公开(公告)号：US20130044209A1

公开(公告)日：2013-02-21

申请号：US13251831

申请日：2011-10-03

Applicant: Gyuhong HWANG ,  Taeho KEEM ,  Jihwa JUNG ,  Jaehoon KWON ,  Mark KEMMANN ,  Marko VOITEL ,  Erik LOHSE ,  Andreas BOCK

Inventor： Gyuhong HWANG ,  Taeho KEEM ,  Jihwa JUNG ,  Jaehoon KWON ,  Mark KEMMANN ,  Marko VOITEL ,  Erik LOHSE ,  Andreas BOCK

IPC: H04N7/18

CPC classification number: G01N21/896 ,  G01N2021/8967

Abstract: The apparatus for detecting surface defects of a glass substrate, having a dark field optical system, includes: a first photographing device for photographing first image; a second photographing for photographing second image; a dark field illumination system disposed below the glass substrate for serving as a dark field illumination; and a detection signal processor operating coordinates of a defect position on the first image and the second image, wherein the first photographing device and the second photographing device form photographing areas in the shape of lines which are not parallel to at least the transferring direction of the glass substrate, form photographing areas for a top surface of the glass substrate to be overlapped by each other and form photographing areas for a bottom surface of the glass substrate differently from each other.

Abstract translation: 用于检测具有暗场光学系统的玻璃基板的表面缺陷的装置包括：用于拍摄第一图像的第一拍摄装置; 用于拍摄第二图像的第二拍摄; 设置在玻璃基板下方用作暗场照明的暗场照明系统; 以及检测信号处理器对所述第一图像和所述第二图像上的缺陷位置进行操作坐标，其中，所述第一拍摄装置和所述第二拍摄装置形成至少与所述第一图像和所述第二图像的传送方向不平行的线状的拍摄区域 形成用于玻璃基板的顶表面的拍摄区域以彼此重叠，并且形成彼此不同的玻璃基板的底表面的拍摄区域。

公开(公告)号：US20110187849A1

公开(公告)日：2011-08-04

申请号：US12708610

申请日：2010-02-19

Applicant: Hyunwoo Kim ,  Jinhong Park ,  Taeho Keem ,  Changha Lee

Inventor： Hyunwoo Kim ,  Jinhong Park ,  Taeho Keem ,  Changha Lee

IPC: H04N7/18

CPC classification number: H04N7/18

Abstract: The present invention relates to an apparatus for detecting particles on a flat glass, which detects particles adhered to the flat glass having both sides such as a surface A and a surface B, comprising: a surface A laser light irradiating device for irradiating laser light of a first wavelength polarized in a direction S at a first angle based on a surface A normal vector toward the surface A in an upper part of the surface A of the flat glass; a surface A photographing device for taking a picture of a point where the laser light irradiated by the surface A laser light irradiating device is irradiated on the surface A of the flat glass; a surface B laser light irradiating device for irradiating laser light of a second wavelength toward the surface A at a second angle smaller than the first angle based on the surface A normal vector in the upper part of the surface A of the flat glass, and wherein the irradiated laser light is mostly transmitted in thickness direction of the flat glass; a surface B photographing device for taking a picture of a point where the laser light irradiated by the surface B laser light irradiating device is irradiated on the surface B of the flat glass; and a detection signal processor for analyzing video images inputted from the surface A photographing device and the surface B photographing device, and deciding from which photographing device the particles are more clearly outputted, to decide on a surface to which the particles adhere.

Abstract translation: 本发明涉及一种用于检测平板玻璃上的颗粒的装置，其检测附着在具有表面A和表面B两侧的平板玻璃上的颗粒，该装置包括：表面A激光照射装置，用于照射 基于在平板玻璃的表面A的上部中的朝向表面A的表面A法线向量，在第一角度的方向S上偏振的第一波长; 用于拍摄由表面A激光照射装置照射的激光的点照射在平板玻璃的表面A上的表面A拍摄装置; 表面B激光照射装置，其基于平板玻璃的表面A的上部的表面A法线向量，以比第一角度小的第二角度朝向表面A照射第二波长的激光，并且其中 照射的激光主要在平板玻璃的厚度方向上透射; 用于拍摄由表面B激光照射装置照射的激光的点被照射在平板玻璃的表面B上的表面B拍摄装置; 以及检测信号处理器，用于分析从表面A拍摄装置和表面B拍摄装置输入的视频图像，并且确定从哪个拍摄装置更清晰地输出颗粒，以决定颗粒粘附的表面。

