公开(公告)号：US20080145238A1

公开(公告)日：2008-06-19

申请号：US12070265

申请日：2008-02-15

申请人： Kouji Shibayama ,  Yuuichi Yamashita ,  Mitsuru Yahagi ,  Takahiko Tashima ,  Junichi Aikawa ,  Tomonari Tanaka ,  Yukio Kanke ,  Yuuji Fukaura

发明人： Kouji Shibayama ,  Yuuichi Yamashita ,  Mitsuru Yahagi ,  Takahiko Tashima ,  Junichi Aikawa ,  Tomonari Tanaka ,  Yukio Kanke ,  Yuuji Fukaura

IPC分类号： F04B49/00 ,  F01C1/24 ,  F04C2/24

CPC分类号： F04C23/001 ,  F04C2220/12 ,  F16K15/042

摘要： Pairs of rotors (R1, R2, R3, R4, R5 and R6) driven rotationally by a motor (22) are disposed in the body (21) of a main pump (20) comprising a multistage Roots dry vacuum pump. A suction opening (23) communicating with the rotor chamber of the rotor R1 is provided in the upper wall portion at the left end of the body (21). A delivery section (24) communicating with the delivery side of the rotor chamber of rotor R6 on the final stage is coupled to an exhaust pipe (25) and is provided with a silencer (26) and further coupled to a check valve (28) through a pipe (27). The check valve (28) has its forward direction toward the atmospheric side. The delivery section (24), or a delivery section (24′) at the side intermediate stage, is coupled to an auxiliary pump (30) having an exhaust capacity smaller than that of the main pump (20). When the motor (22) is driven, gas exhausted through rotation of the rotors (R1-R6) is carried sequentially to the downstream side from the rotor chambers and a vacuum processing chamber coupled to the suction opening (23) is exhausted. The delivery section (24) on the final stage is exhausted by driving the auxiliary pump (30), and the pressure is reduced. Consequently, the burden of the exhaust action on the rotor (R6) on the final stage or the rotor (R5) on the intermediate stage is lessened, and the power consumption of the motor (22) can be reduced significantly as compared with the prior art.

摘要翻译： 成对的转子（R 1，R 2，R 2，R 3，R 4，R 5， 由主电动机22旋转地驱动的电动机和/或副电动机）设置在包括多级罗茨干式真空泵的主泵（20）的主体（21）中。 在主体（21）的左端部的上壁部设置有与转子R 1 1的转子室连通的吸入口（23）。 与最终级上的转子R 6C的转子室的输送侧连通的输送部分（24）联接到排气管（25），并且设置有消声器（26），并且进一步 通过管道（27）联接到止回阀（28）。 止回阀（28）具有朝向大气侧的向前方向。 输送部分（24）或侧中间段的输送部分（24'）联接到排气容量小于主泵（20）的排放能力的辅助泵（30）。 当电动机（22）被驱动时，通过转子（R SUB1〜6S）的旋转排出的气体顺序地从转子室输送到下游侧，并且 联接到吸入口（23）的真空处理室被排出。 通过驱动辅助泵（30）将最终级上的输送部分（24）排出，压力降低。 因此，中间级上的末级或转子（R 5 S 5）上的转子（R 6 S）的排气作用的负担减轻，并且功率 与现有技术相比，马达（22）的消耗可以显着降低。