”end = “lead”？> XYZ（0）<？in-line-formula description =“In-line Formulas”end =“tail”？>其中，X表示与固相存在的功能部分具有反应性的结构 表面，Y表示本身可分解的结构，Z表示能够改变固相表面或反应性结构的固态性质的结构。

公开(公告)号：US07479362B2

公开(公告)日：2009-01-20

申请号：US11116265

申请日：2005-04-28

申请人： Hitoshi Fukushima ,  Hiroshi Takiguchi ,  Tatsuya Shimoda ,  Takashi Masuda ,  Richard James Bushby ,  Stephan Evans ,  J.P. Jeyadevan ,  Kevin Critchley

发明人： Hitoshi Fukushima ,  Hiroshi Takiguchi ,  Tatsuya Shimoda ,  Takashi Masuda ,  Richard James Bushby ,  Stephan Evans ,  J.P. Jeyadevan ,  Kevin Critchley

IPC分类号： G03F7/00 ,  G03F7/004

CPC分类号： C07D207/404 ,  B82Y30/00 ,  G03F7/0045 ,  G03F7/165 ,  Y10S430/116 ,  Y10S430/136

摘要： Aspects of the invention provide a method of controlling the solid-state property of the solid-phase surface or controlling forming reactive region. The method can be attained by using a device for ejecting droplets and a molecule for inclusion in a SAM which can be photo-patterned in a short period of time using low energy UV radiation, that is TV radiation having a relatively long wavelength. The invention can provide monomolecular film that is formed from molecules comprising a structural component (B) which is hydrophobic and/or lipophobic, and a structural component (A) which decomposes when irradiated with UV light having a wavelength in the range 254-400 nm to cleave away a part of the molecule having the structural component (B) leaving a residual hydrophilic structural component (C). Further, the invention can provide a method of forming a film pattern comprising; at least a step of ejecting a droplet, which includes a compound represented as the following Formula (0), on a solid-phase surface having a functional moiety: X—Y-Z   (0) where, X represents a structure having reactivity to a functional moiety which exists at the solid-phase surface, Y represents a decomposable structure by itself and Z represents a structure which is capable of changing solid-state properties on the solid-phase surface or a reactive structure.

摘要翻译： 本发明的方面提供了一种控制固相表面的固态特性或控制成形反应区的方法。 该方法可以通过使用用于喷射液滴的装置和用于包含在SAM中的分子来实现，该SAM可以使用低能量UV辐射（即具有相对长的波长的电视辐射）在短时间内进行光刻图案化。 本发明可以提供由分子构成的单分子膜，该分子包含疏水性和/或疏水性的结构成分（B）和当波长为254-400nm的紫外线照射时分解的结构成分（A） 以除去具有结构组分（B）的分子的一部分，留下残留的亲水结构组分（C）。 此外，本发明可以提供一种形成膜图案的方法，包括： 在具有功能部分的固相表面上至少喷射包含下述式（0）表示的化合物的液滴的步骤：<？in-line-formula description =“In-line Formulas”end = “lead”？> XYZ（0）<？in-line-formula description =“In-line Formulas”end =“tail”？>其中，X表示与固相存在的功能部分具有反应性的结构 表面，Y表示本身可分解的结构，Z表示能够改变固相表面或反应性结构的固态性质的结构。