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公开(公告)号：US06925629B2
公开(公告)日：2005-08-02
申请号：US10652026
申请日：2003-09-02
IPC分类号： G03F1/68 , G03F1/84 , G03F7/20 , G06F17/50 , H01J37/302 , H01L21/027
CPC分类号： G03F1/78 , G03F1/68 , G03F1/84 , H01J37/3023 , H01J2237/30455 , H01J2237/3175
摘要： CAD (Computer Aided Design) data which is reticle design data is input to first and second data conversion devices which respectively convert the CAD data to electron beam (EB) write data and inspection data. The EB write data and inspection data output are input to a data verification device to verify whether or not there is a data conversion error. If no data conversion error is detected by the data verification device, an EB writing device writes a pattern on an unwritten reticle with an electron beam based on the EB write data and develops the reticle, after which the fabricated developed reticle is inspected by a reticle inspection device. As a defect, such as a data conversion error contained in EB write data is detected before fabrication of a reticle, the reticle inspection process is simplified, the effective availability factors of the EB writing device and reticle inspection device and the time needed to fabricate a reticle is made shorter, thereby reducing the fabrication cost.
摘要翻译： 将作为标线设计数据的CAD（计算机辅助设计）数据输入到分别将CAD数据转换为电子束（EB）写入数据和检查数据的第一和第二数据转换装置。 EB写入数据和检查数据输出被输入到数据验证装置，以验证是否存在数据转换错误。 如果数据验证装置没有检测到数据转换错误，则EB写装置基于EB写入数据将电子束写入具有电子束的未写入的掩模版上，并且形成掩模版，之后通过掩模版检查制作的显影掩模版 检查装置 作为缺陷，例如在制作掩模版之前检测到EB写入数据中包含的数据转换错误，简化了掩模检查过程，EB写入装置和掩模版检查装置的有效可用性因素以及制造 掩模版较短，从而降低制造成本。
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2.发明授权Optical character reading apparatus which can reduce reading errors as regards a character image if the character image is in contact with an unnecessary image. 失效光学字符读取装置，如果字符图像与不需要的图像接触，则可以减少关于字符图像的读取错误。
公开(公告)号：US5391889A
公开(公告)日：1995-02-21
申请号：US100754
申请日：1993-08-02
CPC分类号： G06K9/346 , G06K2209/01
摘要： In an optical character reading apparatus for optically reading a character image to produce a character signal representative of the character image, a collation and judgement circuit (22) compares a modified image with each of predetermined reference images memorized in a dictionary (21). A character detecting arrangement (11, 12) detects the character image to produce a detected image. A deleting arrangement (15, 16) partially deletes the detected image to produce a partially deleted image. A modifying arrangement (17, 18) modifies the partially deleted image into the modified image by the use of a reference signal produced in a reference signal producing arrangement (13, 14). It is preferable that the reference signal producing arrangement produces the reference signal in accordance with the detected image.
摘要翻译： 在用于光学读取字符图像以产生表示字符图像的字符信号的光学字符读取装置中，对照和判断电路（22）将修改的图像与存储在字典（21）中的每个预定参考图像进行比较。 字符检测装置（11,12）检测字符图像以产生检测到的图像。 删除装置（15,16）部分地删除检测到的图像以产生部分删除的图像。 修改装置（17,18）通过使用在参考信号产生装置（13,14）中产生的参考信号将部分删除的图像修改成修改的图像。 优选地，参考信号产生装置根据检测到的图像产生参考信号。
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公开(公告)号：US20090262340A1
公开(公告)日：2009-10-22
申请号：US12426562
申请日：2009-04-20
IPC分类号： G01N21/88
CPC分类号： G01N21/956 , G01N2021/95676
摘要： An inspected object (e.g., a reticle) is stored in an immersion cassette filled with a liquid having a specific refraction factor. An inspection beam is irradiated toward the inspected object, which is subjected to precise positioning, via an objective lens while being refracted by the liquid, thus producing a reflected inspection beam reflected by the inspected object and a transmitted inspection beam transmitted through the inspected object. Image processing is performed based on at least one of the reflected inspection beam and the transmitted inspection beam, thus producing an inspected image of the inspected object. The inspected image is compared with a prescribed circuit pattern so as to inspect the existence and nonexistence of foreign matter or structural defects on the exterior of the inspected object. Thus, it is possible to secure an adequate focal depth of the objective lens while achieving a high resolution in imaging the inspected object.