公开(公告)号：US08110776B2

公开(公告)日：2012-02-07

申请号：US12164150

申请日：2008-06-30

Applicant: Hun Sang Jung ,  Hyung Sang Roh ,  Taeho Keem ,  Hun Sik Lee ,  Chang Ha Lee

Inventor： Hun Sang Jung ,  Hyung Sang Roh ,  Taeho Keem ,  Hun Sik Lee ,  Chang Ha Lee

IPC: C03B33/02 ,  C03B33/10

CPC classification number: C03B33/091 ,  B65G49/064 ,  B65G49/067 ,  C03B33/027 ,  C03B33/03 ,  C03B33/033 ,  Y02P40/57 ,  Y10T225/325

Abstract: Glass substrate cutting apparatuses using lasers are disclosed, where a laser cutting head is moved. A glass substrate cutting apparatus includes two parts for a laser cutting head: heavy laser beam generators fixed to respective ends of a gantry structure moving in parallel along two gantry stages located on either side of a cutting table, and relatively lightweight laser irradiation heads moving horizontally in parallel with the gantry structure. The glass substrate cutting apparatus includes a cutting table for maintaining a glass substrate in a horizontal state; biaxial gantry stages for moving a gantry structure along the cutting table; the gantry structure moving in between an upper part of the biaxial gantry stages; laser beam generators fixed to respective ends of the gantry structure for oscillating the laser; and laser irradiation heads that move horizontally on respective ends of the gantry structure and irradiate the laser upon the glass substrate.

Abstract translation: 公开了使用激光器的玻璃基板切割装置，其中激光切割头移动。 玻璃基板切割装置包括用于激光切割头的两个部分：固定到台架结构的相应末端的重激光束发生器，其平行移动，位于位于切割台的任一侧的两个台架台，以及相对较轻的激光照射头水平移动 与龙门架结构平行。 玻璃基板切割装置包括用于将玻璃基板维持在水平状态的切割台; 用于沿着切割台移动龙门架结构的双轴龙门架; 台架结构在双轴台阶的上部之间移动; 激光束发生器固定到台架结构的相应末端以振荡激光; 以及在台架结构的两端水平移动并将激光照射在玻璃基板上的激光照射头。

公开(公告)号：US20100320786A1

公开(公告)日：2010-12-23

申请号：US12732717

申请日：2010-03-26

Applicant: Youngchae Ko ,  Hyukki Kwon ,  Taeho Keem ,  Changha Lee ,  Youngtae Kim ,  Young Bae Chang

Inventor： Youngchae Ko ,  Hyukki Kwon ,  Taeho Keem ,  Changha Lee ,  Youngtae Kim ,  Young Bae Chang

IPC: B25J15/06 ,  B66C1/02

CPC classification number: B25J15/0616 ,  B65G49/061 ,  B65G2249/04 ,  B65G2249/045 ,  H01L21/6838

Abstract: A noncontact type suction gripping device suitable for lifting a flat object in a noncontact manner includes a housing section including a pressing part which forms a closed surface when being placed to closely face one surface of a flat object, an R part which extends from the pressing part to be convexly rounded when viewed from the flat object, a sidewall part which is formed such that at least a portion thereof linearly extends from the R part in a direction facing away from the flat object, and an air inlet part which is connected to the sidewall part to introduce air, supplied from the outside, into the housing section; and a nozzle section including a nozzle tip which is separated from an inner surface of the sidewall part by a predetermined gap such that air supplied through the air inlet part can be discharged toward the perpendicular direction on the flat object, and an inclined surface which is formed to have a gradually decreasing diameter from the nozzle tip toward the air inlet part, the nozzle section having a funnel-shaped configuration and being inserted into a space defined in the housing section.

