DIELECTRIC RESONATOR, DIELECTRIC RESONATOR FILTER, AND METHOD OF CONTROLLING DIELECTRIC RESONATOR
    1.
    发明申请
    DIELECTRIC RESONATOR, DIELECTRIC RESONATOR FILTER, AND METHOD OF CONTROLLING DIELECTRIC RESONATOR 有权
    介质谐振器,介质谐振器滤波器和控制电介质谐振器的方法

    公开(公告)号:US20100244992A1

    公开(公告)日:2010-09-30

    申请号:US12679188

    申请日:2008-09-19

    IPC分类号: H01P7/10

    CPC分类号: H01P7/105 H01P1/2086

    摘要: Disclosed are a dielectric resonator having simple configuration applicable to a multiple mode with no electrical signal transmission loss, and a method of controlling a resonance state (coupling mode) in the dielectric resonator. The dielectric resonator includes a cylindrical or polygonal external conductor, and a dielectric resonant element arranged at the substantially center of the external conductor. A notched portion is formed at a part of the dielectric resonant element so as to control the resonance state of the dielectric resonator.

    摘要翻译: 公开了具有适用于没有电信号传输损耗的多模式的简单配置的介质谐振器,以及控制介质谐振器中的谐振状态(耦合模式)的方法。 介质谐振器包括一个圆柱形或多边形的外部导体,以及一个布置在外部导体的大致中心的介质谐振元件。 在介质谐振元件的一部分处形成切口部分,以便控制介质谐振器的谐振状态。

    Aligner for timing the alignment of a wafer and mask with a shutter to
protect the wafer during alignment
    3.
    发明授权
    Aligner for timing the alignment of a wafer and mask with a shutter to protect the wafer during alignment 失效
    对准器用于定时将晶片和掩模与快门对准,以在对准期间保护晶片

    公开(公告)号:US5712708A

    公开(公告)日:1998-01-27

    申请号:US681521

    申请日:1996-07-23

    CPC分类号: G01B11/26 G03F7/7055 G03F9/70

    摘要: A 1:1 projection aligner includes a first optical system for irradiating a light beam, emitted from a light source, on a wafer through a mask; and a second optical system for irradiating a light beam, emitted from the same light source, as that of the first optical system for auto-alignment of the wafer. The aligner further includes a timer for measuring an elapsed time and outputting a signal after a specified time has elapsed, first and second shutters for shielding light paths of light beams from the first and second optical systems, and drive units for driving the shutters on the basis of a signal from the timer. In the case of a failure of the auto-alignment operation, the shutters are closed for preventing the wafer from being irradiated with a light beam for a long time, thereby preventing generation of a defect such as unevenness of exposure. An alarm is also outputted for informing an operator of the failure of the auto-alignment.

    摘要翻译: 1:1投影对准器包括用于通过掩模将从光源发射的光束照射在晶片上的第一光学系统; 以及第二光学系统,用于照射与第一光学系统相同的光源发射的光束,用于晶片的自动对准。 对准器还包括用于测量经过时间并在经过指定时间后输出信号的定时器,用于屏蔽来自第一和第二光学系统的光束的光路的第一和第二快门以及用于驱动快门上的快门的驱动单元 来自定时器的信号的基础。 在自动对准操作失败的情况下,关闭快门以防止晶片长时间被光束照射,从而防止产生诸如曝光不均匀的缺陷。 还输出警报以通知操作者自动对准的故障。

    Dielectric resonator having a dielectric resonant element with two oppositely located notches for EH mode coupling
    4.
    发明授权
    Dielectric resonator having a dielectric resonant element with two oppositely located notches for EH mode coupling 有权
    介质谐振器具有介电谐振元件,具有两个相对位置的用于EH模式耦合的切口

    公开(公告)号:US08410873B2

    公开(公告)日:2013-04-02

    申请号:US12679188

    申请日:2008-09-19

    IPC分类号: H01P7/10

    CPC分类号: H01P7/105 H01P1/2086

    摘要: Disclosed are a dielectric resonator having simple configuration applicable to a multiple mode with no electrical signal transmission loss, and a method of controlling a resonance state (coupling mode) in the dielectric resonator. The dielectric resonator includes a cylindrical or polygonal external conductor, and a dielectric resonant element arranged at the substantially center of the external conductor. A notched portion is formed at a part of the dielectric resonant element so as to control the resonance state of the dielectric resonator.

    摘要翻译: 公开了具有适用于没有电信号传输损耗的多模式的简单配置的介质谐振器,以及控制介质谐振器中的谐振状态(耦合模式)的方法。 介质谐振器包括一个圆柱形或多边形的外部导体,以及一个布置在外部导体的大致中心的介质谐振元件。 在介质谐振元件的一部分处形成切口部分,以便控制介质谐振器的谐振状态。