摘要翻译： 检查对象（例如，掩模版）被存储在填充有具有特定折射系数的液体的浸没盒中。 在被液体折射的同时，通过物镜对经过精确定位的被检查物体照射检查光束，从而产生被被检查物体反射的反射检查光束和透过被检查物体的透射检查光束。 基于反射的检查光束和透射的检查光束中的至少一个进行图像处理，从而产生被检查对象的检查图像。 将被检查的图像与规定的电路图案进行比较，以检查被检查物体的外部存在和不存在异物或结构缺陷。 因此，可以确保物镜的足够的焦深，同时在被检查物体成像时实现高分辨率。
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公开(公告)号：US07773213B2
公开(公告)日：2010-08-10
申请号：US12426562
申请日：2009-04-20
CPC分类号： G01N21/956 , G01N2021/95676
摘要： An inspected object (e.g., a reticle) is stored in an immersion cassette filled with a liquid having a specific refraction factor. An inspection beam is irradiated toward the inspected object, which is subjected to precise positioning, via an objective lens while being refracted by the liquid, thus producing a reflected inspection beam reflected by the inspected object and a transmitted inspection beam transmitted through the inspected object. Image processing is performed based on at least one of the reflected inspection beam and the transmitted inspection beam, thus producing an inspected image of the inspected object. The inspected image is compared with a prescribed circuit pattern so as to inspect the existence and nonexistence of foreign matter or structural defects on the exterior of the inspected object. Thus, it is possible to secure an adequate focal depth of the objective lens while achieving a high resolution in imaging the inspected object.
摘要翻译： 检查对象（例如，掩模版）被存储在填充有具有特定折射系数的液体的浸没盒中。 在被液体折射的同时，通过物镜对经过精确定位的被检查物体照射检查光束，从而产生被被检查物体反射的反射检查光束和透过被检查物体的透射检查光束。 基于反射的检查光束和透射的检查光束中的至少一个进行图像处理，从而产生被检查对象的检查图像。 将被检查的图像与规定的电路图案进行比较，以检查被检查物体的外部存在和不存在异物或结构缺陷。 因此，可以确保物镜的足够的焦深，同时在被检查物体成像时实现高分辨率。
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公开(公告)号：US5887072A
公开(公告)日：1999-03-23
申请号：US804841
申请日：1997-02-24
CPC分类号： G06K9/6292
摘要： A full address reading apparatus includes a Japanese full address reader, an English full address reader, and a selector. The Japanese full address reader reads a full address under an assumption that a postal code and address are written on a mail item as a read target in a format using Japanese language. The English full address reader reads a full address under an assumption that a postal code and address are written on a mail item as a read target in a format using English Language. The selector determines reliability levels of read results for the same read target from the Japanese and English full address readers and selects and outputs a read result having a higher reliability level from the read results from the Japanese and English full address readers.
摘要翻译： 全地址读取装置包括日语全地址读取器，英文全地址读取器和选择器。 日语完整地址读取器读取完整地址，假设邮政编码和地址以使用日语的格式作为读取目标写入邮件项目。 英文全地址阅读器读取完整地址，假设邮政编码和地址以使用英语的格式作为读取目标写入邮件项目。 选择器确定来自日文和英文全地址读取器的相同读取目标的读取结果的可靠性水平，并从日语和英语全地址读取器的读取结果中选择并输出具有更高可靠性水平的读取结果。
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