公开(公告)号：US20080180656A1

公开(公告)日：2008-07-31

申请号：US11627677

申请日：2007-01-26

申请人： Steven W. Meeks ,  ROMAIN SAPPEY ,  TOM CARR

发明人： Steven W. Meeks ,  ROMAIN SAPPEY ,  TOM CARR

IPC分类号： G01B11/30

CPC分类号： G01B11/306 ,  G01N21/9501 ,  G01N21/9503

摘要： In one embodiment, a system to measure defects on a surface of a wafer and an edge of the wafer using a single tool comprises a scatterometer to identify at least one defect region on the surface and a surface profile height measuring tool to measure one or more characteristics of the surface in the defect region with a surface profile height measuring tool.

摘要翻译： 在一个实施例中，使用单个工具测量晶片表面和晶片边缘上的缺陷的系统包括用于识别表面上的至少一个缺陷区域的散射仪和用于测量一个或多个 具有表面轮廓高度测量工具的缺陷区域中的表面特征。

公开(公告)号：US06977791B2

公开(公告)日：2005-12-20

申请号：US10395051

申请日：2003-03-22

申请人： Jun Zhu ,  Alex Moraru ,  Teodor Zanetti ,  Franklin Tao ,  Dan L. Kilmer ,  Harald Hess ,  Tom Carr ,  Matt Bellis ,  Gustavo A. Pinto ,  Patrick Rodney Lee

发明人： Jun Zhu ,  Alex Moraru ,  Teodor Zanetti ,  Franklin Tao ,  Dan L. Kilmer ,  Harald Hess ,  Tom Carr ,  Matt Bellis ,  Gustavo A. Pinto ,  Patrick Rodney Lee

IPC分类号： G11B5/596 ,  G11B21/02

CPC分类号： G11B5/59633

摘要： A system and methods for efficiently performing media writing functions is disclosed. The system and methods include: detecting media movement with respect to a base and heads during reading and writing, and moving the heads in response; using an interferometer, such as a dual beam differential interferometer, to dynamically monitor disk position and address perceived errors; and minimizing repeatable and non repeatable runout error by writing data, such as servo bursts, in multiple revolutions to average adverse runout conditions. The present system has the ability to use an interferometer to enhance media certification and perform on line, in situ monitoring of the media, and includes shrouding, head mounting, disk biasing, and related mechanical aspects beneficial to media writing.

摘要翻译： 公开了一种用于有效执行媒体写入功能的系统和方法。 该系统和方法包括：在读取和写入期间相对于基座和头部检测媒体移动，并且响应地移动头部; 使用诸如双光束差分干涉仪的干涉仪来动态地监测磁盘位置并解决感知到的错误; 并通过以多次旋转将数据（例如伺服脉冲串）写入平均不利的跳动条件来最小化可重复和不可重复的跳动误差。 本系统能够使用干涉仪来增强媒体认证，并在线进行现场监控媒体，并且包括遮蔽，头部安装，磁盘偏置以及有利于媒体写作的相关机械方面。

公开(公告)号：US07554654B2

公开(公告)日：2009-06-30

申请号：US11627677

申请日：2007-01-26

申请人： Steven W. Meeks ,  Romain Sappey ,  Tom Carr

发明人： Steven W. Meeks ,  Romain Sappey ,  Tom Carr

IPC分类号： G01N21/00

CPC分类号： G01B11/306 ,  G01N21/9501 ,  G01N21/9503

摘要： In one embodiment, a system to measure defects on a surface of a wafer and an edge of the wafer using a single tool comprises a scatterometer to identify at least one defect region on the surface and a surface profile height measuring tool to measure one or more characteristics of the surface in the defect region with a surface profile height measuring tool.

摘要翻译： 在一个实施例中，使用单个工具测量晶片表面和晶片边缘上的缺陷的系统包括用于识别表面上的至少一个缺陷区域的散射仪和用于测量一个或多个 具有表面轮廓高度测量工具的缺陷区域中的表面特征。

公开(公告)号：US20060119977A1

公开(公告)日：2006-06-08

申请号：US11239557

申请日：2005-09-28

申请人： Jun Zhu ,  Alex Moraru ,  Teodor Zanetti ,  Franklin Tao ,  Dan Kilmer ,  Harald Hess ,  Tom Carr ,  Matt Bellis ,  Gustavo Pinto ,  Patrick Lee

发明人： Jun Zhu ,  Alex Moraru ,  Teodor Zanetti ,  Franklin Tao ,  Dan Kilmer ,  Harald Hess ,  Tom Carr ,  Matt Bellis ,  Gustavo Pinto ,  Patrick Lee

IPC分类号： G11B5/596 ,  G11B21/02 ,  G11B27/36

CPC分类号： G11B5/59633

摘要： A system and methods for efficiently performing media writing functions is disclosed. The system and methods include: detecting media movement with respect to a base and heads during reading and writing, and moving the heads in response; using an interferometer, such as a dual beam differential interferometer, to dynamically monitor disk position and address perceived errors; and minimizing repeatable and non repeatable runout error by writing data, such as servo bursts, in multiple revolutions to average adverse runout conditions. The present system has the ability to use an interferometer to enhance media certification and perform on line, in situ monitoring of the media, and includes shrouding, head mounting, disk biasing, and related mechanical aspects beneficial to media writing.

摘要翻译： 公开了一种用于有效执行媒体写入功能的系统和方法。 该系统和方法包括：在读取和写入期间相对于基座和头部检测媒体移动，并且响应地移动头部; 使用诸如双光束差分干涉仪的干涉仪来动态地监测磁盘位置并解决感知到的错误; 并通过以多次旋转将数据（例如伺服脉冲串）写入平均不利的跳动条件来最小化可重复和不可重复的跳动误差。 本系统能够使用干涉仪来增强媒体认证，并在线进行现场监控媒体，并且包括遮蔽，头部安装，磁盘偏置以及有利于媒体写作的相关机械方面。