公开(公告)号：US20080145238A1

公开(公告)日：2008-06-19

申请号：US12070265

申请日：2008-02-15

申请人： Kouji Shibayama ,  Yuuichi Yamashita ,  Mitsuru Yahagi ,  Takahiko Tashima ,  Junichi Aikawa ,  Tomonari Tanaka ,  Yukio Kanke ,  Yuuji Fukaura

发明人： Kouji Shibayama ,  Yuuichi Yamashita ,  Mitsuru Yahagi ,  Takahiko Tashima ,  Junichi Aikawa ,  Tomonari Tanaka ,  Yukio Kanke ,  Yuuji Fukaura

IPC分类号： F04B49/00 ,  F01C1/24 ,  F04C2/24

CPC分类号： F04C23/001 ,  F04C2220/12 ,  F16K15/042

摘要： Pairs of rotors (R1, R2, R3, R4, R5 and R6) driven rotationally by a motor (22) are disposed in the body (21) of a main pump (20) comprising a multistage Roots dry vacuum pump. A suction opening (23) communicating with the rotor chamber of the rotor R1 is provided in the upper wall portion at the left end of the body (21). A delivery section (24) communicating with the delivery side of the rotor chamber of rotor R6 on the final stage is coupled to an exhaust pipe (25) and is provided with a silencer (26) and further coupled to a check valve (28) through a pipe (27). The check valve (28) has its forward direction toward the atmospheric side. The delivery section (24), or a delivery section (24′) at the side intermediate stage, is coupled to an auxiliary pump (30) having an exhaust capacity smaller than that of the main pump (20). When the motor (22) is driven, gas exhausted through rotation of the rotors (R1-R6) is carried sequentially to the downstream side from the rotor chambers and a vacuum processing chamber coupled to the suction opening (23) is exhausted. The delivery section (24) on the final stage is exhausted by driving the auxiliary pump (30), and the pressure is reduced. Consequently, the burden of the exhaust action on the rotor (R6) on the final stage or the rotor (R5) on the intermediate stage is lessened, and the power consumption of the motor (22) can be reduced significantly as compared with the prior art.

摘要翻译： 成对的转子（R 1，R 2，R 2，R 3，R 4，R 5， 由主电动机22旋转地驱动的电动机和/或副电动机）设置在包括多级罗茨干式真空泵的主泵（20）的主体（21）中。 在主体（21）的左端部的上壁部设置有与转子R 1 1的转子室连通的吸入口（23）。 与最终级上的转子R 6C的转子室的输送侧连通的输送部分（24）联接到排气管（25），并且设置有消声器（26），并且进一步 通过管道（27）联接到止回阀（28）。 止回阀（28）具有朝向大气侧的向前方向。 输送部分（24）或侧中间段的输送部分（24'）联接到排气容量小于主泵（20）的排放能力的辅助泵（30）。 当电动机（22）被驱动时，通过转子（R SUB1〜6S）的旋转排出的气体顺序地从转子室输送到下游侧，并且 联接到吸入口（23）的真空处理室被排出。 通过驱动辅助泵（30）将最终级上的输送部分（24）排出，压力降低。 因此，中间级上的末级或转子（R 5 S 5）上的转子（R 6 S）的排气作用的负担减轻，并且功率 与现有技术相比，马达（22）的消耗可以显着降低。

公开(公告)号：US20130257205A1

公开(公告)日：2013-10-03

申请号：US13878134

申请日：2011-10-05

申请人： Yukio Kanke ,  Koji Shibayama

发明人： Yukio Kanke ,  Koji Shibayama

IPC分类号： H02K7/08

CPC分类号： H02K7/083 ,  F04B9/045 ,  F04B39/0246 ,  F04B39/06 ,  F04C29/0085 ,  F04C29/023 ,  F04C29/025 ,  F16C23/10 ,  F16C33/6666 ,  F16N7/366 ,  F16N2210/14 ,  F16N2210/18 ,  H02K5/161 ,  H02K7/075 ,  H02K7/14

摘要： [Object] To provide an eccentric circling drive device that is capable of performing appropriate lubrication and cooling by means of a processing liquid while preventing energy loss and damage to members due to friction.[Solving Means] A circling shaft 13 of an eccentric circling drive device 100 includes therewithin a flow path 131 that causes the flow of a lubricating oil F. The flow path 131 includes a thrust flow path 131a formed along an axial direction and a radial flow path 131b that extends along a radial direction of the circling shaft 13 from the thrust flow path 131a. An end portion of the radial flow path 131b is connected to a bearing 15. With such a configuration of the flow path 131, the lubricating oil F can be introduced from the end portion 13b of the circling shaft 13 into the bearing 15 by means of the circling motion of the circling shaft 13.

摘要翻译： 提供一种能够通过处理液进行适当的润滑和冷却同时防止由于摩擦而导致的能量损失和对构件的损坏的偏心盘旋驱动装置。 [解决方案]偏心盘旋驱动装置100的盘旋轴13在其中包括导致润滑油F流动的流路131.流路131包括沿轴向形成的推力流路131a和径向流动 路径131b，其从推力流路131a沿着盘旋轴13的径向方向延伸。 径向流路131b的端部与轴承15连接。利用流路131的这种构造，可以将润滑油F从盘旋轴13的端部13b引入轴承15，借助于 盘旋轴13的盘旋运动。

公开(公告)号：US20130202416A1

公开(公告)日：2013-08-08

申请号：US13878148

申请日：2011-09-29

申请人： Yukio Kanke ,  Koji Shibayama

发明人： Yukio Kanke ,  Koji Shibayama

IPC分类号： F01D25/00

CPC分类号： F01D25/00 ,  F04B9/04 ,  F04B9/045 ,  F04B37/14 ,  F04C2/32 ,  F04C2/3562 ,  F04C15/0061 ,  H02K5/161 ,  H02K7/075 ,  H02K7/14

摘要： [Object] To provide a drive device capable of increasing the drive precision of a movable member for generating power and capable of suppressing the generation of abraded particles.[Solving Means] A fluid machine (100) according to this embodiment has a structure in which a connecting rod as a movable member of a pump unit (20) is not connected to a circling shaft (13) of a motor unit (10) via a bearing but fixed to the circling shaft (13). In other words, the connection structure between the circling shaft (13) and the connecting rod is a structure using no bearings, and the integration, that is, the rigidity, of the circling shaft (13) and the connecting rod can be increased, which can increase the drive precision of the connecting rod. Further, since there are no sliding portions between the circling shaft (13) and the connecting rod, the generation of abraded particles can be suppressed and the reliability of the fluid machine (100) can be increased.

摘要翻译： 本发明提供一种驱动装置，其能够提高可动部件的发电动力的驱动精度，能够抑制磨损粒子的产生。 本实施方式的流体机械（100）具有将作为泵单元（20）的可动部件的连杆未连接到电机单元（10）的盘旋轴（13）的结构， 通过轴承固定到盘旋轴（13）。 换句话说，盘旋轴（13）和连杆之间的连接结构是不使用轴承的结构，并且可以增加盘旋轴（13）和连杆的一体化，即刚性， 这可以提高连杆的驱动精度。 此外，由于在盘旋轴（13）和连杆之间不存在滑动部，因此能够抑制磨损粒子的产生，能够提高流体机械（100）的可靠性。