公开(公告)号：US08020692B2

公开(公告)日：2011-09-20

申请号：US11325465

申请日：2006-01-05

申请人： Sung Wha Jung ,  Min Jeong Hwang

发明人： Sung Wha Jung ,  Min Jeong Hwang

IPC分类号： B65G1/133

CPC分类号： H01L21/67751 ,  B65G1/133

摘要： An apparatus for transferring an upright tray at high speeds that can sense an entrance and discharge of the tray. The apparatus includes a transferring unit with pulleys driven by a driving source to form a transferring path. The pulleys contact a fixing member, which is attached to a lower edge of a substrate and mask fixed to the tray. The apparatus also includes a sensing unit with a sensor installed beneath the transferring path to detect the entrance and discharge of the tray. The apparatus may also include rollers disposed to contact both sides of the upper portion of the tray, and the rollers may be coupled with moveable members encased within rails along the transferring path so that the rollers can translate when a tray passes between two rollers. The rollers along both sides of the tray can be arranged symmetrically or alternately in a zigzag pattern.

摘要翻译： 一种用于高速传送直立托盘的装置，其可感测托盘的进入和排出。 该装置包括一转印单元，该转印单元具有由驱动源驱动的带轮，以形成转印路径。 滑轮接触固定构件，固定构件附接到基板的下边缘并且掩模固定到托盘。 该装置还包括感测单元，其具有安装在传送路径下方的传感器，以检测托盘的进入和排出。 该设备还可以包括设置成接触托盘上部两侧的滚子，并且滚子可与沿着传送路径包围在轨道内的可移动部件联接，使得当托盘通过两个滚筒之间时，辊可以平移。 沿托盘两侧的辊可以以锯齿形图案对称地或交替地布置。

公开(公告)号：US07486397B2

公开(公告)日：2009-02-03

申请号：US11324247

申请日：2006-01-04

申请人： Sung Wha Jung ,  Sang Jin Han ,  Eu Gene Kang

发明人： Sung Wha Jung ,  Sang Jin Han ,  Eu Gene Kang

IPC分类号： G01B11/00 ,  G01B9/02

CPC分类号： G03F9/7038 ,  G03F7/70791 ,  G03F9/7088

摘要： A device for aligning a substrate and a mask, and a method using the same, where the device includes aligning marks in unused portions of the substrate and the mask, a sensing unit for determining overlap of the aligning marks when the substrate is aligned with the mask, and a control unit for controlling an aligning process to be repeated on the basis of data sensed and determined by the sensing unit. The sensing unit may include a camera positioned in photographic range to determine any alignment error in the alignment marks. According to another embodiment of the present invention, the alignment error between the substrate and the mask is sensed to determine whether it is acceptable or not. When the alignment error is unacceptable, the operations for aligning the substrate with the mask are repeated until the alignment error is acceptable.

摘要翻译： 用于对准衬底和掩模的装置及其使用方法，其中所述装置包括对准所述衬底和所述掩模的未使用部分中的标记;感测单元，用于当所述衬底与所述掩模对准时确定所述对准标记的重叠 掩模和控制单元，用于基于由感测单元感测和确定的数据来控制要重复的对准处理。 感测单元可以包括位于照相范围中的摄像机，以确定对准标记中的任何对准误差。 根据本发明的另一实施例，感测基板和掩模之间的对准误差以确定其是否可接受。 当对准误差不可接受时，重复对准衬底与掩模的操作，直到对准误差是可接受的。

公开(公告)号：US07744328B2

公开(公告)日：2010-06-29

申请号：US11324609

申请日：2006-01-04

申请人： Sung Wha Jung ,  Sang Jin Han ,  Eu Gene Kang

发明人： Sung Wha Jung ,  Sang Jin Han ,  Eu Gene Kang

IPC分类号： B65G53/46

CPC分类号： C23C14/042

摘要： An apparatus for aligning a tray and tray holder, including a vertically positioned tray formed with coupling holes and a tray holder having coupling arms to couple with the coupling holes, and to prevent the bending of the tray and the tray holder. The tray includes a substrate frame that can receive a substrate, and the tray holder is coupled with a drive shaft for transferring the tray in the vertical position to a mask for vapor deposition. One end of a plurality of guide shafts securely contacts the rear side of the tray holder to prevent bending of the tray holder. The tray can have magnetic attaching members and the tray holder can have supporting members corresponding to the attaching members. The supporting members can magnetically couple with the attaching members in a position determined by corresponding grooves or protrusions to align the tray and tray holder.

摘要翻译： 用于对准托盘和托盘保持器的装置，包括形成有联接孔的垂直定位的托盘和具有联接臂以与联接孔联接的托盘保持器，并且防止托盘和托盘托架的弯曲。 托盘包括可接收基底的基底框架，并且托盘保持器与用于将托盘在垂直位置转移到用于气相沉积的掩模的驱动轴联接。 多个引导轴的一端牢固地接触托盘保持器的后侧，以防止托架保持器的弯曲。 托盘可以具有磁性附接构件，并且托盘保持器可以具有对应于附接构件的支撑构件。 支撑构件可以通过相应的凹槽或突出部分确定的位置与附接构件磁耦合，以对准托盘和托盘支架。

公开(公告)号：US08366832B2

公开(公告)日：2013-02-05

申请号：US11324346

申请日：2006-01-04

申请人： Sung Wha Jung ,  Eu Gene Kang

发明人： Sung Wha Jung ,  Eu Gene Kang

IPC分类号： C23C16/00

CPC分类号： C30B23/002 ,  C23C14/042 ,  C23C14/24 ,  C30B29/54

摘要： Apparatus for a deposition system includes a sealing apparatus that seals the drive shaft from the deposition material to prevent the deposition material from adhering to the drive shaft, a moving apparatus to reduce the weight of a shelf on the drive shaft, and a collision-preventing apparatus that measures the distance between a shelf and an adjacent article.

摘要翻译： 用于沉积系统的装置包括密封装置，其将驱动轴与沉积材料密封以防止沉积材料粘附到驱动轴上，移动装置减小驱动轴上的搁架的重量和防碰撞 测量货架和相邻物品之间距离的装置。