Abstract:
A microelectromechanical (MEMS) nanoindenter transducer including a body, a probe coupled to and moveable relative to the body, the probe holding a removeable indenter tip, a first micromachined comb drive and a second micromachined comb drive. The first micromachined comb drive includes an actuator comprising a plurality of electrostatic capacitive actuators configured to drive the probe along a first axis, including in an indentation direction, in response to an applied bias voltage, and a displacement sensor comprising a plurality of differential capacitive sensors having capacitance levels which together are representative of a position of the probe relative to the first axis. The second micromachined comb drive includes an actuator comprising a plurality of electrostatic capacitive actuators configured to drive the probe along a second axis, which is perpendicular to the first axis, in response to an applied bias voltage, and a displacement sensor comprising a plurality of differential capacitive sensors having capacitance levels which together are representative of a position of the probe relative to the second axis. Each of the electrostatic capacitive actuators and the differential capacitive sensors comprises an electrode comb pair, each electrode comb pair including a fixed electrode comb coupled to the body and a moveable electrode comb coupled to the probe.
Abstract:
An actuatable capacitive transducer including a transducer body, a first capacitor including a displaceable electrode and electrically configured as an electrostatic actuator, and a second capacitor including a displaceable electrode and electrically configured as a capacitive displacement sensor, wherein the second capacitor comprises a multi-plate capacitor. The actuatable capacitive transducer further includes a coupling shaft configured to mechanically couple the displaceable electrode of the first capacitor to the displaceable electrode of the second capacitor to form a displaceable electrode unit which is displaceable relative to the transducer body, and an electrically-conductive indenter mechanically coupled to the coupling shaft so as to be displaceable in unison with the displaceable electrode unit.
Abstract:
A micromachined or microelectromechanical system (MEMS) based push-to-pull mechanical transformer for tensile testing of micro-to-nanometer scale material samples including a first structure and a second structure. The second structure is coupled to the first structure by at least one flexible element that enables the second structure to be moveable relative to the first structure, wherein the second structure is disposed relative to the first structure so as to form a pulling gap between the first and second structures such that when an external pushing force is applied to and pushes the second structure in a tensile extension direction a width of the pulling gap increases so as to apply a tensile force to a test sample mounted across the pulling gap between a first sample mounting area on the first structure and a second sample mounting area on the second structure.
Abstract:
A method of damping control for a nanomechanical test system, the method including providing an input signal, providing an output signal representative of movement of a displaceable probe along an axis in response to the input signal, performing a frequency-dependent phase shift of the output signal to provide a phase-shifted signal, adjusting the phase-shifted signal by a gain value to provide a feedback signal, and adjusting the input signal by incorporating the feedback signal with the input signal.
Abstract:
A microelectromechanical (MEMS) nanoindenter transducer including a body, a probe moveable relative to the body, an indenter tip coupled to an end of the moveable probe, the indenter tip moveable together with the probe, and a micromachined comb drive. The micromachined comb drive includes an electrostatic actuator capacitor comprising a plurality of comb capacitors configured to drive the probe, together with the indenter tip, along a displacement axis, including in an indentation direction, upon application of a bias voltage to the actuation capacitor. The micromachined comb drive further includes a plurality of sensing capacitors forming a differential capacitive displacement sensor, each sensing capacitor comprising a plurality of comb capacitors and each configured to provide capacitance levels which, together, are representative of a position of the probe, wherein each of the comb capacitors of the actuator capacitor and the sensing capacitors includes a fixed electrode comb coupled to the body and a moveable electrode comb coupled to the probe.
Abstract:
A micromachined or microelectromechanical system (MEMS) based push-to-pull mechanical transformer for tensile testing of micro-to-nanometer scale material samples including a first structure and a second structure. The second structure is coupled to the first structure by at least one flexible element that enables the second structure to be moveable relative to the first structure, wherein the second structure is disposed relative to the first structure so as to form a pulling gap between the first and second structures such that when an external pushing force is applied to and pushes the second structure in a tensile extension direction a width of the pulling gap increases so as to apply a tensile force to a test sample mounted across the pulling gap between a first sample mounting area on the first structure and a second sample mounting area on the second structure.
Abstract:
A microelectromechanical nanoindenter including a body, a probe moveable relative to the body, an indenter tip coupled to an end of the moveable probe, and a micromachined comb drive. The micromachined comb drive includes an electrostatic actuator capacitor configured to drive the probe, along with the indenter tip. The micromachined comb drive includes a plurality of sensing capacitors forming a differential capacitive displacement sensor, each sensing capacitor comprising a plurality of comb capacitors and each configured to provide capacitance levels which, together, are representative of a position of the probe, wherein each of the comb capacitors of the actuator capacitor and the sensing capacitors includes a fixed electrode comb coupled to the body and a moveable electrode comb coupled to the probe.
Abstract:
A microelectromechanical (MEMS) nanoindenter transducer including a body, a probe coupled to and moveable relative to the body, the probe holding a removeable indenter tip, a first micromachined comb drive and a second micromachined comb drive. The first micromachined comb drive includes an actuator comprising a plurality of electrostatic capacitive actuators configured to drive the probe along a first axis, including in an indentation direction, in response to an applied bias voltage, and a displacement sensor comprising a plurality of differential capacitive sensors having capacitance levels which together are representative of a position of the probe relative to the first axis. The second micromachined comb drive includes an actuator comprising a plurality of electrostatic capacitive actuators configured to drive the probe along a second axis, which is perpendicular to the first axis, in response to an applied bias voltage, and a displacement sensor comprising a plurality of differential capacitive sensors having capacitance levels which together are representative of a position of the probe relative to the second axis. Each of the electrostatic capacitive actuators and the differential capacitive sensors comprises an electrode comb pair, each electrode comb pair including a fixed electrode comb coupled to the body and a moveable electrode comb coupled to the probe.
Abstract:
A microelectromechanical nanoindenter including a body, a probe moveable relative to the body, an indenter tip coupled to an end of the moveable probe, and a micromachined comb drive. The micromachined comb drive includes an electrostatic actuator capacitor configured to drive the probe, along with the indenter tip. The micromachined comb drive includes a plurality of sensing capacitors forming a differential capacitive displacement sensor, each sensing capacitor comprising a plurality of comb capacitors and each configured to provide capacitance levels which, together, are representative of a position of the probe, wherein each of the comb capacitors of the actuator capacitor and the sensing capacitors includes a fixed electrode comb coupled to the body and a moveable electrode comb coupled to the probe.
Abstract:
A microelectromechanical (MEMS) nanoindenter transducer including a body, a probe moveable relative to the body, an indenter tip coupled to an end of the moveable probe, the indenter tip moveable together with the probe, and a micromachined comb drive. The micromachined comb drive includes an electrostatic actuator capacitor comprising a plurality of comb capacitors configured to drive the probe, together with the indenter tip, along a displacement axis, including in an indentation direction, upon application of a bias voltage to the actuation capacitor. The micromachined comb drive further includes a plurality of sensing capacitors forming a differential capacitive displacement sensor, each sensing capacitor comprising a plurality of comb capacitors and each configured to provide capacitance levels which, together, are representative of a position of the probe, wherein each of the comb capacitors of the actuator capacitor and the sensing capacitors includes a fixed electrode comb coupled to the body and a moveable electrode comb coupled to the probe.