Abstract translation: 适用于以非接触方式提升扁平物体的非接触型吸引夹持装置包括：壳体部分，包括当被放置成紧密地面对平坦物体的一个表面时形成闭合表面的按压部分;从压制件延伸的R部分 从扁平物体观察时要凸起成圆形的部分，形成为使得其至少一部分在远离平坦物体的方向上从R部分线性延伸的侧壁部分，以及连接到 所述侧壁部将从外部供给的空气引入所述壳体部; 以及喷嘴部，其包括以与所述侧壁部的内表面隔开预定间隙的喷嘴头，使得通过所述进气部供给的空气能够朝向所述平坦物体的垂直方向排出， 形成为从喷嘴尖端朝向空气入口部分的直径逐渐减小，所述喷嘴部分具有漏斗形构造并插入到限定在所述壳体部分中的空间中。

公开(公告)号：US20120194668A1

公开(公告)日：2012-08-02

申请号：US13049425

申请日：2011-03-16

Applicant: Hyun-woo KIM ,  Misun KIM ,  So-ra YU ,  Gahyun KIM ,  Taeho KEEM ,  Changha LEE

Inventor： Hyun-woo KIM ,  Misun KIM ,  So-ra YU ,  Gahyun KIM ,  Taeho KEEM ,  Changha LEE

IPC: H04N7/18

CPC classification number: G01N21/21 ,  G01N21/896

Abstract: The present invention relates to an apparatus for detecting particles in flat glass and a detecting method using the same. The present invention provides an apparatus for detecting particles in flat glass, comprising: an illumination unit which is installed in one region selected from upper and lower regions on the basis of flat glass; a first polarizer which is installed between the illumination unit and the flat glass, and has a first polarization direction; a first camera and a second camera which are installed in the opposite direction where the illumination unit is installed on the basis of the flat glass; a second polarizer which is equipped in a space between the first camera and the flat glass, and has a polarization direction in the range of 0° to 20° that is different from the polarization direction of the first polarizer; a fourth polarizer which is equipped in a space between the second camera and the flat glass, and has a polarization direction in the range of 70° to 90° that is different from the polarization direction of the first polarizer; and a processor which receives images obtained from the first camera and the second camera, and decides whether defects are benign particles or malignant particles.

Abstract translation: 本发明涉及一种用于检测平板玻璃中的颗粒的装置及其检测方法。 本发明提供了一种用于检测平板玻璃中的颗粒的装置，包括：照明单元，其安装在基于平板玻璃从上部和下部区域中选择的一个区域中; 第一偏振器，安装在照明单元和平板玻璃之间，并具有第一偏振方向; 第一相机和第二相机，其以平板玻璃为基础安装在照明单元的相反方向上; 第二偏振器，其配置在第一相机和平板玻璃之间的空间中，并且具有与第一偏振器的偏振方向不同的0°至20°范围内的偏振方向; 第四偏振器，其配置在第二相机和平板玻璃之间的空间中，并且具有与第一偏振器的偏振方向不同的70°至90°的偏振方向; 以及处理器，其接收从第一相机和第二相机获得的图像，并且判定缺陷是良性粒子还是恶性粒子。

公开(公告)号：US20090188960A1

公开(公告)日：2009-07-30

申请号：US12164148

申请日：2008-06-30

Applicant: Hun Sik Lee ,  Chang Ha Lee ,  Hun Sang Jung ,  Hyung Sang Roh ,  Taeho Keem

Inventor： Hun Sik Lee ,  Chang Ha Lee ,  Hun Sang Jung ,  Hyung Sang Roh ,  Taeho Keem

IPC: B28D5/00

CPC classification number: C03B33/033 ,  C03B33/0222 ,  C03B33/091 ,  Y02P40/57 ,  Y10T225/325

Abstract: Disclosed herein are apparatuses for breaking a glass panel unified with a process table which break the glass panel formed with scribing lines along the scribing lines by irradiating laser beams. The apparatuses for breaking a glass panel unified with a process table to conduct breaking operations of the glass panel after scribing work of the glass panel as one body with the process table are installed on both sides of the process table included in a transfer-type cutting head laser cutting device. Each apparatus for breaking the glass panel unified with the process table comprises: breaking bars for cutting the glass panel by applying pressure to cutting sections of the glass panel; rotating devices for rotating the breaking bars by combining with both ends of the breaking bars; and a support equipped with cylinders for vertically moving the rotating devices in both sections.

Abstract translation: 本文公开了一种用于将通过照射激光束沿划线划分划线的玻璃面板与工艺台一体化的装置。 用于将玻璃面板与工艺台统一的装置安装在包括在转印式切割中的处理台的两侧上，该玻璃面板与工艺台一起进行切割操作以进行玻璃面板的划线工作， 头激光切割装置。 用于破碎与工艺台统一的玻璃面板的每个装置包括：通过向玻璃面板的切割部分施加压力来切割玻璃板的断裂条; 旋转装置，用于通过与断棒的两端结合来旋转断棒; 以及配备有用于在两部分中垂直移动旋转装置的气缸的支撑件。

公开(公告)号：US08803968B2

公开(公告)日：2014-08-12

申请号：US13049425

申请日：2011-03-16

Applicant: Hyun-woo Kim ,  Misun Kim ,  So-ra Yu ,  Gahyun Kim ,  Taeho Keem ,  Changha Lee

Inventor： Hyun-woo Kim ,  Misun Kim ,  So-ra Yu ,  Gahyun Kim ,  Taeho Keem ,  Changha Lee

IPC: H04N7/18

CPC classification number: G01N21/21 ,  G01N21/896

Abstract: The present invention relates to an apparatus for detecting particles in flat glass and a detecting method using the same. The present invention provides an apparatus for detecting particles in flat glass, comprising: an illumination unit which is installed in one region selected from upper and lower regions on the basis of flat glass; a first polarizer which is installed between the illumination unit and the flat glass, and has a first polarization direction; a first camera and a second camera which are installed in the opposite direction where the illumination unit is installed on the basis of the flat glass; a second polarizer which is equipped in a space between the first camera and the flat glass, and has a polarization direction in the range of 0° to 20° that is different from the polarization direction of the first polarizer; a fourth polarizer which is equipped in a space between the second camera and the flat glass, and has a polarization direction in the range of 70° to 90° that is different from the polarization direction of the first polarizer; and a processor which receives images obtained from the first camera and the second camera, and decides whether defects are benign particles or malignant particles.

Abstract translation: 本发明涉及一种用于检测平板玻璃中的颗粒的装置及其检测方法。 本发明提供了一种用于检测平板玻璃中的颗粒的装置，包括：照明单元，其安装在基于平板玻璃从上部和下部区域中选择的一个区域中; 第一偏振器，安装在照明单元和平板玻璃之间，并具有第一偏振方向; 第一相机和第二相机，其以平板玻璃为基础安装在照明单元的相反方向上; 第二偏振器，其配置在第一相机和平板玻璃之间的空间中，并且具有与第一偏振器的偏振方向不同的0°至20°范围内的偏振方向; 第四偏振器，其配置在第二相机和平板玻璃之间的空间中，并且具有与第一偏振器的偏振方向不同的70°至90°的偏振方向; 以及处理器，其接收从第一相机和第二相机获得的图像，并且判定缺陷是良性粒子还是恶性粒子。

公开(公告)号：US08084711B2

公开(公告)日：2011-12-27

申请号：US12164148

申请日：2008-06-30

Applicant: Hun Sik Lee ,  Chang Ha Lee ,  Hun Sang Jung ,  Hyung Sang Roh ,  Taeho Keem

Inventor： Hun Sik Lee ,  Chang Ha Lee ,  Hun Sang Jung ,  Hyung Sang Roh ,  Taeho Keem

IPC: B23K26/00

CPC classification number: C03B33/033 ,  C03B33/0222 ,  C03B33/091 ,  Y02P40/57 ,  Y10T225/325

Abstract: Disclosed herein are apparatuses for breaking a glass panel unified with a process table which break the glass panel formed with scribing lines along the scribing lines by irradiating laser beams. The apparatuses for breaking a glass panel unified with a process table to conduct breaking operations of the glass panel after scribing work of the glass panel as one body with the process table are installed on both sides of the process table included in a transfer-type cutting head laser cutting device. Each apparatus for breaking the glass panel unified with the process table comprises: breaking bars for cutting the glass panel by applying pressure to cutting sections of the glass panel; rotating devices for rotating the breaking bars by combining with both ends of the breaking bars; and a support equipped with cylinders for vertically moving the rotating devices in both sections.

Abstract translation: 本文公开了一种用于将通过照射激光束沿划线划分划线的玻璃面板与工艺台一体化的装置。 用于将玻璃面板与工艺台统一的装置安装在包括在转印式切割中的处理台的两侧上，该玻璃面板与工艺台一起进行切割操作以进行玻璃面板的划线工作， 头激光切割装置。 用于破碎与工艺台统一的玻璃面板的每个装置包括：通过向玻璃面板的切割部分施加压力来切割玻璃板的断裂条; 旋转装置，用于通过与断棒的两端结合来旋转断棒; 以及配备有用于在两部分中垂直移动旋转装置的气缸的支撑件。

公开(公告)号：US08027036B2

公开(公告)日：2011-09-27

申请号：US12417318

申请日：2009-04-02

Applicant: Hyunwoo Kim ,  Youngchae Ko ,  Sungjong Pyo ,  Taeho Keem

Inventor： Hyunwoo Kim ,  Youngchae Ko ,  Sungjong Pyo ,  Taeho Keem

IPC: G01N21/00 ,  G01N21/47

CPC classification number: G01N21/896 ,  G01N21/958

Abstract: The present invention relates to an apparatus for detecting particles on a glass surface and a method thereof, and more specifically, to an apparatus for detecting particles on a glass surface and a method thereof for exactly inspecting particles which may be created on a glass surface where micro circuits are deposited. The apparatus for detecting the particles on the glass surface in accordance with the present invention comprises laser beam irradiators for detecting particles on a glass substrate on upper and lower sides of the glass substrate at certain intervals, respectively, and wherein the irradiators are configured so that beams emitted from the laser beam irradiators can be irradiated in a direction vertical to a transferring direction of the glass substrate, thereby exactly detecting particles detached to the glass surface without exception.

Abstract translation: 本发明涉及一种用于检测玻璃表面上的颗粒的装置及其方法，更具体地，涉及一种用于检测玻璃表面上的颗粒的装置及其方法，用于精确检查可能在玻璃表面上产生的颗粒 微电路被沉积。 根据本发明的用于检测玻璃表面上的颗粒的装置包括分别用于以一定间隔检测在玻璃基板的上侧和下侧的玻璃基板上的颗粒的激光束照射器，并且其中， 可以在垂直于玻璃基板的传送方向的方向上照射从激光束照射器发射的光束，从而精确地检测除玻璃表面之外的颗粒。

公开(公告)号：US20100214564A1

公开(公告)日：2010-08-26

申请号：US12417318

申请日：2009-04-02

Applicant: Hyunwoo KIM ,  Youngchae KO ,  Sungjong PYO ,  Taeho KEEM

Inventor： Hyunwoo KIM ,  Youngchae KO ,  Sungjong PYO ,  Taeho KEEM

IPC: G01N21/47

CPC classification number: G01N21/896 ,  G01N21/958

Abstract: The present invention relates to an apparatus for detecting particles on a glass surface and a method thereof, and more specifically, to an apparatus for detecting particles on a glass surface and a method thereof for exactly inspecting particles which may be created on a glass surface where micro circuits are deposited. The apparatus for detecting the particles on the glass surface in accordance with the present invention comprises laser beam irradiators for detecting particles on a glass substrate on upper and lower sides of the glass substrate at certain intervals, respectively, and wherein the irradiators are configured so that beams emitted from the laser beam irradiators can be irradiated in a direction vertical to a transferring direction of the glass substrate, thereby exactly detecting particles detached to the glass surface without exception.

Abstract translation: 本发明涉及一种用于检测玻璃表面上的颗粒的装置及其方法，更具体地，涉及一种用于检测玻璃表面上的颗粒的装置及其方法，用于精确检查可能在玻璃表面上产生的颗粒 微电路被沉积。 根据本发明的用于检测玻璃表面上的颗粒的装置包括分别用于以一定间隔检测在玻璃基板的上侧和下侧的玻璃基板上的颗粒的激光束照射器，并且其中， 可以在垂直于玻璃基板的传送方向的方向上照射从激光束照射器发射的光束，从而精确地检测除玻璃表面之外的颗粒。